Reduction Of Random Telegraph Signal Noise By Optimizing Deep Trench Isolation Process For Backside Illuminated Cmos Image Sensor

• doi: 10.1109/CSTIC52283.2021.9461499
• title: Reduction of random telegraph signal noise by optimizing deep trench isolation process for backside illuminated CMOS image sensor
• publisher: IEEE
• isbn: 978-1-6654-4946-5
• issn:
• rank: 3430
• access_type: LOCKED
• content_type: Conferences
• abstract: As CMOS image sensors continuously scale down, random telegraph noise (RTS) has become a more and more important consideration. In this paper, significant reduction of RTS is achieved by optimizing the deep trench isolation (DTI) process for backside illuminated CMOS image sensor (BSI).
• article_number: 9461499
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9461499
• html_url: https://ieeexplore.ieee.org/document/9461499/
• abstract_url: https://ieeexplore.ieee.org/document/9461499/
• publication_title: 2021 China Semiconductor Technology International Conference (CSTIC)
• conference_location: Shanghai, China
• conference_dates: 14-15 March 2021
• publication_number: 9461249
• is_number: 9461251
• publication_year: 2021
• publication_date: 14-15 March 2021
• start_page: 1
• end_page: 3
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 777
• insert_date: 20210629
• index_terms:
  • ieee_terms:
    • CMOS image sensors
    • Surface treatment
    • Diffusion tensor imaging
  • author_terms:
    • Backside illuminated CIS
    • Deep trench isolation
    • Random telegraph noise
  • dynamic_index_terms:
    • Deep Trench
    • Telegraph Signal
    • Deep Trench Isolation
    • Dark Current
    • Etching Method
    • Centile Charts
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-6654-4946-5, isbnType: New-2005
  • format: USB ISBN, value: 978-1-6654-4944-1, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-6654-4945-8, isbnType: New-2005
• authors:
  • Author Name: Chunshan Zhao
    Affiliation: Shanghai Huali Integrated Circuit Corporation, Shanghai, China
    Author URL: https://ieeexplore.ieee.org/author/37088902878
    ID: 37088902878
    Order: 1
    Author Affiliations:
    • Shanghai Huali Integrated Circuit Corporation, Shanghai, China
  • Author Name: Bai Kang
    Affiliation: Shanghai Huali Integrated Circuit Corporation, Shanghai, China
    Author URL: https://ieeexplore.ieee.org/author/37088904611
    ID: 37088904611
    Order: 2
    Author Affiliations:
    • Shanghai Huali Integrated Circuit Corporation, Shanghai, China
  • Author Name: Wuzhi Zhang
    Affiliation: Shanghai Huali Integrated Circuit Corporation, Shanghai, China
    Author URL: https://ieeexplore.ieee.org/author/37088901676
    ID: 37088901676
    Order: 3
    Author Affiliations:
    • Shanghai Huali Integrated Circuit Corporation, Shanghai, China
  • Author Name: Yamin Cao
    Affiliation: Shanghai Huali Integrated Circuit Corporation, Shanghai, China
    Author URL: https://ieeexplore.ieee.org/author/37086880929
    ID: 37086880929
    Order: 4
    Author Affiliations:
    • Shanghai Huali Integrated Circuit Corporation, Shanghai, China
  • Author Name: Wei Zhou
    Affiliation: Shanghai Huali Integrated Circuit Corporation, Shanghai, China
    Author URL: https://ieeexplore.ieee.org/author/37088899353
    ID: 37088899353
    Order: 5
    Author Affiliations:
    • Shanghai Huali Integrated Circuit Corporation, Shanghai, China

Image Sensor

• sensor_type: CMOS
• resolution: not specified
• dynamic_range: not specified
• pixel_size: not specified
• dark_current: not specified

Optical Data

• focal_length: not specified
• aperture: not specified
• field_of_view: not specified
• distortion: not specified

Performance Metrics

Applications & Benefits

• cell_imaging: used in medical devices for imaging applications
• benefits: enables digital imaging in various applications including smartphones, medical devices, and automotive systems.

Supporting Organizations

• supported_by: not specified

Manuscript Details

• publication_date: 14-15 March 2021

Relevancy Score

• score: 9
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_34698c4a-b206-4fc0-89a9-0d31c5f19697-reduction_of_random_telegraph_signal_noise_by_optimizing_deep_trench_isolation_process_for_backside_illuminated_cmos_image_sensor.json