Sensitivity Of Soi Lateral Diodes For Bolometric Sensing

• doi: 10.1109/IRMMW-THz.2018.8510188
• title: Sensitivity of SOI Lateral Diodes for Bolometric Sensing
• publisher: IEEE
• isbn: 978-1-5386-3810-1
• issn: 2162-2027
• rank: 3520
• access_type: LOCKED
• content_type: Conferences
• abstract: In this study we characterize the thermal sensitivity of lateral diodes fabricated in a commercial 180 nm SOl-CMOS process. The current responsivity to temperature and the low-frequency noise were measured and correlated to the device dimensions. We also report on a FPA microbolometer sensor for THz imaging (0.6-1.2 THz) implemented with lateral diode detectors coupled to on-chip antennas.
• article_number: 8510188
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8510188
• html_url: https://ieeexplore.ieee.org/document/8510188/
• abstract_url: https://ieeexplore.ieee.org/document/8510188/
• publication_title: 2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
• conference_location: Nagoya, Japan
• conference_dates: 9-14 Sept. 2018
• publication_number: 8491395
• is_number: 8509838
• publication_year: 2018
• publication_date: 9-14 Sept. 2018
• start_page: 1
• end_page: 2
• citing_paper_count: 5
• citing_patent_count: 0
• download_count: 147
• insert_date: 20181028
• index_terms:
  • ieee_terms:
    • Temperature sensors
    • Antennas
    • Sensitivity
    • Temperature measurement
    • P-i-n diodes
  • dynamic_index_terms:
    • Bolometer
    • Low-frequency Noise
    • Diode Detector
    • Scanning Electron Microscopy
    • Perimeter
    • Power Spectral Density
    • Spectral Function
    • Thermal Insulation
    • Heat Insulation
    • Thermal Barrier
    • Temperature Sensitivity
    • Reactive Ion Etching
    • Reactive-ion Etching
    • Noise Power Spectral Density
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-5386-3810-1, isbnType: New-2005
  • format: USB ISBN, value: 978-1-5386-3808-8, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5386-3809-5, isbnType: New-2005
• authors:
  • Author Name: Dan Corcos
    Affiliation: ON Semiconductor, Haifa, Israel
    Author URL: https://ieeexplore.ieee.org/author/37698136300
    ID: 37698136300
    Order: 1
    Author Affiliations:
    • ON Semiconductor, Haifa, Israel
  • Author Name: Danny Elad
    Affiliation: ON Semiconductor, Haifa, Israel
    Author URL: https://ieeexplore.ieee.org/author/37300719600
    ID: 37300719600
    Order: 2
    Author Affiliations:
    • ON Semiconductor, Haifa, Israel
  • Author Name: Thomas Morf
    Affiliation: IBM Research, Zurich, Rüschlikon, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37266745500
    ID: 37266745500
    Order: 3
    Author Affiliations:
    • IBM Research, Zurich, Rüschlikon, Switzerland
  • Author Name: Ute Drechsler
    Affiliation: IBM Research, Zurich, Rüschlikon, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37267355100
    ID: 37267355100
    Order: 4
    Author Affiliations:
    • IBM Research, Zurich, Rüschlikon, Switzerland

Image Sensor

• sensor_type: CMOS
• resolution: N/A
• dynamic_range: N/A
• pixel_size: N/A
• dark_current: N/A

Optical Data

• focal_length: N/A
• aperture: N/A
• field_of_view: N/A
• distortion: N/A

Performance Metrics

• frame_rate: N/A
• signal_to_noise_ratio: N/A
• sensitivity: N/A
• shutter_speed: N/A
• power_consumption: N/A
• noise: N/A

Applications & Benefits

• cell_imaging: N/A
• benefits: N/A

Supporting Organizations

• supported_by: ON Semiconductor, IBM Research – Zurich

Manuscript Details

• publication_date: 9-14 Sept. 2018

Relevancy Score

• score: 5
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging
  • benefits

Processed JSON Filename

request_e774ff64-cc24-42cd-9058-34bfc8897d9b-sensitivity_of_soi_lateral_diodes_for_bolometric_sensing.json