Ultrafast Laser Processing Of Semiconductor Devices

• doi: 10.1364/CLEO_AT.2011.AMD1
• title: Ultrafast laser processing of semiconductor devices
• publisher: IEEE
• isbn: 978-1-55752-910-7
• issn: 2160-8989
• partnum: 11CH38895
• rank: 3928
• access_type: LOCKED
• content_type: Conferences
• abstract: SiOnyx is developing ultrafast laser processing techniques that improve the performance of semiconductor based photodetectors, solar cells, and image sensors. Ultrafast laser processing offers the unique ability to locally engineer the structural and doping characteristics of semiconductor devices and avoid adverse side effects. Ultrafast laser processing is incorporated into a variety of devices to increase the collection of longer wavelength light and improve quantum efficiency while maintaining scalability and CMOS compatibility.
• article_number: 5950024
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5950024
• html_url: https://ieeexplore.ieee.org/document/5950024/
• abstract_url: https://ieeexplore.ieee.org/document/5950024/
• publication_title: CLEO: 2011 - Laser Science to Photonic Applications
• conference_location: Baltimore, MD, USA
• conference_dates: 1-6 May 2011
• publication_number: 5876646
• is_number: 5950009
• publication_year: 2011
• publication_date: 1-6 May 2011
• start_page: 1
• end_page: 1
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 155
• insert_date: 20110714
• index_terms:
  • ieee_terms:
    • Silicon
    • Semiconductor lasers
    • Photovoltaic cells
    • Image sensors
    • Photovoltaic systems
    • Performance evaluation
    • Charge coupled devices
  • dynamic_index_terms:
    • Optical Pulse
    • Ultrashort Pulses
    • Ultrafast Laser
    • Femtosecond Pulses
    • Thin Layer
    • Solar Cells
    • Near-infrared
    • Quantum Efficiency
    • Image Sensor
    • Camera Sensor
    • Shortwave Infrared
    • Solar Cell Applications
    • Silicon Solar Cells
    • Silicon Cells
    • Micron Thickness
    • Micrometer Thickness
• isbn_formats:
  • format: CD, value: 978-1-55752-910-7, isbnType: New-2005
  • format: Print ISBN, value: 978-1-4577-1223-4, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-55752-911-4, isbnType: New-2005
• authors:
  • Author Name: J. E. Carey
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37084634000
    ID: 37084634000
    Order: 1
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: M. U. Pralle
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/38315217800
    ID: 38315217800
    Order: 2
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: C. J. Vineis
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37090032075
    ID: 37090032075
    Order: 3
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: J. McKee
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37713252600
    ID: 37713252600
    Order: 4
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: S. Alie
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37088683788
    ID: 37088683788
    Order: 5
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: J. W. Sickler
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37265392000
    ID: 37265392000
    Order: 6
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: X. Li
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37089073031
    ID: 37089073031
    Order: 7
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: J. Jiang
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37089090010
    ID: 37089090010
    Order: 8
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: D. Miller
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37308647300
    ID: 37308647300
    Order: 9
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: C. Palsule
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37320518400
    ID: 37320518400
    Order: 10
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA
  • Author Name: H. Haddad
    Affiliation: SiOnyx, Inc., Beverly, MA, USA
    Author URL: https://ieeexplore.ieee.org/author/37087456954
    ID: 37087456954
    Order: 11
    Author Affiliations:
    • SiOnyx, Inc., Beverly, MA, USA

Image Sensor

• sensor_type: CMOS
• resolution: Not specified in the text
• dynamic_range: Not specified in the text
• pixel_size: Not specified in the text
• dark_current: Not specified in the text

Optical Data

• focal_length: Not specified in the text
• aperture: Not specified in the text
• field_of_view: Not specified in the text
• distortion: Not specified in the text

Performance Metrics

• frame_rate: Not specified in the text
• signal_to_noise_ratio: Not specified in the text
• sensitivity: Not specified in the text
• shutter_speed: Not specified in the text
• power_consumption: Not specified in the text
• noise: Not specified in the text

Applications & Benefits

• cell_imaging: Not specified in the text
• benefits: High performance image sensors that are less costly than CCD solutions.

Supporting Organizations

• supported_by: SiOnyx, Inc.

Manuscript Details

• publication_date: 1-6 May 2011

Relevancy Score

• score: 8
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging

Processed JSON Filename

request_48548008-adb9-46c4-8783-5e263c572608-ultrafast_laser_processing_of_semiconductor_devices.json