Visible Light Sensitivity Enhancement Of Cmos Image Sensor With Pseudo High Refractive Index Film Integrated By Directed Selfassembly Process

• doi: 10.1109/EDTM50988.2021.9420898
• title: Visible Light Sensitivity Enhancement of CMOS Image Sensor with Pseudo High Refractive Index Film Integrated by Directed Self-Assembly Process
• publisher: IEEE
• isbn: 978-1-7281-8177-6
• issn:
• rank: 3970
• access_type: LOCKED
• content_type: Conferences
• abstract: We have developed a back-illuminated CMOS image sensor (BI -CIS) using a pseudo high refractive index film (pHRF) consisting of an array of minute holes. The new process architecture for the low reflectivity surface is achieved by integrating the directed self-assembly (DSA) process with the conventional process. This is the first report of an image sensor fabricated using the DSA process. The proposed sensor has low dark current and has enhanced sensitivity for wavelengths ranging from 400 nm to 550 nm.
• article_number: 9420898
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9420898
• html_url: https://ieeexplore.ieee.org/document/9420898/
• abstract_url: https://ieeexplore.ieee.org/document/9420898/
• publication_title: 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
• conference_location: Chengdu, China
• conference_dates: 8-11 April 2021
• publication_number: 9420829
• is_number: 9420830
• publication_year: 2021
• publication_date: 8-11 April 2021
• start_page: 1
• end_page: 3
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 1725
• insert_date: 20210512
• index_terms:
  • ieee_terms:
    • Reflectivity
    • Sensitivity
    • Self-assembly
    • Surface waves
    • Refractive index
    • Dark current
    • CMOS image sensors
  • dynamic_index_terms:
    • Visible Light
    • Visible Region
    • Visible Spectrum
    • Visible-light
    • Refractive Index
    • Refractive Indices
    • Image Sensor
    • Camera Sensor
    • Directed Self-assembly
    • Directed Self-assembly Process
    • Wavelength Range
    • Range Of Wavelengths
    • Low Reflectance
    • Dark Current
    • Processing Architecture
    • Hole Array
    • Low Dark Current
    • Wavelength Of Light
    • Wavelengths Of Light
    • Quantum Efficiency
    • Process Flow
    • Block Copolymers
    • Hole Diameter
    • Conventional Design
    • Conventional Structure
    • Visible Light Range
    • Visible-light Range
    • Pitch Size
    • Passive Film
    • Dry Etching
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-7281-8177-6, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-7281-8176-9, isbnType: New-2005
• authors:
  • Author Name: I. Oshiyama
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37702307100
    ID: 37702307100
    Order: 1
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Shigetoshi
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37541911600
    ID: 37541911600
    Order: 2
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: I. Mita
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088860972
    ID: 37088860972
    Order: 3
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: N. Sumitani
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088862041
    ID: 37088862041
    Order: 4
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Oinoue
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086288391
    ID: 37086288391
    Order: 5
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: S. Saito
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/38238076100
    ID: 38238076100
    Order: 6
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Okawa
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088861491
    ID: 37088861491
    Order: 7
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: Y. Ebiko
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37333274000
    ID: 37333274000
    Order: 8
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: K. Yokochi
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088862008
    ID: 37088862008
    Order: 9
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: Y. Kitano
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37085829248
    ID: 37085829248
    Order: 10
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: Y. Hagimoto
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37297581900
    ID: 37297581900
    Order: 11
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Hirano
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37285319700
    ID: 37285319700
    Order: 12
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: H. Iwamoto
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37297571400
    ID: 37297571400
    Order: 13
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan

Image Sensor

• sensor_type: CMOS
• resolution: 20 Mega pixels (1.4 μm pitch)
• dynamic_range: not specified
• pixel_size: 1.4 μm
• dark_current: equivalent to conventional structure (exact value not specified)

Optical Data

• focal_length: not specified
• aperture: not specified
• field_of_view: not specified
• distortion: not specified

Performance Metrics

• signal_to_noise_ratio: higher due to increased quantum efficiency

Applications & Benefits

• cell_imaging: enabled enhanced sensitivity for wavelengths from 400 nm to 550 nm
• benefits: Improvement in quantum efficiency (QE) and signal-to-noise ratio (SNR) with the new pHRF structure

Supporting Organizations

• supported_by: Sony Semiconductor Solutions Corp.

Manuscript Details

• publication_date: 8-11 April 2021

Relevancy Score

• score: 10
• missing_fields:
  • dynamic_range
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_192f3146-9c91-40c9-aa61-a96fabac9381-visible_light_sensitivity_enhancement_of_cmos_image_sensor_with_pseudo_high_refractive_index_film_integrated_by_directed_selfassembly_process.json