Roomtemperature Thz Imaging Based On Antennacoupled Mosfet Bolometer

• doi: 10.1109/MEMSYS.2013.6474350
• title: Room-temperature THz imaging based on antenna-coupled MOSFET bolometer
• publisher: IEEE
• isbn: 978-1-4673-5654-1
• issn: 1084-6999
• partnum: 13CH39061
• rank: 3480
• access_type: LOCKED
• content_type: Conferences
• abstract: We report on the design, fabrication and measurements of a new THz sensor concept based on an antenna-coupled MOSFET bolometer for room-temperature passive THz imaging for security and medical-diagnostic applications. The device is fabricated in a 180-nm CMOS SOI technology followed by a post-CMOS MEMS process. In this sensor, the antenna absorbing the THz electromagnetic field is directly coupled to the bolometer for maximum energy collection, whereas its design aims at minimizing its thermal mass as is necessary for fast frame rates. DC measurements before and after the MEMS process as well as thermal time constant and THz antenna measurements are presented.
• article_number: 6474350
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6474350
• html_url: https://ieeexplore.ieee.org/document/6474350/
• abstract_url: https://ieeexplore.ieee.org/document/6474350/
• publication_title: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
• conference_location: Taipei, Taiwan
• conference_dates: 20-24 Jan. 2013
• publication_number: 6471302
• is_number: 6474158
• publication_year: 2013
• publication_date: 20-24 Jan. 2013
• start_page: 745
• end_page: 748
• citing_paper_count: 8
• citing_patent_count: 0
• download_count: 548
• insert_date: 20130307
• index_terms:
  • ieee_terms:
    • Decision support systems
  • dynamic_index_terms:
    • THz Imaging
    • Room-temperature THz
    • Electromagnetic Field
    • Optical Field
    • Thermal Mass
    • Bolometer
    • Passive Imaging
    • Thermal Conductivity
    • Heat Conduction
    • Etching
    • Temperature Sensor
    • Discharge Process
    • Release Process
    • Thermal Insulation
    • Heat Insulation
    • Thermal Barrier
    • Reasonable Agreement
    • Small Mass
    • Antenna Gain
    • Tens Of Micrometers
    • Tens Of Microns
    • Antenna Pattern
    • Silicon-on-insulator
    • Buried Oxide
    • Air Measurements
    • Standard CMOS
    • Wideband Antenna
    • Standard Fabrication
• isbn_formats:
  • format: Print ISBN, value: 978-1-4673-5654-1, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-4673-5655-8, isbnType: New-2005
• authors:
  • Author Name: Thomas Morf
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37266745500
    ID: 37266745500
    Order: 1
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Bernhard Klein
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/38562431000
    ID: 38562431000
    Order: 2
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
    • Communications Laboratory, Chair for RF Engineering, Technical University of Dresden, Germany
  • Author Name: Michel Despont
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37267355500
    ID: 37267355500
    Order: 3
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Ute Drechsler
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37267355100
    ID: 37267355100
    Order: 4
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Lukas Kull
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37680744200
    ID: 37680744200
    Order: 5
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Dan Corcos
    Affiliation: IBM Research-Haifa, Israel
    Author URL: https://ieeexplore.ieee.org/author/37698136300
    ID: 37698136300
    Order: 6
    Author Affiliations:
    • IBM Research-Haifa, Israel
  • Author Name: Danny Elad
    Affiliation: IBM Research-Haifa, Israel
    Author URL: https://ieeexplore.ieee.org/author/37300719600
    ID: 37300719600
    Order: 7
    Author Affiliations:
    • IBM Research-Haifa, Israel
  • Author Name: Noam Kaminski
    Affiliation: IBM Research-Haifa, Israel
    Author URL: https://ieeexplore.ieee.org/author/37865929300
    ID: 37865929300
    Order: 8
    Author Affiliations:
    • IBM Research-Haifa, Israel
  • Author Name: Matthias Braendli
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/38072684200
    ID: 38072684200
    Order: 9
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Christian Menolfi
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37283682000
    ID: 37283682000
    Order: 10
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Marcel Kossel
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37271117700
    ID: 37271117700
    Order: 11
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Pier Andrea Francese
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37275750200
    ID: 37275750200
    Order: 12
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Thomas Toifl
    Affiliation: IBM Research-Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37283681200
    ID: 37283681200
    Order: 13
    Author Affiliations:
    • IBM Research-Zurich, Switzerland
  • Author Name: Dirk Plettemeier
    Affiliation: Communications Laboratory, Chair for RF Engineering, Technical University of Dresden, Germany
    Author URL: https://ieeexplore.ieee.org/author/37393216200
    ID: 37393216200
    Order: 14
    Author Affiliations:
    • Communications Laboratory, Chair for RF Engineering, Technical University of Dresden, Germany

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Included in applications such as smartphones, medical devices, and automotive systems.
• benefits: High performance in various imaging applications.

Supporting Organizations

• supported_by: Not specified

Manuscript Details

• publication_date: 20-24 Jan. 2013

Relevancy Score

• score: 10
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • supported_by
  • publication_date

Processed JSON Filename

request_eed9a798-8c58-421e-b681-8ac152f986d4-roomtemperature_thz_imaging_based_on_antennacoupled_mosfet_bolometer.json