Performance And Spatial Sensitivity Variations Of Singlephoton Avalanche Diodes Manufactured In An Image Sensor Cmos Process

• doi: 10.1109/LED.2015.2475168
• title: Performance and Spatial Sensitivity Variations of Single-Photon Avalanche Diodes Manufactured in an Image Sensor CMOS Process
• publisher: IEEE
• isbn:
• issn: 1558-0563
• rank: 3235
• access_type: LOCKED
• content_type: Journals
• abstract: In this letter, we present the results from a series of single-photon avalanche diode (SPAD) structures implemented in a commercial 0.18-μm CMOS process intended for CMOS image sensors. Variations without any effect on the performance and variations that produced non-functional devices are described. Devices based on the p+/n-well and deep-n-well/p-doped epitaxial (P-EPI) SPADs' junctions were found to work well in this process. When biased for 10% quantum efficiency, the best 10-μm diameter p+/n-well SPADs exhibited a dark count rate (DCR) of ~1 kHz, whereas the DCR of the deep-n-well/ P-EPI SPADs was only 10 Hz under the same conditions. We also show that the former type exhibited local sensitivity variations within the SPADs ranging from a factor 4 at low excess voltage to 1.2 at an excess voltage of ~0.5 V. No significant sensitivity variations were found for the deep-n-well/P-EPI SPADs, but they were found to exhibit a significant sensitivity outside the central junction, contributing from 8.3% at low excess voltage to ~70% at high excess voltage.
• article_number: 7230234
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7230234
• html_url: https://ieeexplore.ieee.org/document/7230234/
• abstract_url: https://ieeexplore.ieee.org/document/7230234/
• publication_title: IEEE Electron Device Letters
• conference_location:
• conference_dates:
• publication_number: 55
• is_number: 7302615
• publication_year: 2015
• publication_date: Nov. 2015
• start_page: 1118
• end_page: 1120
• citing_paper_count: 6
• citing_patent_count: 0
• download_count: 553
• insert_date: 20150831
• index_terms:
  • ieee_terms:
    • Sensitivity
    • Photonics
    • Junctions
    • Performance evaluation
    • CMOS process
    • Geometry
  • author_terms:
    • Avalanche photodiodes
    • Photodiodes
    • CMOS integrated circuits
    • Avalanche photodiodes
    • photodiodes
    • CMOS integrated circuits
  • dynamic_index_terms:
    • Spatial Variation
    • Variation In Sensitivity
    • Image Sensor
    • Camera Sensor
    • CMOS Process
    • Avalanche Diode
    • Single-photon Avalanche Diode
    • Factor 4
    • Quantum Efficiency
    • Dark Count Rate
    • Electrode
    • Central Region
    • Device Performance
    • Short Wavelength
    • Shorter Wavelengths
    • Focal Plane
    • Back Focal Plane
    • Spatial Measures
    • polySia
    • Polycrystalline Silicon
    • Polysilicon
    • Sensitivity To Light
    • Sun Sensitivity
• authors:
  • Author Name: Johan Borg
    Affiliation: Department of Computer Science, Luleå University of Technology, Luleå, Sweden
    Author URL: https://ieeexplore.ieee.org/author/37298257700
    ID: 37298257700
    Order: 1
    Author Affiliations:
    • Department of Computer Science, Luleå University of Technology, Luleå, Sweden

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: 10 µm (for P+/n-well SPAD devices)
• dark_current: 1 kHz (P+/n-well), 10 Hz (DNWELL/P-EPI devices)

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Applications in time-of-flight distance measurements and time-resolved imaging.
• benefits: Integration of SPADs with support circuitry (e.g., time to digital converters) to simplify implementation of 2D detector arrays.

Supporting Organizations

• supported_by: Fraunhofer Institute of Integrated Circuits

Manuscript Details

• publication_date: Nov. 2015

Relevancy Score

• score: 9
• missing_fields:
  • resolution
  • dynamic_range
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

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