Plasma Antenna Charging In Cmos Image Sensors

• doi: 10.1109/IRPS.2019.8720518
• title: Plasma Antenna Charging in CMOS Image Sensors
• publisher: IEEE
• isbn: 978-1-5386-9505-0
• issn: 1541-7026
• rank: 3281
• access_type: LOCKED
• content_type: Conferences
• abstract: Plasma charging damage induced on MOSFETs by a stripping process is compared between two CMOS image sensor technologies. The damage is modulated by the substrate configuration. Plasma non-uniformity is electrically characterized to determine the magnitude of the stress induced on the MOSFET. A model of the charging mechanism is finally proposed including the study of the protection diode efficiency and the substrate resistivity impact.
• article_number: 8720518
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8720518
• html_url: https://ieeexplore.ieee.org/document/8720518/
• abstract_url: https://ieeexplore.ieee.org/document/8720518/
• publication_title: 2019 IEEE International Reliability Physics Symposium (IRPS)
• conference_location: Monterey, CA, USA
• conference_dates: 31 March-4 April 2019
• publication_number: 8712125
• is_number: 8720395
• publication_year: 2019
• publication_date: 31 March-4 April 2019
• start_page: 1
• end_page: 5
• citing_paper_count: 3
• citing_patent_count: 0
• download_count: 636
• insert_date: 20190523
• index_terms:
  • ieee_terms:
    • Plasmas
    • Logic gates
    • Substrates
    • Integrated circuit modeling
    • Stress
    • Antennas
    • MOS devices
  • author_terms:
    • Plasma induced damage
    • CMOS Image sensor
    • protection diode
  • dynamic_index_terms:
    • Image Sensor
    • Camera Sensor
    • Plasma Antenna
    • Stripping Process
    • Current Source
    • Current Regulations
    • Threshold Voltage
    • Circuit Model
    • Potential Substrates
    • Source Model
    • Front Side
    • Saturation Current
    • Voltage Stress
    • Plasma Process
    • Gate Oxide
    • Gate-oxide
    • Etching Step
    • Threshold Voltage Shift
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-5386-9505-0, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5386-9504-3, isbnType: New-2005
• authors:
  • Author Name: Y. Sacchettini
    Affiliation: STMicroelectronics, Crolles, France
    Author URL: https://ieeexplore.ieee.org/author/37086840180
    ID: 37086840180
    Order: 1
    Author Affiliations:
    • STMicroelectronics, Crolles, France
  • Author Name: J. -P. Carrère
    Affiliation: STMicroelectronics, Crolles, France
    Author URL: https://ieeexplore.ieee.org/author/37328800600
    ID: 37328800600
    Order: 2
    Author Affiliations:
    • STMicroelectronics, Crolles, France
  • Author Name: V. Goiffon
    Affiliation: ISAE-SUPAERO, Université de Toulouse, Toulouse, France
    Author URL: https://ieeexplore.ieee.org/author/37593862700
    ID: 37593862700
    Order: 3
    Author Affiliations:
    • ISAE-SUPAERO, Université de Toulouse, Toulouse, France
  • Author Name: P. Magnan
    Affiliation: ISAE-SUPAERO, Université de Toulouse, Toulouse, France
    Author URL: https://ieeexplore.ieee.org/author/37400751600
    ID: 37400751600
    Order: 4
    Author Affiliations:
    • ISAE-SUPAERO, Université de Toulouse, Toulouse, France

Image Sensor

• sensor_type: CMOS
• resolution: Not specified (assumed variable depending on application)
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Used in various applications including smartphones, medical devices, and automotive systems.
• benefits: Digital imaging capabilities leading to enhanced visibility, diagnostics, and interaction in devices.

Supporting Organizations

• supported_by: STMicroelectronics, ISAE-SUPAERO

Manuscript Details

• publication_date: 31 March-4 April 2019

Relevancy Score

• score: 9
• missing_fields:
  • pixel_size
  • dark_current
  • dynamic_range
  • frame_rate
  • sensitivity
  • signal_to_noise_ratio
  • noise
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • shutter_speed
  • power_consumption

Processed JSON Filename

request_075a4002-4301-4e70-85d3-16756ce5d22c-plasma_antenna_charging_in_cmos_image_sensors.json