Visible And Nearir Nanooptical Components And Systems In Cmos

• doi: 10.1109/OJSSCS.2021.3116563
• title: Visible and Near-IR Nano-Optical Components and Systems in CMOS
• publisher: IEEE
• isbn:
• issn: 2644-1349
• rank: 3971
• access_type: CCBY - IEEE is not the copyright holder of this material. Please follow the instructions via https://creativecommons.org/licenses/by/4.0/ to obtain full-text articles and stipulations in the API documentation.
• content_type: Journals
• abstract: Integration of complex optical systems operating in the visible and near-IR range (VIS/NIR), realized in a CMOS fabrication process in an absolutely ‘no change’ approach, can have a transformative impact in enabling a new class of miniaturized, low-cost, smart optical sensors and imagers for emerging applications. While ‘silicon photonics’ has demonstrated the path towards such advancements in the IR range, the field of VIS/NIR integrated optics has seen less progress. Therefore, while currently ultra high-density and higher performance image sensors are commonplace in CMOS, all passive optical components (such as lenses, filters, gratings, collimators) that typically constitute a high-performance sensing or imaging system, are non-integrated, bulky and expensive, severely limiting their application domains. Here, we present an approach to utilize the embedded copper-based metal interconnect layers in modern CMOS processes with sub-wavelength feature sizes to realize multi-functional nano-optical structures and components. Based on our prior works, we illustrate this electronic-photonic co-design approach exploiting metal/light interactions and integrated electronics in the 400nm-900 nm wavelengths with three design examples. Realized in 65-nm CMOS, these demonstrate for the first time: fully integrated multiplexed fluorescence based biosensors with integrated filters, optical spectrometer, and CMOS optical physically unclonable function (PUF). These examples cover a range of optical processing elements in silicon, from deep sub-wavelength nano-optics to diffractive structures. We will demonstrate that when co-designed with embedded photo-detection and signal processing circuitry, this approach can lead to a new class of millimeter-scale, intelligent optical sensors for a wide range of emerging applications in healthcare, diagnostics, smart sensing, food, air quality, environment monitoring and others.
• article_number: 9552953
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9552953
• html_url: https://ieeexplore.ieee.org/document/9552953/
• abstract_url: https://ieeexplore.ieee.org/document/9552953/
• publication_title: IEEE Open Journal of the Solid-State Circuits Society
• conference_location:
• conference_dates:
• publication_number: 8782712
• is_number: 8816720
• publication_year: 2021
• publication_date: 2021
• start_page: 247
• end_page: 262
• citing_paper_count: 3
• citing_patent_count: 0
• download_count: 1378
• insert_date: 20210930
• index_terms:
  • ieee_terms:
    • Optical sensors
    • Biomedical optical imaging
    • Optical imaging
    • Optical signal processing
    • Optical scattering
    • Integrated optics
    • Sensors
    • Integrated optics
    • Spectroscopy
    • Biosensors
    • Photodetectors
    • Photonic crystals
  • author_terms:
    • Integrated optics
    • nanophotonics
    • nano-optics
    • visible optics
    • near-IR
    • biosensor
    • CMOS imager
    • fluorescence
    • metal optics
    • microarray
    • nanoplasmonics
    • spectroscopy
    • dispersion
    • fluorescence
    • gratings
    • photodetecton
    • spectrometry
    • waveguides
    • CMOS imager
    • physically unclonable functions (PUFs)
    • photonic crystals
    • CMOS
  • dynamic_index_terms:
    • Spectroscopic
    • Spectrogram
    • Signal Processing
    • Optical System
    • Optical Devices
    • Air Quality
    • Feature Size
    • Size Characteristics
    • Collimator
    • Optical Sensors
    • Image Sensor
    • Camera Sensor
    • Optical Processing
    • Optical Signal Processing
    • Optical Calculations
    • Optical Computing
    • Optical Components
    • Photonic Integrated Circuits
    • Integrated Optics
    • Photonic Chip
    • CMOS Process
    • Diffraction Structure
    • Silicon Photonics
    • Interconnecting Layer
    • Physical Unclonable Functions
    • Fluorescence Signal
    • Least Squares Estimation
    • Optical Path
    • Presence Of Noise
    • Surface Plasmon Polaritons Mode
    • Optical Structure
    • Aluminum Nitride
    • Spectral Estimation
    • Spectral Calculations
    • Spectral Approximation
    • Optical Signal
    • Passive Structures
    • Multiple Chips
    • Sensor Array
    • Metal Layer
    • Metallic Layer
    • Optical Frequency
• authors:
  • Author Name: Kaushik Sengupta
    Affiliation: Department of Electrical and Computer Engineering, Princeton University, Princeton, NJ, USA
    Author URL: https://ieeexplore.ieee.org/author/37545750600
    ID: 37545750600
    Order: 1
    Author Affiliations:
    • Department of Electrical and Computer Engineering, Princeton University, Princeton, NJ, USA
  • Author Name: Lingyu Hong
    Affiliation: Apple Inc., Cupertino, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085764518
    ID: 37085764518
    Order: 2
    Author Affiliations:
    • Apple Inc., Cupertino, CA, USA
  • Author Name: Chengjie Zhu
    Affiliation: Department of Electrical and Computer Engineering, Princeton University, Princeton, NJ, USA
    Author URL: https://ieeexplore.ieee.org/author/37086921575
    ID: 37086921575
    Order: 3
    Author Affiliations:
    • Department of Electrical and Computer Engineering, Princeton University, Princeton, NJ, USA
  • Author Name: Xuyang Lu
    Affiliation: University of Michigan–Shanghai Jiaotong Joint Institute, Minhang, Shanghai, China
    Author URL: https://ieeexplore.ieee.org/author/37085997000
    ID: 37085997000
    Order: 4
    Author Affiliations:
    • University of Michigan–Shanghai Jiaotong Joint Institute, Minhang, Shanghai, China

Image Sensor

• sensor_type: CMOS
• resolution: not specified in the text
• dynamic_range: not specified in the text
• pixel_size: not specified in the text
• dark_current: not specified in the text

Optical Data

• focal_length: not specified in the text
• aperture: not specified in the text
• field_of_view: not specified in the text
• distortion: not specified in the text

Performance Metrics

• frame_rate: not specified in the text
• signal_to_noise_ratio: not specified in the text
• sensitivity: not specified in the text
• shutter_speed: not specified in the text
• power_consumption: not specified in the text
• noise: not specified in the text

Applications & Benefits

• cell_imaging: not specified in the text
• benefits: Enables digital imaging in various applications such as smartphones, medical devices, and automotive systems.

Supporting Organizations

• supported_by: National Science Foundation; Princeton Catalysis Initiative; Qualcomm Innovation Fellowship

Manuscript Details

• publication_date: 2021

Relevancy Score

• score: 7
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

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