Thinfilm Photodetector Optimization For Highperformance Shortwavelength Infrared Imaging

• doi: 10.1109/LED.2021.3093081
• title: Thin-Film Photodetector Optimization for High-Performance Short-Wavelength Infrared Imaging
• publisher: IEEE
• isbn:
• issn: 1558-0563
• rank: 3835
• access_type: LOCKED
• content_type: Journals
• abstract: In this letter, we present a small pixel pitch image sensor optimized for high external quantum efficiency in short-wavelength infrared (SWIR). Thin-film photodiodes based on PbS colloidal quantum dot (CQD) absorber allow us to exceed the spectral limitations of silicon’s absorption while maintaining the benefits of CMOS technology. By monolithically integrating PbS CDQ thin films with CMOS readout arrays, high-pixel density SWIR image sensors can be achieved. To overcome the remaining disadvantages of the CQD-based image sensors over their bulk III-V semiconductor counterparts (lower sensitivity and reduced linearity), the thin-film photodiode stack is adapted towards the used readout circuit. A prototype image sensor with a $768\times 512$ resolution of 5- $\mu \text{m}$ pitch pixels is fabricated by using a modified 130 nm CMOS process for readout IC, together with the new CQD thin-film photodiode on top. Thanks to the optimized photodiode stack and co-integration process, the prototype image sensor shows less than 5% linearity error while having 40% external quantum efficiency in SWIR, which enables acquisition of high-quality images.
• article_number: 9466852
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9466852
• html_url: https://ieeexplore.ieee.org/document/9466852/
• abstract_url: https://ieeexplore.ieee.org/document/9466852/
• publication_title: IEEE Electron Device Letters
• conference_location:
• conference_dates:
• publication_number: 55
• is_number: 9495842
• publication_year: 2021
• publication_date: Aug. 2021
• start_page: 1196
• end_page: 1199
• citing_paper_count: 39
• citing_patent_count: 0
• download_count: 2711
• insert_date: 20210628
• index_terms:
  • ieee_terms:
    • Photodiodes
    • Image sensors
    • Photodetectors
    • Lead
    • Dark current
    • Imaging
    • Linearity
  • author_terms:
    • SWIR image sensor
    • high-resolution infrared imaging
    • thin-film photodetectors
    • colloidal quantum dots
  • dynamic_index_terms:
    • Short-wavelength Infrared
    • Thin Film Photodetector
    • Image Sensor
    • Camera Sensor
    • Linear Error
    • Pixel Pitch
    • Colloidal Quantum Dots
    • High External Quantum Efficiency
    • Readout Circuit
    • Electrode
    • Light Absorption
    • Solar Cells
    • Active Layer
    • Analog-to-digital Converter
    • Analog-to-digital
    • Digital-to-analog Converter
    • Bias Voltage
    • Indium Tin Oxide
    • Indium-tin-oxide
    • Trap States
    • Dark Current
    • Machine Vision
    • Visual Navigation
    • Band Diagram
    • Pixel Array
    • Thin-film Solar Cells
    • Thin-film Solar
    • Thin-film Cells
    • Thin Film Solar Cells
    • Thin-film Technology
    • Homojunction
    • Built-in Field
    • Phototransistor
    • Low Dark Current
    • Voltage Swing
    • Node Voltage
    • Output Pixel
• authors:
  • Author Name: Vladimir Pejović
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37085837251
    ID: 37085837251
    Order: 1
    Author Affiliations:
    • IMEC, Leuven, Belgium
    • Department of Electrical Engineering (ESAT), Katholieke Universiteit Leuven, Leuven, Belgium
  • Author Name: Jiwon Lee
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37086132265
    ID: 37086132265
    Order: 2
    Author Affiliations:
    • IMEC, Leuven, Belgium
  • Author Name: Epimitheas Georgitzikis
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37085761232
    ID: 37085761232
    Order: 3
    Author Affiliations:
    • IMEC, Leuven, Belgium
  • Author Name: Yunlong Li
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37634255600
    ID: 37634255600
    Order: 4
    Author Affiliations:
    • IMEC, Leuven, Belgium
  • Author Name: Joo Hyoung Kim
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37088921721
    ID: 37088921721
    Order: 5
    Author Affiliations:
    • IMEC, Leuven, Belgium
  • Author Name: Itai Lieberman
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37088831319
    ID: 37088831319
    Order: 6
    Author Affiliations:
    • IMEC, Leuven, Belgium
  • Author Name: Paweł E. Malinowski
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37606052100
    ID: 37606052100
    Order: 7
    Author Affiliations:
    • IMEC, Leuven, Belgium
  • Author Name: Paul Heremans
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37268132900
    ID: 37268132900
    Order: 8
    Author Affiliations:
    • IMEC, Leuven, Belgium
    • Department of Electrical Engineering (ESAT), Katholieke Universiteit Leuven, Leuven, Belgium
  • Author Name: David Cheyns
    Affiliation: IMEC, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37319388700
    ID: 37319388700
    Order: 9
    Author Affiliations:
    • IMEC, Leuven, Belgium

Image Sensor

• sensor_type: CMOS
• resolution: 768x512
• dynamic_range: N/A
• pixel_size: 5 µm
• dark_current: 790 nA/cm2

Optical Data

• focal_length: N/A
• aperture: N/A
• field_of_view: N/A
• distortion: N/A

Performance Metrics

• frame_rate: N/A
• signal_to_noise_ratio: N/A
• sensitivity: N/A
• shutter_speed: N/A
• power_consumption: N/A
• noise: 2.4% PRNU

Applications & Benefits

• cell_imaging: Applications include agriculture, machine vision, and surveillance, with benefits in resolution and cost-effectiveness compared to InGaAs-based sensors.
• benefits: High external quantum efficiency (EQE) of 40% at 1450 nm and linearity error <5%.

Supporting Organizations

• supported_by: IMEC, Katholieke Universiteit Leuven, Belgium.

Manuscript Details

• publication_date: Aug. 2021

Relevancy Score

• score: 9
• missing_fields:
  • pixel fill factor
  • readout speed
  • noise sources
  • analog-to-digital conversion techniques
  • microlenses
  • on-chip colour filters
  • global or rolling shutters
  • backside illumination

Processed JSON Filename

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