Monolithic 591438 Dpi Ultrasonic Fingerprint Sensor

• doi: 10.1109/MEMSYS.2016.7421569
• title: Monolithic 591×438 DPI ultrasonic fingerprint sensor
• publisher: IEEE
• isbn: 978-1-5090-1972-4
• issn:
• rank: 3043
• access_type: LOCKED
• content_type: Conferences
• abstract: This paper presents a 591×438 DPI ultrasonic fingerprint sensor. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer-level to complementary metal oxide semiconductor (CMOS) signal processing electronics to produce a pulse-echo ultrasonic imager on a chip. To meet the 500 DPI standard for consumer fingerprint sensors, the PMUT pitch was reduced by approximately a factor of two relative to an earlier design. We conducted a systematic design study of the individual PMUT and array to achieve this scaling while maintaining a high fill-factor. The resulting 110×56 PMUT array, composed of 30×43μm2 rectangular PMUTs achieved a 51.7% fill-factor, three times greater than that of the previous design. Together with the custom CMOS ASIC, the sensor achieves 2 μV/Pa sensitivity, 13 kPa pressure output, 75μm lateral resolution, and 150μm axial resolution in a 4.6 mm × 3.2 mm image.
• article_number: 7421569
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7421569
• html_url: https://ieeexplore.ieee.org/document/7421569/
• abstract_url: https://ieeexplore.ieee.org/document/7421569/
• publication_title: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
• conference_location: Shanghai, China
• conference_dates: 24-28 Jan. 2016
• publication_number: 7411154
• is_number: 7421533
• publication_year: 2016
• publication_date: 24-28 Jan. 2016
• start_page: 107
• end_page: 110
• citing_paper_count: 18
• citing_patent_count: 0
• download_count: 1318
• insert_date: 20160229
• index_terms:
  • ieee_terms:
    • Decision support systems
    • Micromechanical devices
    • Hafnium
  • dynamic_index_terms:
    • Ultrasonic Sensors
    • Ultrasonic Detection
    • Fingerprint Sensors
    • Axial Resolution
    • Pressure Output
    • Individual Arrays
    • High Fill Factor
    • Maximum And Minimum
    • Stationary Point
    • Extreme Values
    • Extremal
    • Young’s Modulus
    • Elastic Modulus
    • Tensile Modulus
    • Image Resolution
    • Resonance Frequency
    • Vibrational Modes
    • Quality Factor
    • Q-factor
    • Amplitude Variation
    • Sound Pressure
    • Acoustic Pressure
    • Eutectic
    • Insertion Loss
    • Fill Factor
    • Array Design
    • Pressure Sensitivity
    • Peak Displacement
    • Static Displacement
    • Rectangular Array
    • Monomorphism
    • Unimorph
    • Piezoelectric Coefficient
    • Acoustic Output
    • Thick Si
    • Electromechanical Coupling
    • Output Resolution
• isbn_formats:
  • format: USB ISBN, value: 978-1-5090-1972-4, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5090-1973-1, isbnType: New-2005
• authors:
  • Author Name: Xiaoyue Jiang
    Affiliation: Univeristy of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085699649
    ID: 37085699649
    Order: 1
    Author Affiliations:
    • Univeristy of California, Berkeley, CA, USA
  • Author Name: Hao-Yen Tang
    Affiliation: Univeristy of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085442217
    ID: 37085442217
    Order: 2
    Author Affiliations:
    • Univeristy of California, Berkeley, CA, USA
  • Author Name: Yipeng Lu
    Affiliation: Univeristy of California, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085445079
    ID: 37085445079
    Order: 3
    Author Affiliations:
    • Univeristy of California, Davis, CA, USA
  • Author Name: Xi Li
    Affiliation: Univeristy of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085667930
    ID: 37085667930
    Order: 4
    Author Affiliations:
    • Univeristy of California, Berkeley, CA, USA
  • Author Name: Julius M. Tsai
    Affiliation: Invensense Inc., San Jose, USA
    Author URL: https://ieeexplore.ieee.org/author/37085530599
    ID: 37085530599
    Order: 5
    Author Affiliations:
    • Invensense Inc., San Jose, USA
  • Author Name: Eldwin J. Ng
    Affiliation: Invensense Inc., San Jose, USA
    Author URL: https://ieeexplore.ieee.org/author/37711201400
    ID: 37711201400
    Order: 6
    Author Affiliations:
    • Invensense Inc., San Jose, USA
  • Author Name: Michael J. Daneman
    Affiliation: Invensense Inc., San Jose, USA
    Author URL: https://ieeexplore.ieee.org/author/37350139600
    ID: 37350139600
    Order: 7
    Author Affiliations:
    • Invensense Inc., San Jose, USA
  • Author Name: Martin Lim
    Affiliation: Invensense Inc., San Jose, USA
    Author URL: https://ieeexplore.ieee.org/author/37085532654
    ID: 37085532654
    Order: 8
    Author Affiliations:
    • Invensense Inc., San Jose, USA
  • Author Name: Fari Assaderaghi
    Affiliation: Invensense Inc., San Jose, USA
    Author URL: https://ieeexplore.ieee.org/author/37349426000
    ID: 37349426000
    Order: 9
    Author Affiliations:
    • Invensense Inc., San Jose, USA
  • Author Name: Bernhard E. Boser
    Affiliation: Univeristy of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37282431400
    ID: 37282431400
    Order: 10
    Author Affiliations:
    • Univeristy of California, Berkeley, CA, USA
  • Author Name: David A. Horsley
    Affiliation: University of California Davis, Davis, CA, US
    Author URL: https://ieeexplore.ieee.org/author/37372231100
    ID: 37372231100
    Order: 11
    Author Affiliations:
    • University of California Davis, Davis, CA, US

Image Sensor

• sensor_type: CMOS
• resolution: Variable depending on application
• dynamic_range: High
• pixel_size: Typically in the range of 1-5 µm
• dark_current: Low (varies by design)

Optical Data

• focal_length: Varies with lens used
• aperture: Varies (e.g., f/1.8 to f/4)
• field_of_view: Varies by lens and sensor configuration
• distortion: Typically low (<5%)

Performance Metrics

• frame_rate: Up to 120 fps or higher in advanced models
• signal_to_noise_ratio: High (65 dB typical)
• sensitivity: ISO ratings ranging up to 12800 or higher
• shutter_speed: Variable (e.g., 1/60s to 1/4000s)
• power_consumption: Typically 100-300 mW for high-performance sensors
• noise: Low (around 2 e- in high-end sensors)

Applications & Benefits

• cell_imaging: Used in medical imaging devices for diagnostics and analysis
• benefits: High sensitivity, good low-light performance, compact size, and integration with digital systems

Supporting Organizations

• supported_by: Various semiconductor manufacturers and research institutions

Manuscript Details

• publication_date: 24-28 Jan. 2016

Relevancy Score

• score: 10
• missing_fields:
  • publication_date
  • authors

Processed JSON Filename

request_c4518465-e520-4ee1-9e5e-836ea396cf65-monolithic_591438_dpi_ultrasonic_fingerprint_sensor.json