Surface Plasmon Resonance For Digital Imaging

• doi: 10.1109/NANO.2012.6321896
• title: Surface plasmon resonance for digital imaging
• publisher: IEEE
• isbn: 978-1-4673-2199-0
• issn: 1944-9399
• partnum: 12CH39000
• rank: 3685
• access_type: LOCKED
• content_type: Conferences
• abstract: We present the design, implementation and test of a CMOS image sensor filter technology based on the exploitation of surface plasmon resonance. We demonstrate precise design and control of the spectral response of filters made in a single aluminium film. The film is patterned using electron beam lithography and reactive ion etching. Unlike conventional filter technology for CMOS, all the desired colour responses can be obtained in a single lithographic sequence. We show that the photocurrent from the sensors has the required spectral response after fabrication.
• article_number: 6321896
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6321896
• html_url: https://ieeexplore.ieee.org/document/6321896/
• abstract_url: https://ieeexplore.ieee.org/document/6321896/
• publication_title: 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)
• conference_location: Birmingham, UK
• conference_dates: 20-23 Aug. 2012
• publication_number: 6310163
• is_number: 6321885
• publication_year: 2012
• publication_date: 20-23 Aug. 2012
• start_page: 1
• end_page: 2
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 193
• insert_date: 20121004
• index_terms:
  • ieee_terms:
    • CMOS integrated circuits
    • CMOS technology
    • Production
    • Lithography
    • Films
  • author_terms:
    • Lithography
    • plasmonics
    • digital imaging
  • dynamic_index_terms:
    • Plasmon Resonance
    • Surface Plasmon Resonance
    • Photocurrent
    • Image Sensor
    • Camera Sensor
    • Spectral Response
    • Electron Beam Lithography
    • E-beam Lithography
    • Reactive Ion Etching
    • Aluminum Film
    • Aluminum Oxide Films
    • Filtered Based
    • Filter-based
    • Silicon Nitride
    • Metal Film
    • Standard Metal
• isbn_formats:
  • format: CD, value: 978-1-4673-2199-0, isbnType: New-2005
  • format: Print ISBN, value: 978-1-4673-2198-3, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-4673-2200-3, isbnType: New-2005
• authors:
  • Author Name: David R.S. Cumming
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/37276149400
    ID: 37276149400
    Order: 1
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK
  • Author Name: Qin Chen
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/37576124300
    ID: 37576124300
    Order: 2
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK
  • Author Name: Kirsty Walls
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/38229656600
    ID: 38229656600
    Order: 3
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK
  • Author Name: Timothy D. Drysdale
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/37426981800
    ID: 37426981800
    Order: 4
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK
  • Author Name: Stephen Collins
    Affiliation: Department of Engineering, University of Oxford, Oxford, UK
    Author URL: https://ieeexplore.ieee.org/author/37274573100
    ID: 37274573100
    Order: 5
    Author Affiliations:
    • Department of Engineering, University of Oxford, Oxford, UK
  • Author Name: Dipayan Das
    Affiliation: Department of Engineering, University of Oxford, Oxford, UK
    Author URL: https://ieeexplore.ieee.org/author/37531966900
    ID: 37531966900
    Order: 6
    Author Affiliations:
    • Department of Engineering, University of Oxford, Oxford, UK
  • Author Name: Danial Chitnis
    Affiliation: Department of Engineering, University of Oxford, Oxford, UK
    Author URL: https://ieeexplore.ieee.org/author/37543079100
    ID: 37543079100
    Order: 7
    Author Affiliations:
    • Department of Engineering, University of Oxford, Oxford, UK

Image Sensor

• sensor_type: CMOS
• resolution:
• dynamic_range:
• pixel_size:
• dark_current:

Optical Data

• focal_length:
• aperture:
• field_of_view:
• distortion:

Performance Metrics

• frame_rate:
• signal_to_noise_ratio:
• sensitivity:
• shutter_speed:
• power_consumption:
• noise:

Applications & Benefits

• cell_imaging:
• benefits: Eliminates the need for multiple fabrication stages to make the traditional red, green and blue filter set, because all the required filter functions can be obtained in a single metal film.

Supporting Organizations

• supported_by: United Kingdom's Engineering and Physical Sciences Research Council.

Manuscript Details

• publication_date: 20-23 Aug. 2012

Relevancy Score

• score: 10
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_de8ae748-231d-462a-a7e4-bb50bf98e4c5-surface_plasmon_resonance_for_digital_imaging.json