Pulseecho Ultrasonic Fingerprint Sensor On A Chip

• doi: 10.1109/TRANSDUCERS.2015.7181013
• title: Pulse-echo ultrasonic fingerprint sensor on a chip
• publisher: IEEE
• isbn: 978-1-4799-8955-3
• issn: 2159-547X
• rank: 3338
• access_type: LOCKED
• content_type: Conferences
• abstract: A fully-integrated ultrasonic fingerprint sensor based on pulse-echo imaging is presented. The device consists of a 24×8 Piezoelectric Micromachined Ultrasonic Transducer (PMUT) array bonded at the wafer level to custom readout electronics fabricated in a 180-nm CMOS process. The proposed top-driving bottom-sensing technique minimizes signal attenuation due to the large parasitics associated with high-voltage transistors. With 12V driving signal strength, the sensor takes 24μs to image a 2.3mm by 0.7mm section of a fingerprint.
• article_number: 7181013
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7181013
• html_url: https://ieeexplore.ieee.org/document/7181013/
• abstract_url: https://ieeexplore.ieee.org/document/7181013/
• publication_title: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
• conference_location: Anchorage, AK, USA
• conference_dates: 21-25 June 2015
• publication_number: 7168353
• is_number: 7180834
• publication_year: 2015
• publication_date: 21-25 June 2015
• start_page: 674
• end_page: 677
• citing_paper_count: 33
• citing_patent_count: 26
• download_count: 2539
• insert_date: 20150806
• index_terms:
  • ieee_terms:
    • Fingerprint recognition
    • Acoustics
    • Arrays
    • Transducers
    • Electrodes
    • Micromechanical devices
    • Aluminum nitride
  • author_terms:
    • Fingerprint sensor
    • Ultrasound transducer
    • MEMS-CMOS integration
    • PMUT
  • dynamic_index_terms:
    • Ultrasonic Sensors
    • Ultrasonic Detection
    • Fingerprint Sensors
    • Signal-to-noise
    • Signal-to-noise Ratio
    • Top Electrode
    • Parasitic Capacitance
    • Acoustic Impedance
    • Aluminum Nitride
    • Mechanical Scanning
• isbn_formats:
  • format: Electronic ISBN, value: 978-1-4799-8955-3, isbnType: New-2005
• authors:
  • Author Name: H. Tang
    Affiliation: University of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085442217
    ID: 37085442217
    Order: 1
    Author Affiliations:
    • University of California, Berkeley, CA, USA
  • Author Name: Y. Lu
    Affiliation: University of California, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085445079
    ID: 37085445079
    Order: 2
    Author Affiliations:
    • University of California, Davis, CA, USA
  • Author Name: S. Fung
    Affiliation: University of California, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085432679
    ID: 37085432679
    Order: 3
    Author Affiliations:
    • University of California, Davis, CA, USA
  • Author Name: J. M. Tsai
    Affiliation: Invensense Inc., San Jose, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085530599
    ID: 37085530599
    Order: 4
    Author Affiliations:
    • Invensense Inc., San Jose, CA, USA
  • Author Name: M. Daneman
    Affiliation: Invensense Inc., San Jose, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37350139600
    ID: 37350139600
    Order: 5
    Author Affiliations:
    • Invensense Inc., San Jose, CA, USA
  • Author Name: D.A. Horsley
    Affiliation: University of California, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37372231100
    ID: 37372231100
    Order: 6
    Author Affiliations:
    • University of California, Davis, CA, USA
  • Author Name: B.E. Boser
    Affiliation: University of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37282431400
    ID: 37282431400
    Order: 7
    Author Affiliations:
    • University of California, Berkeley, CA, USA

Image Sensor

• sensor_type: PMUT (Piezoelectric Micromachined Ultrasonic Transducer)
• resolution: 24x8 array
• dynamic_range: 12dB
• pixel_size: 50µm
• dark_current: Not specified

Optical Data

• focal_length: Not applicable
• aperture: Not applicable
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• signal_to_noise_ratio: 12dB
• power_consumption: Low power dissipation

Applications & Benefits

• cell_imaging: Used for fingerprint recognition in portable devices such as smartphones, watches, etc.
• benefits: Resilience to contamination, compact size, high signal fidelity, and low power dissipation.

Supporting Organizations

• supported_by: University of California, Berkeley, University of California, Davis, Invensense Inc.

Manuscript Details

• publication_date: 21-25 June 2015

Relevancy Score

• score: 8
• missing_fields:
  • fill factor
  • quantum efficiency
  • readout speed
  • noise sources
  • analog-to-digital conversion techniques
  • microlenses
  • on-chip colour filters
  • global or rolling shutters
  • backside illumination

Processed JSON Filename

request_91a9d1b0-608a-4577-9946-e30c71bab126-pulseecho_ultrasonic_fingerprint_sensor_on_a_chip.json