Parallel Scanning Afm With Onchip Circuitry In Cmos Technology

• doi: 10.1109/MEMSYS.1999.746870
• title: Parallel scanning AFM with on-chip circuitry in CMOS technology
• publisher: IEEE
• isbn: 0-7803-5194-0
• issn: 1084-6999
• partnum: 99CH36291
• rank: 3222
• access_type: LOCKED
• content_type: Conferences
• abstract: We present the first force sensors for application in Atomic Force Microscopy (AFM) fabricated with industrial CMOS technology. Sensing is based on two different detection schemes: a piezoresistive Wheatstone bridge and stress-sensing MOS transistors. The system combines on a single chip (i) two cantilevers for parallel scanning, (ii) thermal actuators for independent deflection of the two cantilevers, (iii) sensors to measure the deflection, and (iv) offset compensation and signal conditioning circuitry. The AFM probes were tested in contact and dynamic mode. In the dynamic mode, images with a resolution of better than 20 /spl Aring/ were recorded. Moreover, we successfully took parallel scanning images in contact mode.
• article_number: 746870
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=746870
• html_url: https://ieeexplore.ieee.org/document/746870/
• abstract_url: https://ieeexplore.ieee.org/document/746870/
• publication_title: Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)
• conference_location: Orlando, FL, USA
• conference_dates: 21-21 Jan. 1999
• publication_number: 6037
• is_number: 16111
• publication_year: 1999
• publication_date: 21-21 Jan. 1999
• start_page: 447
• end_page: 452
• citing_paper_count: 16
• citing_patent_count: 4
• download_count: 187
• insert_date: 20020806
• index_terms:
  • ieee_terms:
    • CMOS technology
    • Force sensors
    • Atomic force microscopy
    • Textile industry
    • Piezoresistance
    • Bridge circuits
    • MOSFETs
    • Actuators
    • Sensor systems
    • Thermal sensors
  • dynamic_index_terms:
    • Atomic Force Microscopy
    • Parallel Scanning
    • Detection Scheme
    • Detection Strategies
    • Dynamic Mode
    • Single Chip
    • Atomic Force Microscopy Probe
    • Wheatstone Bridge
    • Resonance Frequency
    • Piezoelectric
    • Grating
    • Dynamic Imaging
    • Reactive Ion Etching
    • Probe Type
    • CMOS Process
    • Corner Frequency
    • Atomic Force Microscopy Cantilever
    • Cantilever Deflection
    • Silicone Membrane
    • Anisotropic Etching
    • Nanoscope IIIa
    • Diamond Tip
• isbn_formats:
  • format: Print ISBN, value: 0-7803-5194-0, isbnType: Historical
• authors:
  • Author Name: D. Lange
    Affiliation: Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37360075700
    ID: 37360075700
    Order: 1
    Author Affiliations:
    • Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland
  • Author Name: T. Akiyama
    Affiliation: Institute of Microtechnology, University of Neuchâtel, Neuchatel, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37307514700
    ID: 37307514700
    Order: 2
    Author Affiliations:
    • Institute of Microtechnology, University of Neuchâtel, Neuchatel, Switzerland
  • Author Name: C. Hagleitner
    Affiliation: Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37268718600
    ID: 37268718600
    Order: 3
    Author Affiliations:
    • Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland
  • Author Name: A. Tonin
    Affiliation: Institute of Physics, University of Basel, Basel, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37371005900
    ID: 37371005900
    Order: 4
    Author Affiliations:
    • Institute of Physics, University of Basel, Basel, Switzerland
  • Author Name: H.R. Hidber
    Affiliation: Institute of Physics, University of Basel, Basel, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37371014300
    ID: 37371014300
    Order: 5
    Author Affiliations:
    • Institute of Physics, University of Basel, Basel, Switzerland
  • Author Name: P. Niedermann
    Affiliation: CSEM, Neuchatel, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37318418700
    ID: 37318418700
    Order: 6
    Author Affiliations:
    • CSEM, Neuchatel, Switzerland
  • Author Name: U. Staufer
    Affiliation: Institute of Microtechnology, University of Neuchâtel, Neuchatel, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37304058300
    ID: 37304058300
    Order: 7
    Author Affiliations:
    • Institute of Microtechnology, University of Neuchâtel, Neuchatel, Switzerland
  • Author Name: N.F. de Rooij
    Affiliation: Institute of Microtechnology, University of Neuchâtel, Neuchatel, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37284570100
    ID: 37284570100
    Order: 8
    Author Affiliations:
    • Institute of Microtechnology, University of Neuchâtel, Neuchatel, Switzerland
  • Author Name: O. Brand
    Affiliation: Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37347062700
    ID: 37347062700
    Order: 9
    Author Affiliations:
    • Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland
  • Author Name: H. Baltes
    Affiliation: Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37274215600
    ID: 37274215600
    Order: 10
    Author Affiliations:
    • Physical Electronics Laboratory, ETH Zürich, Zurich, Switzerland

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Not specified
• benefits: Not specified

Supporting Organizations

• supported_by: Swiss Priority Program MINAST

Manuscript Details

• publication_date: 21-21 Jan. 1999

Relevancy Score

• score: 2
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging
  • benefits
  • publication_date

Processed JSON Filename

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