Mems Fingerprint Sensor Immune To Various Finger Surface Conditions

• doi: 10.1109/TED.2003.812490
• title: MEMS fingerprint sensor immune to various finger surface conditions
• publisher: IEEE
• isbn:
• issn: 1557-9646
• rank: 2963
• access_type: LOCKED
• content_type: Journals
• abstract: This paper describes a new fingerprint sensor that detects the topography of finger ridges and valleys. We propose a microelectromechanical systems (MEMS) cavity structure for the pixels arrayed on the sensor surface and a fabrication process that stacks the cavity structures on a CMOS LSI. A thin film on top of the cavity structures is bent by finger ridges mechanically, which is detected by the sensing circuits below them electronically. Based on an analytical model, we designed a cavity structure suitable for fingerprint detection. We fabricated the cavity structures on the sensing circuits by a fabrication process that entails gold electroplating, sacrificial layer etching for cavities, and a sealing technique. The fabricated fingerprint sensor consists of about 57 334 pixels in the area of 11.2 mm /spl times/ 12.8 mm, which yields a high spatial resolution of 508 dots-per-inch (dpi). With these pixels working together, fingerprint images were obtained. The sensor produces clear fingerprint images regardless whether the finger was dry or wet, which confirms its potential for various practical applications.
• article_number: 1206899
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1206899
• html_url: https://ieeexplore.ieee.org/document/1206899/
• abstract_url: https://ieeexplore.ieee.org/document/1206899/
• publication_title: IEEE Transactions on Electron Devices
• conference_location:
• conference_dates:
• publication_number: 16
• is_number: 27160
• publication_year: 2003
• publication_date: April 2003
• start_page: 1109
• end_page: 1116
• citing_paper_count: 31
• citing_patent_count: 1
• download_count: 828
• insert_date: 20030625
• index_terms:
  • ieee_terms:
    • Microsensors
    • Fingerprint identification
    • Etching
    • Seals
  • dynamic_index_terms:
    • Finger Surface
    • Fingerprint Sensors
    • Fabrication Process
    • Electroplating
    • Electrochemical Deposition
    • Sensor Surface
    • Cavity Structure
    • Sacrificial Layer
    • Structural Parameters
    • Numerical Calculations
    • Numerical Computation
    • Changes In Capacity
    • Capacitance Change
    • Personal Identification Number
    • Thumbprint
    • Fingerprint Identification
    • Capacitive Sensor
    • Electrode Length
    • Lower Electrode
    • Semiconductor Substrate
• authors:
  • Author Name: N. Sato
    Affiliation: NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37291037500
    ID: 37291037500
    Order: 1
    Author Affiliations:
    • NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
  • Author Name: K. Machida
    Affiliation: NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37265816000
    ID: 37265816000
    Order: 2
    Author Affiliations:
    • NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
  • Author Name: H. Morimura
    Affiliation: NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37265815200
    ID: 37265815200
    Order: 3
    Author Affiliations:
    • NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
  • Author Name: S. Shigematsu
    Affiliation: NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37265813400
    ID: 37265813400
    Order: 4
    Author Affiliations:
    • NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
  • Author Name: K. Kudou
    Affiliation: NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37293802700
    ID: 37293802700
    Order: 5
    Author Affiliations:
    • NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
  • Author Name: M. Yano
    Affiliation: NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37416660900
    ID: 37416660900
    Order: 6
    Author Affiliations:
    • NTT Advanced Technology Corporation, Atsugi, Kanagawa, Japan
  • Author Name: H. Kyuragi
    Affiliation: NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan
    Author URL: https://ieeexplore.ieee.org/author/37266029700
    ID: 37266029700
    Order: 7
    Author Affiliations:
    • NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa, Japan

Image Sensor

• sensor_type: MEMS Fingerprint Sensor
• resolution: 57334 pixels
• dynamic_range: Not specified
• pixel_size: 50 μm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Fingerprint identification
• benefits: Can capture clear images regardless of finger surface conditions (wet or dry), suitable for various environments.

Supporting Organizations

• supported_by: NTT Corporation, NTT Advanced Technology Corporation

Manuscript Details

• publication_date: April 2003

Relevancy Score

• score: 6
• missing_fields:
  • dynamic_range
  • dark_current
  • signal_to_noise_ratio
  • power_consumption
  • frame_rate
  • cell_imaging
  • sensitivity
  • shutter_speed
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • noise

Processed JSON Filename

request_712ba95b-e9fd-4021-9e97-4c3ecd4b4401-mems_fingerprint_sensor_immune_to_various_finger_surface_conditions.json