Micromachined Quartz Resonatorbased High Performance Thermal Sensors

• doi: 10.1109/ICSENS.2010.5690612
• title: Micromachined quartz resonator-based high performance thermal sensors
• publisher: IEEE
• isbn: 978-1-4244-8168-2
• issn: 1930-0395
• partnum: 10CH38272
• rank: 3004
• access_type: LOCKED
• content_type: Conferences
• abstract: This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited thermal sensors for infrared imaging and biochemical sensing applications. An integrated quartz sensor array using CMOS-compatible micromachining techniques has been designed and fabricated. 241 MHz micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.162 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz1/2, detectivity D* of 9.17 ×107 cmHz1/2/W, and noise equivalent temperature difference (NETD) in the 8-12 μm wavelength region of 4 mK and a response time of <;30 Hz. In a unique new application a remotely coupled thermal sensor configuration was used to monitor biochemical reactions in real time.
• article_number: 5690612
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5690612
• html_url: https://ieeexplore.ieee.org/document/5690612/
• abstract_url: https://ieeexplore.ieee.org/document/5690612/
• publication_title: SENSORS, 2010 IEEE
• conference_location: Waikoloa, HI, USA
• conference_dates: 1-4 Nov. 2010
• publication_number: 5678851
• is_number: 5689839
• publication_year: 2010
• publication_date: 1-4 Nov. 2010
• start_page: 2197
• end_page: 2201
• citing_paper_count: 2
• citing_patent_count: 0
• download_count: 252
• insert_date: 20110120
• index_terms:
  • ieee_terms:
    • Temperature sensors
    • Temperature measurement
    • Detectors
    • Resonant frequency
    • Heat transfer
  • dynamic_index_terms:
    • Microfabrication
    • Micromachining
    • Thermal Sensors
    • Thermal Conductivity
    • Heat Conduction
    • Biochemical Reactions
    • Temperature Sensitivity
    • Sensor Array
    • Quartz Crystal
    • Sensor Configuration
    • Heterogeneous Integration
    • Multichip Module
    • Heat Transfer
    • Heat Flow
    • Heat Loss
    • Inductively Coupled Plasma
    • ICP-MS
    • Inductively Coupled Plasma Mass Spectrometry
    • Time Constant
    • Resonance Frequency
    • Fabrication Process
    • Temperature Fluctuations
    • Temperature Sensor
    • Effective Coefficient
    • Heat Transfer Coefficient
    • Sensor Response
    • Heat Sink
    • Reaction Chamber
    • Thermal Detector
    • Thermal Mass
    • Reaction Heat
    • Reaction Enthalpy
    • Hz Bandwidth
    • Acoustic Resonance
    • Detection Of Elements
    • Natural Heat
• isbn_formats:
  • format: Online ISBN, value: 978-1-4244-8168-2, isbnType: New-2005
  • format: Print ISBN, value: 978-1-4244-8170-5, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-4244-8169-9, isbnType: New-2005
• authors:
  • Author Name: Kailiang Ren
    Affiliation: Department of Electrical Engineering, Pennsylvania State University, University Park, PA, USA
    Author URL: https://ieeexplore.ieee.org/author/37417642200
    ID: 37417642200
    Order: 1
    Author Affiliations:
    • Department of Electrical Engineering, Pennsylvania State University, University Park, PA, USA
  • Author Name: Marcelo B. Pisani
    Affiliation: Department of Electrical Engineering, Pennsylvania State University, University Park, PA, USA
    Author URL: https://ieeexplore.ieee.org/author/38258629600
    ID: 38258629600
    Order: 2
    Author Affiliations:
    • Department of Electrical Engineering, Pennsylvania State University, University Park, PA, USA
  • Author Name: Ping Kao
    Affiliation: Department of Electrical Engineering, Pennsylvania State University, University Park, PA, USA
    Author URL: https://ieeexplore.ieee.org/author/37651351100
    ID: 37651351100
    Order: 3
    Author Affiliations:
    • Department of Electrical Engineering, Pennsylvania State University, University Park, PA, USA
  • Author Name: Srinivas Tadigadapa
    Affiliation: Srinivas Tadigadapa, Pennsylvania State University, University Park, PA, USA
    Author URL: https://ieeexplore.ieee.org/author/37427904000
    ID: 37427904000
    Order: 4
    Author Affiliations:
    • Srinivas Tadigadapa, Pennsylvania State University, University Park, PA, USA

Image Sensor

• sensor_type: not specified
• resolution: not specified
• dynamic_range: not specified
• pixel_size: not specified
• dark_current: not specified

Optical Data

• focal_length: not specified
• aperture: not specified
• field_of_view: not specified
• distortion: not specified

Performance Metrics

Applications & Benefits

• cell_imaging: not specified
• benefits: not specified

Supporting Organizations

• supported_by: not specified

Manuscript Details

• publication_date: 1-4 Nov. 2010

Relevancy Score

• score: 1
• missing_fields:
  • sensor_type
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging
  • benefits
  • supported_by
  • authors
  • publication_date

Processed JSON Filename

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