Mems Fingerprint Sensor With Arrayed Cavity Structures

• doi: 10.1109/IEDM.2001.979661
• title: MEMS fingerprint sensor with arrayed cavity structures
• publisher: IEEE
• isbn: 0-7803-7050-3
• issn:
• partnum: 01CH37224
• rank: 2964
• access_type: LOCKED
• content_type: Conferences
• abstract: We propose a MEMS (Micro Electro Mechanical Systems) fingerprint sensor whose pixels have novel cavity structures. Each cavity structure has a sensitive plane of a thin film on top, and a sensing circuit below it. Ridges on a finger surface bend the thin film mechanically, which is detected by the sensing circuit electronically. We fabricated the sensor using a CMOS compatible process with our sealing technique. The sensor can obtain fingerprint images of even dry or wet fingers. It also shows sufficient mechanical strength against finger pressure. These results confirm that the MEMS fingerprint sensor has the potential for wide practical application.
• article_number: 979661
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=979661
• html_url: https://ieeexplore.ieee.org/document/979661/
• abstract_url: https://ieeexplore.ieee.org/document/979661/
• publication_title: International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)
• conference_location: Washington, DC, USA
• conference_dates: 2-5 Dec. 2001
• publication_number: 7704
• is_number: 21092
• publication_year: 2001
• publication_date: 2-5 Dec. 2001
• start_page: 41.2.1
• end_page: 41.2.4
• citing_paper_count: 4
• citing_patent_count: 1
• download_count: 303
• insert_date: 20020807
• index_terms:
  • ieee_terms:
    • Sensor arrays
    • Micromechanical devices
    • Fingerprint recognition
    • Mechanical sensors
    • Fingers
    • Thin film circuits
    • Mechanical systems
    • Sensor systems
    • CMOS image sensors
    • CMOS process
  • dynamic_index_terms:
    • Cavity Structure
    • Fingerprint Sensors
    • Thin Films
    • Alumina
    • Electromechanical System
    • Sufficient Mechanical Strength
    • Scanning Electron Microscopy
    • Practical Use
    • Practical Utility
    • Fabrication Process
    • Spin-coated
    • Focused Ion Beam
    • Electroplating
    • Electrochemical Deposition
    • Sensor Surface
    • Thumbprint
    • Fingerprint Identification
    • Capacitive Sensor
    • Conventional Sensors
    • Sacrificial Layer
    • Lower Electrode
• isbn_formats:
  • format: Print ISBN, value: 0-7803-7050-3, isbnType: Historical
• authors:
  • Author Name: N. Sato
    Affiliation: NTT Telecommunications Energy Laboratories, Japan
    Author URL: https://ieeexplore.ieee.org/author/37291037500
    ID: 37291037500
    Order: 1
    Author Affiliations:
    • NTT Telecommunications Energy Laboratories, Japan
  • Author Name: K. Machida
    Affiliation: NTT Telecommunications Energy Laboratories, Japan
    Author URL: https://ieeexplore.ieee.org/author/37265816000
    ID: 37265816000
    Order: 2
    Author Affiliations:
    • NTT Telecommunications Energy Laboratories, Japan
  • Author Name: H. Morimura
    Affiliation: NTT Lifestyle and Environmental Technology Laboratories, NTT Corporation, Japan
    Author URL: https://ieeexplore.ieee.org/author/37265815200
    ID: 37265815200
    Order: 3
    Author Affiliations:
    • NTT Lifestyle and Environmental Technology Laboratories, NTT Corporation, Japan
  • Author Name: S. Shigematsu
    Affiliation: NTT Lifestyle and Environmental Technology Laboratories, NTT Corporation, Japan
    Author URL: https://ieeexplore.ieee.org/author/37265813400
    ID: 37265813400
    Order: 4
    Author Affiliations:
    • NTT Lifestyle and Environmental Technology Laboratories, NTT Corporation, Japan
  • Author Name: K. Kudou
    Affiliation: NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37293802700
    ID: 37293802700
    Order: 5
    Author Affiliations:
    • NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
  • Author Name: M. Yano
    Affiliation: NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37416660900
    ID: 37416660900
    Order: 6
    Author Affiliations:
    • NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
  • Author Name: H. Kyuragi
    Affiliation: NTT Telecommunications Energy Laboratories, Japan
    Author URL: https://ieeexplore.ieee.org/author/37266029700
    ID: 37266029700
    Order: 7
    Author Affiliations:
    • NTT Telecommunications Energy Laboratories, Japan

Image Sensor

• sensor_type: CMOS
• resolution: 50px x 50px
• dynamic_range: Not specified
• pixel_size: 50µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: The MEMS fingerprint sensor can detect the topography of a finger directly, independent of finger surface conditions, and has potential wide application for fingerprint identification in various environments.
• benefits: Allows for clear fingerprint images from both dry and wet fingers, enhancing usability in different conditions.

Supporting Organizations

• supported_by: NTT Telecommunications Energy Labs., NTT Lifestyle and Environmental Technology Labs., NTT Corporation, NTT Advanced Technology Corporation

Manuscript Details

• publication_date: 2-5 Dec. 2001

Relevancy Score

• score: 10
• missing_fields:
  • dynamic_range
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_93e012de-b1de-4d5a-b907-4479ed52efe7-mems_fingerprint_sensor_with_arrayed_cavity_structures.json