Threedimensional Photoacoustic Imaging By A Cmos Micromachined Capacitive Ultrasonic Sensor

• doi: 10.1109/LED.2011.2157655
• title: Three-Dimensional Photoacoustic Imaging by a CMOS Micromachined Capacitive Ultrasonic Sensor
• publisher: IEEE
• isbn:
• issn: 1558-0563
• rank: 3841
• access_type: LOCKED
• content_type: Journals
• abstract: In this letter, we demonstrate the feasibility of 3-D photoacoustic imaging using a monolithic CMOS micromachined capacitive ultrasonic sensor. The sensing membranes are released by a post-CMOS metal etch and sealed by silicon dioxide. Nine membranes, each with an inner diameter of 60 μm, form a single detection unit with a capacitance value of 292.5 fF. A 6- μm carbon fiber was employed to evaluate the 3-D photoacoustic imaging capability and resolution of our sensor. A 2-D large-aperture array was emulated by 2-D mechanical scanning of a single sensing element with a scanning step of 120 μm. A 2-D synthetic aperture focusing technique was used for image reconstruction. The measured -6-dB spatial resolutions were 181 μm in axial and 448 μm in lateral, respectively, at the depth of ~ 2.4 cm. The 3-D photoacoustic image of a carbon fiber phantom was successfully produced.
• article_number: 5873118
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5873118
• html_url: https://ieeexplore.ieee.org/document/5873118/
• abstract_url: https://ieeexplore.ieee.org/document/5873118/
• publication_title: IEEE Electron Device Letters
• conference_location:
• conference_dates:
• publication_number: 55
• is_number: 5961166
• publication_year: 2011
• publication_date: Aug. 2011
• start_page: 1149
• end_page: 1151
• citing_paper_count: 9
• citing_patent_count: 1
• download_count: 590
• insert_date: 20110613
• index_terms:
  • ieee_terms:
    • Imaging
    • Sensors
    • CMOS integrated circuits
    • Carbon
    • Acoustics
    • Arrays
    • Image resolution
  • author_terms:
    • Capacitive sensors
    • CMOS technology
    • microelectromechanical systems (MEMS)
    • photoacoustic imaging
  • dynamic_index_terms:
    • Photoacoustic Imaging
    • Optoacoustic
    • Photoacoustic Tomography
    • Capacitive Sensor
    • Ultrasonic Sensors
    • Ultrasonic Detection
    • Image Reconstruction
    • Iterative Reconstruction
    • Tomographic Reconstruction
    • Carbon Fiber
    • Carbon Fiber Reinforced Polymer
    • Imaging Capability
    • Electrode
    • Low-pass
    • Low-pass Filter
    • 3D Images
    • Sensor Array
    • CMOS Process
    • Volume Dataset
    • Volume Data Sets
• authors:
  • Author Name: Meng-Lin Li
    Affiliation: Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37278837300
    ID: 37278837300
    Order: 1
    Author Affiliations:
    • Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan
  • Author Name: Po-Hsun Wang
    Affiliation: Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37965004500
    ID: 37965004500
    Order: 2
    Author Affiliations:
    • Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan
  • Author Name: Pei-Liang Liao
    Affiliation: Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37971866500
    ID: 37971866500
    Order: 3
    Author Affiliations:
    • Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu, Taiwan
  • Author Name: Michael S.-C. Lu
    Affiliation: Department of Electrical Engineering, the Institute of Electronics Engineering, and the Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37276887400
    ID: 37276887400
    Order: 4
    Author Affiliations:
    • Department of Electrical Engineering, the Institute of Electronics Engineering, and the Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu, Taiwan

Image Sensor

• sensor_type: CMOS
• resolution: Not specified in the paper
• dynamic_range: Not specified in the paper
• pixel_size: Not specified in the paper
• dark_current: Not specified in the paper

Optical Data

• focal_length: Not specified in the paper
• aperture: Not specified in the paper
• field_of_view: Not specified in the paper
• distortion: Not specified in the paper

Performance Metrics

• frame_rate: Not specified in the paper
• signal_to_noise_ratio: Not specified in the paper
• sensitivity: Not specified in the paper
• shutter_speed: Not specified in the paper
• power_consumption: Not specified in the paper
• noise: Not specified in the paper

Applications & Benefits

• cell_imaging: Not specified in the paper
• benefits: Not specified in the paper

Supporting Organizations

• supported_by: National Science Council, Taiwan; National Tsing Hua University, Taiwan

Manuscript Details

• publication_date: Aug. 2011

Relevancy Score

• score: 6
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging
  • benefits

Processed JSON Filename

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