Nanowire Hydrogen Gas Sensor Employing Cmos Microhotplate

• doi: 10.1109/ICSENS.2009.5398224
• title: Nanowire hydrogen gas sensor employing CMOS micro-hotplate
• publisher: IEEE
• isbn: 978-1-4244-5335-1
• issn: 1930-0395
• partnum: 09CH38151
• rank: 3087
• access_type: LOCKED
• content_type: Conferences
• abstract: In this paper we present a novel hydrogen gas sensor comprising a high temperature SOI-MOS micro-hotplate and employing zinc oxide nanowires as the sensing material. The micro-hotplates were fabricated at a commercial SOI foundry followed by a backside deep reactive ion etch (DRIE) at a commercial MEMS foundry. Particular care was taken in designing the heater shape using a systematic parametric approach to achieve excellent temperature uniformity (within 1-2%) as shown by both simulations and experimental infrared imaging results. Zinc oxide nanowires were grown on these devices and show promising responses to hydrogen with a response (Ra/Rh) of 50 at 100 ppm in argon. The devices possess a low D.C. power consumption of only 16 mW at 300°C and, being CMOS compatible, offer low unit cost in high volumes and full circuit integration. We believe that these devices have potential for application as a sub-$1 hydrogen sensor with sub-1mW (pulsed mode) power consumption.
• article_number: 5398224
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5398224
• html_url: https://ieeexplore.ieee.org/document/5398224/
• abstract_url: https://ieeexplore.ieee.org/document/5398224/
• publication_title: SENSORS, 2009 IEEE
• conference_location: Christchurch, New Zealand
• conference_dates: 25-28 Oct. 2009
• publication_number: 5379507
• is_number: 5398121
• publication_year: 2009
• publication_date: 25-28 Oct. 2009
• start_page: 114
• end_page: 117
• citing_paper_count: 5
• citing_patent_count: 1
• download_count: 430
• insert_date: 20100122
• index_terms:
  • ieee_terms:
    • Hydrogen
    • Gas detectors
    • Temperature sensors
    • Zinc oxide
    • Foundries
    • Infrared heating
    • Energy consumption
    • Etching
    • Micromechanical devices
    • Shape
  • dynamic_index_terms:
    • Gas Sensors
    • Gas Detection
    • Hydrogen Gas Sensors
    • High Temperature
    • Low Cost
    • Systematic Approach
    • Power Consumption
    • Zinc Oxide
    • Uniform Temperature
    • ZnO Nanowires
    • Zinc Oxide Nanowires
    • Excellent Uniformity
    • Heat Transfer
    • Heat Flow
    • Heat Loss
    • Etching
    • Surface-to-volume
    • Area To Volume
    • Surface Area To Volume
    • Surface Area To Volume Ratio
    • Surface-to-volume Ratio
    • Area To Volume Ratio
    • Good Sensitivity
    • Conduction Loss
    • Outer Ring
    • Inner Ring
    • mW Power
    • Sensing Time
    • Convective Loss
    • Heating Area
    • Good Uniformity
    • Silicon Crystal
    • Single-crystal Silicon
    • Nanomaterials
    • Nanostructures
• isbn_formats:
  • format: CD, value: 978-1-4244-5335-1, isbnType: New-2005
  • format: Print ISBN, value: 978-1-4244-4548-6, isbnType: New-2005
• authors:
  • Author Name: S.Z. Ali
    Affiliation: University of Cambridge, Cambridge, UK
    Author URL: https://ieeexplore.ieee.org/author/37416280200
    ID: 37416280200
    Order: 1
    Author Affiliations:
    • University of Cambridge, Cambridge, UK
  • Author Name: S. Santra
    Affiliation: University of Cambridge, Cambridge, UK
    Author URL: https://ieeexplore.ieee.org/author/37391527200
    ID: 37391527200
    Order: 2
    Author Affiliations:
    • University of Cambridge, Cambridge, UK
  • Author Name: I. Haneef
    Affiliation: University of Cambridge, Cambridge, UK
    Author URL: https://ieeexplore.ieee.org/author/37391526100
    ID: 37391526100
    Order: 3
    Author Affiliations:
    • University of Cambridge, Cambridge, UK
  • Author Name: C. Schwandt
    Affiliation: University of Cambridge, Cambridge, UK
    Author URL: https://ieeexplore.ieee.org/author/37088626996
    ID: 37088626996
    Order: 4
    Author Affiliations:
    • University of Cambridge, Cambridge, UK
  • Author Name: R.V. Kumar
    Affiliation: University of Cambridge, Cambridge, UK
    Author URL: https://ieeexplore.ieee.org/author/38038055400
    ID: 38038055400
    Order: 5
    Author Affiliations:
    • University of Cambridge, Cambridge, UK
  • Author Name: W.I. Milne
    Affiliation: University of Cambridge, Cambridge, UK
    Author URL: https://ieeexplore.ieee.org/author/37278313300
    ID: 37278313300
    Order: 6
    Author Affiliations:
    • University of Cambridge, Cambridge, UK
  • Author Name: F. Udrea
    Affiliation: University of Cambridge, Cambridge, UK
    Author URL: https://ieeexplore.ieee.org/author/37276030400
    ID: 37276030400
    Order: 7
    Author Affiliations:
    • University of Cambridge, Cambridge, UK
  • Author Name: P.K. Guha
    Affiliation: University of Warwick, Coventry, UK
    Author URL: https://ieeexplore.ieee.org/author/37391526700
    ID: 37391526700
    Order: 8
    Author Affiliations:
    • University of Warwick, Coventry, UK
  • Author Name: J.A. Covington
    Affiliation: University of Warwick, Coventry, UK
    Author URL: https://ieeexplore.ieee.org/author/37267552400
    ID: 37267552400
    Order: 9
    Author Affiliations:
    • University of Warwick, Coventry, UK
  • Author Name: J.W. Gardner
    Affiliation: University of Warwick, Coventry, UK
    Author URL: https://ieeexplore.ieee.org/author/37267539000
    ID: 37267539000
    Order: 10
    Author Affiliations:
    • University of Warwick, Coventry, UK
  • Author Name: V. Garofalo
    Affiliation: University of Warwick, Coventry, UK
    Author URL: https://ieeexplore.ieee.org/author/37543168600
    ID: 37543168600
    Order: 11
    Author Affiliations:
    • University of Warwick, Coventry, UK

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• power_consumption: 16 mW at 300°C

Applications & Benefits

• cell_imaging: Not specified
• benefits: Offers low unit cost in high volumes and full circuit integration.

Supporting Organizations

• supported_by: Engineering and Physical Sciences Research Council, U.K., Ministry of Information and Communications, Republic of Korea

Manuscript Details

• publication_date: 25-28 Oct. 2009

Relevancy Score

• score: 1
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • noise

Processed JSON Filename

request_f4c1c8d1-359d-41dc-8c33-844e2de617c5-nanowire_hydrogen_gas_sensor_employing_cmos_microhotplate.json