Towards Highresolution Xray Imaging Using A Structured Scintillator
- doi: 10.1109/TNS.2011.2177477
-
title: Towards High-Resolution X-Ray Imaging Using a
Structured Scintillator
- publisher: IEEE
- isbn:
- issn: 1558-1578
- rank: 3880
- access_type: LOCKED
- content_type: Journals
-
abstract: Structured scintillators, by light-guiding
secondary emitted visible photons to a pixel in a CCD or CMOS image
sensor, improve the lateral resolution of X-ray imaging detectors. In
this work we have fabricated pore arrays in a silicon wafer and
subsequently filled them with CsI(Tl) by a melting process. The goal was
to down-scale the pore geometry for increased resolution. The results
show that although pore depth must be reduced to comply with achievable
aspect ratio of the Inductively Coupled Plasma (ICP) etching, melting
into the pores is possible. The time and temperature has, however, to be
optimized to prevent thallium loss during the melting. By correlating
light yield measurements with the X-ray absorption in samples of various
geometries, we find that the efficiency is slightly reduced for pore
diameters approaching one micron. Nevertheless, the increased absorption
in deep pores will lead to a significantly improved quantum efficiency
compared to thin films currently used to achieve the same lateral
resolution.
- article_number: 6125227
-
pdf_url:
https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6125227
-
html_url:
https://ieeexplore.ieee.org/document/6125227/
-
abstract_url:
https://ieeexplore.ieee.org/document/6125227/
-
publication_title: IEEE Transactions on Nuclear Science
- conference_location:
- conference_dates:
- publication_number: 23
- is_number: 6146807
- publication_year: 2012
- publication_date: Feb. 2012
- start_page: 19
- end_page: 23
- citing_paper_count: 9
- citing_patent_count: 2
- download_count: 640
- insert_date: 20120106
-
index_terms:
-
ieee_terms:
- X-ray imaging
- Absorption
- Detectors
- Silicon
- Arrays
- Photonics
- Temperature measurement
-
author_terms:
- Scintillation detectors
- waveguides
- X-ray imaging technologies
-
dynamic_index_terms:
- High-resolution
- High-resolution X-ray Imaging
- High-resolution X-ray Tomography
- CCD Camera
- Charge-coupled Device
- Inductively Coupled Plasma
- ICP-MS
- Inductively Coupled Plasma Mass Spectrometry
- Aspect Ratio
- Silicon Wafer
- Downscaling
- X-ray Absorption
- Lateral Resolution
- Light Output
- Light Yield
- Absorption Of Samples
- Visible Photons
- Porous Arrays
- Array Of Pores
- Scanning Electron Microscopy
- Layer Thickness
- Visible Light
- Visible Region
- Visible Spectrum
- Low Efficiency
- Fabrication Process
- High Aspect Ratio
- Charge-coupled Device Detector
- Electrochemical Etching
- Cesium Iodide
- Pore Walls
- Porous Wall
- Indirect Detection
- Thick Oxide Layer
- Hexagonal Array
-
authors:
-
Author Name: Yashar Hormozan
Affiliation: Royal Institute of Technology,
Stockholm, Sweden
Author URL:
https://ieeexplore.ieee.org/author/38234487600
ID: 38234487600
Order: 1
Author Affiliations:
- Royal Institute of Technology, Stockholm, Sweden
-
Author Name: Sang-Ho Yun
Affiliation: Royal Institute of Technology,
Stockholm, Sweden
Author URL:
https://ieeexplore.ieee.org/author/37609852800
ID: 37609852800
Order: 2
Author Affiliations:
- Royal Institute of Technology, Stockholm, Sweden
-
Author Name: Olof Svenonius
Affiliation: Scint-X AB, Stockholm, Sweden
Author URL:
https://ieeexplore.ieee.org/author/38234487900
ID: 38234487900
Order: 3
Author Affiliations:
- Scint-X AB, Stockholm, Sweden
-
Author Name: Jan Linnros
Affiliation: Royal Institute of Technology,
Stockholm, Sweden
Author URL:
https://ieeexplore.ieee.org/author/37272260000
ID: 37272260000
Order: 4
Author Affiliations:
- Royal Institute of Technology, Stockholm, Sweden
Image Sensor
- sensor_type: CCD/CMOS
- resolution: unknown
- dynamic_range: unknown
- pixel_size: 3-20 µm
- dark_current: unknown
Optical Data
- focal_length: unknown
- aperture: f/2.8
- field_of_view: unknown
- distortion: unknown
Performance Metrics
- frame_rate: unknown
- signal_to_noise_ratio: unknown
- sensitivity: ISO
- shutter_speed: unknown
- power_consumption: unknown
- noise: unknown
Applications & Benefits
- cell_imaging: unknown
-
benefits: Improved lateral resolution in X-ray imaging
and materials analysis.
Supporting Organizations
-
supported_by: Swedish Strategic Research Council (SSF)
Manuscript Details
- publication_date: Feb. 2012
Relevancy Score
- score: 6
-
missing_fields:
- resolution
- dynamic_range
- dark_current
- focal_length
- field_of_view
- distortion
- frame_rate
- signal_to_noise_ratio
- shutter_speed
- power_consumption
- noise
Processed JSON Filename
request_acbb505e-2bad-45e1-8c2c-695fb4ce6615-towards_highresolution_xray_imaging_using_a_structured_scintillator.json