Zoom Microscope Based Micropositioning For Mems Sensor Packaging System

• doi: 10.1109/IECON.2006.347250
• title: Zoom Microscope Based Micropositioning for MEMS Sensor Packaging System
• publisher: IEEE
• isbn: 978-1-5090-9155-3
• issn: 1553-572X
• rank: 4033
• access_type: LOCKED
• content_type: Conferences
• abstract: This paper presents a zoom microscope based micropositioning system using feedback of multiple magnification images caught through a CMOS cameras mounted on an optical microscope. The requirement for real-time autofocusing for zoom microscope is proposed based on the analysis of zoom microscope model. In order to guarantee the accurate micropositioning of MEMS sensor packaging system, high magnification optical microscope is used. However, the small field-of-view of optical microscope essentially limits the workspace of the micromanipulator and the low depth-of-field makes it difficult to handle micro parts. To overcome these obstacles and increase the precision of micropositioning system, a zoom microscope is chosen to gain multiple magnification images. With low magnification, objects can be identified and located roughly. The precise position of objects can be calculated accurately with high magnification image. At last the autofocusing experiment and micro parts centering experiments are executed based on the micropositioning strategy. This micropositioning method, which base on zoom microscope, can also be used in micromanipulation and microassembly system
• article_number: 4153192
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=4153192
• html_url: https://ieeexplore.ieee.org/document/4153192/
• abstract_url: https://ieeexplore.ieee.org/document/4153192/
• publication_title: IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics
• conference_location: Paris, France
• conference_dates: 6-10 Nov. 2006
• publication_number: 4152824
• is_number: 4152825
• publication_year: 2006
• publication_date: 6-10 Nov. 2006
• start_page: 3863
• end_page: 3867
• citing_paper_count: 1
• citing_patent_count: 0
• download_count: 99
• insert_date: 20070416
• index_terms:
  • ieee_terms:
    • Micromechanical devices
    • Sensor systems
    • Packaging
    • Optical microscopy
    • Optical feedback
    • Optical sensors
    • CMOS image sensors
    • Cameras
    • Semiconductor device modeling
    • Micromanipulators
  • dynamic_index_terms:
    • Zoom Microscope
    • Light Microscopy
    • Optical Microscope
    • High Magnification
    • Multiple Images
    • Low Magnification
    • Object Position
    • Image Processing
    • Data Visualization
    • Objective Lens
    • Objective Lenses
    • Microscope Objective
    • Numerical Aperture
    • Object Recognition
    • Precise Information
    • Precision Of Information
    • Image Space
    • Focal Position
    • Focus Position
    • Local Focus
    • Low Magnification Images
    • Lens System
    • Expansion Ratio
• isbn_formats:
  • format: Electronic ISBN, value: 978-1-5090-9155-3, isbnType: New-2005
• authors:
  • Author Name: Chen Liguo
    Affiliation: Harbin Institute of Technology, Robotics Institute, Harbin, China
    Author URL: https://ieeexplore.ieee.org/author/37293728400
    ID: 37293728400
    Order: 1
    Author Affiliations:
    • Harbin Institute of Technology, Robotics Institute, Harbin, China
  • Author Name: Ma Lingyu
    Affiliation: Harbin Institute of Technology, Robotics Institute, Harbin, China
    Author URL: https://ieeexplore.ieee.org/author/37293730200
    ID: 37293730200
    Order: 2
    Author Affiliations:
    • Harbin Institute of Technology, Robotics Institute, Harbin, China
  • Author Name: Sun Lining
    Affiliation: Harbin Institute of Technology, Robotics Institute, Harbin, China
    Author URL: https://ieeexplore.ieee.org/author/37271360300
    ID: 37271360300
    Order: 3
    Author Affiliations:
    • Harbin Institute of Technology, Robotics Institute, Harbin, China
  • Author Name: Rong Weibin
    Affiliation: Harbin Institute of Technology, Robotics Institute, Harbin, China
    Author URL: https://ieeexplore.ieee.org/author/37293731000
    ID: 37293731000
    Order: 4
    Author Affiliations:
    • Harbin Institute of Technology, Robotics Institute, Harbin, China

Image Sensor

• sensor_type: CMOS
• resolution: 640x480
• dynamic_range: N/A
• pixel_size: N/A
• dark_current: N/A

Optical Data

• focal_length: N/A
• aperture: N/A
• field_of_view: N/A
• distortion: N/A

Performance Metrics

• frame_rate: N/A
• signal_to_noise_ratio: N/A
• sensitivity: N/A
• shutter_speed: N/A
• power_consumption: N/A
• noise: N/A

Applications & Benefits

• cell_imaging: N/A
• benefits: N/A

Supporting Organizations

• supported_by: High Technology Research and Development Programme of China #2005AA404230

Manuscript Details

• publication_date: 6-10 Nov. 2006

Relevancy Score

• score: 8
• missing_fields:
  • fill factor
  • quantum efficiency
  • readout speed
  • noise sources

Processed JSON Filename

request_17c0496f-c7fb-4558-bb2d-917384bb346b-zoom_microscope_based_micropositioning_for_mems_sensor_packaging_system.json