The Electrothermal Properties Of Integrated Circuit Microbolometers

• doi: 10.23919/SAIEE.2011.8532183
• title: The Electro-Thermal Properties of Integrated Circuit Microbolometers
• publisher: SAIEE
• isbn:
• issn: 1991-1696
• rank: 3766
• access_type: OPEN_ACCESS
• content_type: Journals
• abstract: The use of uncooled infrared sensors in thermal imaging is a fast growing market in the fields of security and health. The integration of uncooled or room temperature infrared sensors onto a silicon CMOS chip will facilitate the manufacture of large imaging arrays. At the University of Pretoria we are researching the integration of microbolometer infrared sensors onto CMOS readout electronic circuits using post processing techniques. The microbolometer utilises the change in resistance of a temperature sensitive resistive material, e.g. vanadium oxide or a thin metal film, to measure the amount of infrared radiation falling onto the device and heating the device. The microbolometer structure should be thermally isolated from the bulk silicon to achieve the required sensitivity. In this paper we will describe the device structures, as well as the techniques we used to determine experimentally the electrical, thermal and electro-thermal properties of the devices. Of interest to us are the following parameters: 1) temperature coefficient of the bolometer resistive layer, 2) thermal conductivity of the device, 3) thermal capacitance of the total sensor structure and 4) the thermal time constant. The microbolometer thermal characteristics can also be modelled and simulated using CoventorWare software
• article_number: 8532183
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8532183
• html_url: https://ieeexplore.ieee.org/document/8532183/
• abstract_url: https://ieeexplore.ieee.org/document/8532183/
• publication_title: SAIEE Africa Research Journal
• conference_location:
• conference_dates:
• publication_number: 8475037
• is_number: 8532176
• publication_year: 2011
• publication_date: June 2011
• start_page: 40
• end_page: 48
• citing_paper_count: 1
• citing_patent_count: 0
• download_count: 89
• insert_date: 20181217
• index_terms:
  • author_terms:
    • Bolometers
    • infrared imaging
  • dynamic_index_terms:
    • Impedance
    • Resistivity
    • Thin Films
    • Alumina
    • Heat Transfer
    • Heat Flow
    • Heat Loss
    • Atmospheric Pressure
    • Barometric Pressure
    • Sea Level Pressure
    • Air Pressure
    • Thermal Conductivity
    • Heat Conduction
    • Simulated Values
    • Characteristic Length
    • Pressure Conditions
    • Thermal Resistance
    • Area Detector
    • Thermal Parameters
    • Vacuum Conditions
    • Test Device
    • Thermal Detector
    • Transient Behavior
    • Thermal Sensors
    • Thermal Constant
    • Temperature Coefficient Of Resistance
    • Thermoelectric Effect
    • Conductivity Of Gas
    • Gaseous Conduction
    • University Of Pretoria
    • Bias Current
    • Metal Film
    • Thermal Model
    • Thermal Effects
    • Diet-induced Thermogenesis
    • Thermal Events
    • Effective Conductivity
    • Imaging System
    • Microfabrication
    • Micromachining
    • Heat Capacity
    • Specific Heat
    • Thermal Properties
• authors:
  • Author Name: M. du Plessis
    Affiliation: Carl and Emily Fuchs Institute for Microelectronics (CEFIM), Dept. of Electrical, Electronic & Computer Engineering, University of Pretoria, Pretoria 0002, South Africa. E-mail: monuko@up.ac.za
    Author URL:
    ID:
    Order: 1
    Author Affiliations:
    • Carl and Emily Fuchs Institute for Microelectronics (CEFIM), Dept. of Electrical, Electronic & Computer Engineering, University of Pretoria, Pretoria 0002, South Africa. E-mail: monuko@up.ac.za
  • Author Name: J. Schoeman
    Affiliation: Carl and Emily Fuchs Institute for Microelectronics (CEFIM), Dept. of Electrical, Electronic & Computer Engineering, University of Pretoria, Pretoria 0002, South Africa. E-mail: monuko@up.ac.za
    Author URL:
    ID:
    Order: 2
    Author Affiliations:
    • Carl and Emily Fuchs Institute for Microelectronics (CEFIM), Dept. of Electrical, Electronic & Computer Engineering, University of Pretoria, Pretoria 0002, South Africa. E-mail: monuko@up.ac.za
  • Author Name: W. Maclean
    Affiliation: Carl and Emily Fuchs Institute for Microelectronics (CEFIM), Dept. of Electrical, Electronic & Computer Engineering, University of Pretoria, Pretoria 0002, South Africa. E-mail: monuko@up.ac.za
    Author URL:
    ID:
    Order: 3
    Author Affiliations:
    • Carl and Emily Fuchs Institute for Microelectronics (CEFIM), Dept. of Electrical, Electronic & Computer Engineering, University of Pretoria, Pretoria 0002, South Africa. E-mail: monuko@up.ac.za
  • Author Name: C. Schutte
    Affiliation: Denel Aerospace Systems (Detek), P.O. Box 7412. Centurion, 0046, South Africa.
    Author URL:
    ID:
    Order: 4
    Author Affiliations:
    • Denel Aerospace Systems (Detek), P.O. Box 7412. Centurion, 0046, South Africa.

Image Sensor

• sensor_type: CMOS
• resolution: Varies by application
• dynamic_range: Varies by design
• pixel_size: Typically between 1-10 μm
• dark_current: Varies (generally low)

Optical Data

• focal_length: Varies by application (e.g., 4.5mm for smartphone cameras)
• aperture: Varies by lens (e.g., f/1.8 to f/2.8)
• field_of_view: Varies by lens design (e.g., 90° to 120° for wide-angle lenses)
• distortion: Typically low due to design improvements (e.g., <1%)

Performance Metrics

• frame_rate: 30-120 fps depending on application
• signal_to_noise_ratio: Typically 30-40 dB
• sensitivity: ISO 100 to 6400 or higher
• shutter_speed: Varies (e.g., 1/30s to 1/1000s)
• power_consumption: Down to few mW for mobile applications
• noise: Typically <5 e- for low-light conditions

Applications & Benefits

• cell_imaging: Used in medical diagnostic tools and microscopy
• benefits: High sensitivity and resolution, compactness for portable devices, low power consumption

Supporting Organizations

• supported_by: Research credits may include universities and technology firms in semiconductor research.

Manuscript Details

• publication_date: June 2011

Relevancy Score

• score: 9
• missing_fields:
  • authors
  • publication_date

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