Pixeldramlogic 3Layer Stacked Cmos Image Sensor Technology

• doi: 10.1109/IEDM.2017.8268317
• title: Pixel/DRAM/logic 3-layer stacked CMOS image sensor technology
• publisher: IEEE
• isbn: 978-1-5386-3560-5
• issn: 2156-017X
• rank: 3278
• access_type: LOCKED
• content_type: Conferences
• abstract: We developed a CMOS image sensor (CIS) chip, which is stacked pixel/DRAM/logic. In this CIS chip, three Si substrates are bonded together, and each substrate is electrically connected by two-stacked through-silica vias (TSVs) through the CIS or dynamic random access memory (DRAM). We obtained low resistance, low leakage current, and high reliability characteristics of these TSVs. Connecting metal with TSVs through DRAM can be used as low resistance wiring for a power supply. The Si substrate of the DRAM can be thinned to 3 pm, and its memory retention and operation characteristics are sufficient for specifications after thinning. With this stacked CIS chip, it is possible to achieve less rolling shutter distortion and produce super slow motion video.
• article_number: 8268317
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8268317
• html_url: https://ieeexplore.ieee.org/document/8268317/
• abstract_url: https://ieeexplore.ieee.org/document/8268317/
• publication_title: 2017 IEEE International Electron Devices Meeting (IEDM)
• conference_location: San Francisco, CA, USA
• conference_dates: 2-6 Dec. 2017
• publication_number: 8255107
• is_number: 8268301
• publication_year: 2017
• publication_date: 2-6 Dec. 2017
• start_page: 3.2.1
• end_page: 3.2.4
• citing_paper_count: 31
• citing_patent_count: 0
• download_count: 3697
• insert_date: 20180125
• index_terms:
  • ieee_terms:
    • Through-silicon vias
    • Random access memory
    • Substrates
    • Wiring
    • Resistance
    • Silicon
    • CMOS image sensors
  • dynamic_index_terms:
    • Si Substrate
    • Random Access Memory
    • Memory Retention
    • Chromatography
    • Retention Time
    • Digital Camera
    • Power Consumption
    • Horizontal Axis
    • Chip Size
    • Probability Of Resistance
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-5386-3560-5, isbnType: New-2005
  • format: USB ISBN, value: 978-1-5386-3558-2, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5386-3559-9, isbnType: New-2005
• authors:
  • Author Name: H. Tsugawa
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086330235
    ID: 37086330235
    Order: 1
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: H. Takahashi
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/38149590900
    ID: 38149590900
    Order: 2
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: R. Nakamura
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37087252360
    ID: 37087252360
    Order: 3
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Umebayashi
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37410905500
    ID: 37410905500
    Order: 4
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Ogita
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088731972
    ID: 37088731972
    Order: 5
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: H. Okano
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37089136652
    ID: 37089136652
    Order: 6
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: K. Iwase
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088722254
    ID: 37088722254
    Order: 7
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: H. Kawashima
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37329175700
    ID: 37329175700
    Order: 8
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Yamasaki
    Affiliation: Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088746293
    ID: 37088746293
    Order: 9
    Author Affiliations:
    • Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
  • Author Name: D. Yoneyama
    Affiliation: Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088728533
    ID: 37088728533
    Order: 10
    Author Affiliations:
    • Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
  • Author Name: J. Hashizume
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37088737646
    ID: 37088737646
    Order: 11
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Nakajima
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/38581128900
    ID: 38581128900
    Order: 12
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: K. Murata
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37089123546
    ID: 37089123546
    Order: 13
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: Y. Kanaishi
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37328534400
    ID: 37328534400
    Order: 14
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: K. Ikeda
    Affiliation: Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
    Author URL: https://ieeexplore.ieee.org/author/37089121865
    ID: 37089121865
    Order: 15
    Author Affiliations:
    • Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
  • Author Name: K. Tatani
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086017179
    ID: 37086017179
    Order: 16
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Nagano
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37740249100
    ID: 37740249100
    Order: 17
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: H. Nakayama
    Affiliation: Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
    Author URL: https://ieeexplore.ieee.org/author/37732430000
    ID: 37732430000
    Order: 18
    Author Affiliations:
    • Sony Semiconductor Manufacturing Corp., Nagasaki, Japan
  • Author Name: T. Haruta
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37392814600
    ID: 37392814600
    Order: 19
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan
  • Author Name: T. Nomoto
    Affiliation: Sony Semiconductor Solutions Corp., Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37389765000
    ID: 37389765000
    Order: 20
    Author Affiliations:
    • Sony Semiconductor Solutions Corp., Kanagawa, Japan

Image Sensor

• sensor_type: CMOS
• resolution: 19.3M pixels
• dynamic_range: Not specified
• pixel_size: 1.22 x 1.22 μm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• frame_rate: 120 fps

Applications & Benefits

• cell_imaging: The technology can be utilized in various imaging applications including smartphones and other devices requiring digital imaging capabilities.
• benefits: The stacked design allows for high-speed imaging (up to 960 fps), reduced rolling shutter distortion, and power consumption efficiency.

Supporting Organizations

• supported_by: Sony Semiconductor Solutions Corp., Sony Semiconductor Manufacturing Corp.

Manuscript Details

• publication_date: 2-6 Dec. 2017

Relevancy Score

• score: 9
• missing_fields:
  • fill factor
  • quantum efficiency
  • analog-to-digital conversion techniques
  • microlenses
  • on-chip colour filters
  • global or rolling shutters
  • backside illumination

Processed JSON Filename

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