Stacked Image Sensor Using Chlorinedoped Crystalline Selenium Photoconversion Layer Composed Of Sizecontrolled Polycrystalline Particles

• doi: 10.1109/IEDM.2015.7409804
• title: Stacked image sensor using chlorine-doped crystalline selenium photoconversion layer composed of size-controlled polycrystalline particles
• publisher: IEEE
• isbn: 978-1-4673-9893-0
• issn: 2156-017X
• rank: 3622
• access_type: LOCKED
• content_type: Conferences
• abstract: We demonstrate a stacked complementary metal-oxide semiconductor (CMOS) image sensor overlaid with a chlorine (Cl)-doped crystalline selenium (c-Se) photoconversion layer. The size of the polycrystalline particles (grains) of c-Se, which is strongly related to dark current pattern noise, is controlled by Cl doping to c-Se; hence, the resulting device provides clear images. Furthermore, avalanche multiplication was successfully observed in a Cl-doped c-Se film fabricated on a glass substrate at a relatively low applied voltage.
• article_number: 7409804
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7409804
• html_url: https://ieeexplore.ieee.org/document/7409804/
• abstract_url: https://ieeexplore.ieee.org/document/7409804/
• publication_title: 2015 IEEE International Electron Devices Meeting (IEDM)
• conference_location: Washington, DC, USA
• conference_dates: 7-9 Dec. 2015
• publication_number: 7402013
• is_number: 7409598
• publication_year: 2015
• publication_date: 7-9 Dec. 2015
• start_page: 30.7.1
• end_page: 30.7.4
• citing_paper_count: 2
• citing_patent_count: 0
• download_count: 280
• insert_date: 20160218
• index_terms:
  • ieee_terms:
    • Chlorine
    • Films
    • Doping
    • Image sensors
    • Photodiodes
    • Substrates
    • Dark current
  • dynamic_index_terms:
    • Image Sensor
    • Camera Sensor
    • Polycrystalline Particles
    • Particle Size
    • Glass Substrate
    • Dark Current
    • Electrode
    • Atomic Force Microscopy
    • Sensitivity Of The Sensor
    • Indium Tin Oxide
    • Magnetron Sputtering
    • Sputter Deposition
    • Si Substrate
    • Secondary Ion Mass Spectrometry
    • Sensor Size
• isbn_formats:
  • format: USB ISBN, value: 978-1-4673-9893-0, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-4673-9894-7, isbnType: New-2005
• authors:
  • Author Name: S. Imura
    Affiliation: NHK Science and Technology Research Laboratories, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37085575377
    ID: 37085575377
    Order: 1
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Tokyo, Japan
  • Author Name: K. Kikuchi
    Affiliation: NHK Science and Technology Research Laboratories, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37085570550
    ID: 37085570550
    Order: 2
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Tokyo, Japan
  • Author Name: K. Miyakawa
    Affiliation: NHK Science and Technology Research Laboratories, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37628357900
    ID: 37628357900
    Order: 3
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Tokyo, Japan
  • Author Name: H. Ohtake
    Affiliation: NHK Science and Technology Research Laboratories, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37331518200
    ID: 37331518200
    Order: 4
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Tokyo, Japan
  • Author Name: M. Kubota
    Affiliation: NHK Science and Technology Research Laboratories, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37076163300
    ID: 37076163300
    Order: 5
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Tokyo, Japan
  • Author Name: T. Okino
    Affiliation: Panasonic Corporation, Nagaokakyo City, Kyoto, Japan
    Author URL: https://ieeexplore.ieee.org/author/37073118100
    ID: 37073118100
    Order: 6
    Author Affiliations:
    • Panasonic Corporation, Nagaokakyo City, Kyoto, Japan
  • Author Name: Y. Hirose
    Affiliation: Panasonic Corporation, Nagaokakyo City, Kyoto, Japan
    Author URL: https://ieeexplore.ieee.org/author/37424981900
    ID: 37424981900
    Order: 7
    Author Affiliations:
    • Panasonic Corporation, Nagaokakyo City, Kyoto, Japan
  • Author Name: Y. Kato
    Affiliation: Panasonic Corporation, Nagaokakyo City, Kyoto, Japan
    Author URL: https://ieeexplore.ieee.org/author/37534018400
    ID: 37534018400
    Order: 8
    Author Affiliations:
    • Panasonic Corporation, Nagaokakyo City, Kyoto, Japan
  • Author Name: N. Teranishi
    Affiliation: University of Hyogo, Kamigori, Hyogo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37351891200
    ID: 37351891200
    Order: 9
    Author Affiliations:
    • University of Hyogo, Kamigori, Hyogo, Japan
    • Shizuoka University, Hamamatsu City, Shizuoka, Japan

Image Sensor

• sensor_type: CMOS
• resolution: 7680 x 4320 pixels
• dynamic_range: Not specified
• pixel_size: 3 µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• frame_rate: 60 fps
• sensitivity: ISO unknown

Applications & Benefits

• cell_imaging: High-resolution imaging for medical devices, smartphones, and professional cameras.
• benefits: Improved sensitivity and quality of high-definition video systems.

Supporting Organizations

• supported_by: NHK Science and Technology Research Laboratories, Panasonic Corporation, University of Hyogo, Shizuoka University

Manuscript Details

• publication_date: 7-9 Dec. 2015

Relevancy Score

• score: 10

Processed JSON Filename

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