Silicon Smart Microchips For Intelligent Sensing

• doi: 10.1109/VLSIT.2008.4588543
• title: Silicon smart microchips for intelligent sensing
• publisher: IEEE
• isbn: 978-1-4244-1803-9
• issn: 2158-9682
• partnum: 08CH37965
• rank: 3550
• access_type: LOCKED
• content_type: Conferences
• abstract: Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully fabricated by using the CCD/CMOS image sensor technique, and real time imaging of a chemical reaction and pH distribution imaging was demonstrated.
• article_number: 4588543
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=4588543
• html_url: https://ieeexplore.ieee.org/document/4588543/
• abstract_url: https://ieeexplore.ieee.org/document/4588543/
• publication_title: 2008 Symposium on VLSI Technology
• conference_location: Honolulu, HI, USA
• conference_dates: 17-19 June 2008
• publication_number: 4573020
• is_number: 4588540
• publication_year: 2008
• publication_date: 17-19 June 2008
• start_page: 6
• end_page: 9
• citing_paper_count: 0
• citing_patent_count: 1
• download_count: 92
• insert_date: 20080805
• index_terms:
  • ieee_terms:
    • Silicon
    • Probes
    • Image sensors
    • Arrays
    • Sensors
    • Electrodes
    • Biomedical imaging
  • dynamic_index_terms:
    • Silicon
    • Electrode
    • Neural Tissue
    • Nerve Tissue
    • Nervous Tissue
    • Neuronal Tissue
    • Image Sensor
    • Camera Sensor
    • Sensor Chip
    • Microprobe
    • Selective Growth
    • Recordings Of Neurons
    • Array Probe
    • Buffer pH
    • Buffer Solution
    • Neural Activity
    • Neural Responses
    • Electroretinography
    • Electroretinogram
    • Sensor Devices
    • Microelectrode Arrays
    • Multi-electrode Array
    • Array Chip
    • pH Sensor
    • Needle Diameter
• isbn_formats:
  • format: CD, value: 978-1-4244-1803-9, isbnType: New-2005
  • format: Print ISBN, value: 978-1-4244-1802-2, isbnType: New-2005
• authors:
  • Author Name: M. Ishida
    Affiliation: Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan
    Author URL: https://ieeexplore.ieee.org/author/37277543400
    ID: 37277543400
    Order: 1
    Author Affiliations:
    • Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan
  • Author Name: T. Kawano
    Affiliation: Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan
    Author URL: https://ieeexplore.ieee.org/author/37290260800
    ID: 37290260800
    Order: 2
    Author Affiliations:
    • Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan
  • Author Name: H. Takao
    Affiliation: Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan
    Author URL: https://ieeexplore.ieee.org/author/37286324200
    ID: 37286324200
    Order: 3
    Author Affiliations:
    • Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan
  • Author Name: K. Sawada
    Affiliation: Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan
    Author URL: https://ieeexplore.ieee.org/author/37277567600
    ID: 37277567600
    Order: 4
    Author Affiliations:
    • Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Japan

Image Sensor

• sensor_type: CCD/CMOS
• resolution: 32x32
• dynamic_range: Not specified
• pixel_size: 130 µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• frame_rate: 5 frames per second

Applications & Benefits

• cell_imaging: The pH image sensor was used successfully in the pH imaging of a mouse stomach and could be used in various biomedical and biochemical applications.
• benefits: Real-time imaging of pH distributions allows for better understanding of biochemical phenomena.

Supporting Organizations

• supported_by: The 21st Century COE Program, JST-CREST, Global COE program 'Frontiers of Intelligent Sensing', Grant-in-Aid for Scientific Research (A) from the ministry of Education, Culture, Sports, Science and Technology Japan.

Manuscript Details

• publication_date: 17-19 June 2008

Relevancy Score

• score: 9
• missing_fields:
  • fill factor
  • quantum efficiency
  • noise sources
  • analog-to-digital conversion techniques
  • use of microlenses
  • on-chip colour filters
  • global or rolling shutters
  • backside illumination

Processed JSON Filename

request_271b0ce1-603b-49b1-af8f-e011ae288382-silicon_smart_microchips_for_intelligent_sensing.json