Macroscopicassembledgraphene Nanofilmsgermanium Broadband Photodetectors

doi: 10.1109/IEDM19574.2021.9720694
title: Macroscopic-Assembled-Graphene Nanofilms/Germanium Broadband Photodetectors
publisher: IEEE
isbn: 978-1-6654-2573-5
issn: 0163-1918
rank: 2974
access_type: LOCKED
content_type: Conferences
abstract: Germanium (Ge) based devices are widely used in optical communications and image sensors due to the brilliant properties of Ge (high carrier mobility, excellent CMOS compatibility). Here, by integrating Ge with the nanofilms of macroscopic-assembled-graphene (nMAG) - large-scale highly crystalline graphene nanofilm, we demonstrated a high-performance Schottky diode. The device shows a detection bandwidth of 1.5 to 4 $\mu{\mathrm{m}}$ with responsivities ranging from 1.1 A/W to 40 mA/W and specific detectivity between 1011 to 109 Jones, and a rising time of ~80 ns at room temperature. Such performance is a result of the broadband and strong absorption, the long carrier relaxation time (20 ps) of nMAG, and the low Schottky barrier of $n$MAG/Ge junction. The broadband detection range of this detector is comparable to the state-of-the-art Ge-based IR photodiodes.
article_number: 9720694
pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9720694
html_url: https://ieeexplore.ieee.org/document/9720694/
abstract_url: https://ieeexplore.ieee.org/document/9720694/
publication_title: 2021 IEEE International Electron Devices Meeting (IEDM)
conference_location: San Francisco, CA, USA
conference_dates: 11-16 Dec. 2021
publication_number: 9720433
is_number: 9720494
publication_year: 2021
publication_date: 11-16 Dec. 2021
start_page: 9.2.1
end_page: 9.2.4
citing_paper_count: 8
citing_patent_count: 0
download_count: 700
insert_date: 20220309
index_terms:
- ieee_terms:
  - Temperature distribution
  - Schottky diodes
  - Schottky barriers
  - Detectors
  - Dark current
  - Germanium
  - Broadband communication
- dynamic_index_terms:
  - Photodetector
  - Broadband Photodetectors
  - Relaxation Time
  - Specific Detection
  - Rise Time
  - Image Sensor
  - Camera Sensor
  - Schottky Barrier
  - Schottky Contact
  - Schottky Junction
  - High Carrier Mobility
  - Excellent Compatibility
  - Schottky Diode
  - Schottky Barrier Diodes
  - High Response
  - High Reactivity
  - Light Absorption
  - High-resolution Transmission Electron Microscopy
  - High-resolution Electron Microscopy
  - HRTEM
  - Power Density
  - 2D Materials
  - Antimony
  - Near-infrared
  - Photocurrent
  - Response Speed
  - Atomic Layer Deposition
  - Dark Current
  - Schottky Barrier Height
  - Hot Electrons
  - Hot Carriers
  - Plasma-enhanced Chemical Vapor Deposition
  - PECVD
  - Enhanced Light Absorption
  - Photoexcited Electrons
  - Complementary Metal Oxide Semiconductor Technology
  - Complementary Metal-oxide-semiconductor Technology
  - Line Array
  - Single-layer Graphene
  - Single Layer Graphene
  - Fermi Dirac
  - Fermi Function
  - Fermi Dirac Distribution
  - Fermi-Dirac
  - Fermi Distribution
  - Fermi-Dirac Distribution
  - Carrier Lifetime
isbn_formats:
- format: Print on Demand(PoD) ISBN, value: 978-1-6654-2573-5, isbnType: New-2005
- format: Electronic ISBN, value: 978-1-6654-2572-8, isbnType: New-2005
authors:
- Author Name: Lixiang Liu
  Affiliation: School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  Author URL: https://ieeexplore.ieee.org/author/37086595333
  ID: 37086595333
  Order: 1
  Author Affiliations:
  - School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
- Author Name: Xiaoxue Cao
  Affiliation: State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
  Author URL: https://ieeexplore.ieee.org/author/37089326322
  ID: 37089326322
  Order: 2
  Author Affiliations:
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
  - Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Zhejiang University, Hangzhou, China
- Author Name: Li Peng
  Affiliation: Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Zhejiang University, Hangzhou, China
  Author URL: https://ieeexplore.ieee.org/author/37089324598
  ID: 37089324598
  Order: 3
  Author Affiliations:
  - Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Zhejiang University, Hangzhou, China
- Author Name: Srikrishna Chanakya Bodepudi
  Affiliation: School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  Author URL: https://ieeexplore.ieee.org/author/38234487300
  ID: 38234487300
  Order: 4
  Author Affiliations:
  - School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
- Author Name: Shaoxiong Wu
  Affiliation: School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  Author URL: https://ieeexplore.ieee.org/author/37089323494
  ID: 37089323494
  Order: 5
  Author Affiliations:
  - School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
- Author Name: Wenzhang Fang
  Affiliation: Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Zhejiang University, Hangzhou, China
  Author URL: https://ieeexplore.ieee.org/author/37089325058
  ID: 37089325058
  Order: 6
  Author Affiliations:
  - Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Zhejiang University, Hangzhou, China
- Author Name: Junxue Liu
  Affiliation: State Key Laboratory of Molecular Reaction Dynamics and Dynamics, Chinese Academy of Sciences, Dalian, China
  Author URL: https://ieeexplore.ieee.org/author/37089325879
  ID: 37089325879
  Order: 7
  Author Affiliations:
  - State Key Laboratory of Molecular Reaction Dynamics and Dynamics, Chinese Academy of Sciences, Dalian, China
- Author Name: Yejun Xiao
  Affiliation: State Key Laboratory of Molecular Reaction Dynamics and Dynamics, Chinese Academy of Sciences, Dalian, China
  Author URL: https://ieeexplore.ieee.org/author/37089327365
  ID: 37089327365
  Order: 8
  Author Affiliations:
  - State Key Laboratory of Molecular Reaction Dynamics and Dynamics, Chinese Academy of Sciences, Dalian, China
- Author Name: Xiaochen Wang
  Affiliation: School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  Author URL: https://ieeexplore.ieee.org/author/37089395588
  ID: 37089395588
  Order: 9
  Author Affiliations:
  - School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
- Author Name: Zengfeng Di
  Affiliation: State Key Laboratory of Functional Materials for Informatics, Chinese Academy of Sciences, Shanghai, China
  Author URL: https://ieeexplore.ieee.org/author/37085383720
  ID: 37085383720
  Order: 10
  Author Affiliations:
  - State Key Laboratory of Functional Materials for Informatics, Chinese Academy of Sciences, Shanghai, China
- Author Name: Ran Cheng
  Affiliation: State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
  Author URL: https://ieeexplore.ieee.org/author/37089326500
  ID: 37089326500
  Order: 11
  Author Affiliations:
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
- Author Name: Yang Xu
  Affiliation: School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  Author URL: https://ieeexplore.ieee.org/author/38667267800
  ID: 38667267800
  Order: 12
  Author Affiliations:
  - School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center
- Author Name: Chao Gao
  Affiliation: Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Zhejiang University, Hangzhou, China
  Author URL: https://ieeexplore.ieee.org/author/37086375119
  ID: 37086375119
  Order: 13
  Author Affiliations:
  - Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Zhejiang University, Hangzhou, China
- Author Name: Bin Yu
  Affiliation: School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  Author URL: https://ieeexplore.ieee.org/author/37535092700
  ID: 37535092700
  Order: 14
  Author Affiliations:
  - School of Micro-Nano Electronics, ZJU-UIUC Joint Institute
  - State Key Laboratory of Silicon Materials, ZJU-Hangzhou Global Scientific and Technological Innovation Center

Image Sensor

sensor_type: CMOS
resolution: 500x500
dynamic_range: not specified
pixel_size: not specified
dark_current: 10^-6 A (10^-3 mA) or lower, varies with configuration

Optical Data

focal_length: not specified
aperture: not specified
field_of_view: not specified
distortion: not specified

Performance Metrics

Applications & Benefits

cell_imaging: not specified
benefits: Enhanced light absorption and improved SNR due to nMAG integration.

Supporting Organizations

supported_by: NSFC, China Postdoctoral Science Foundation, ZJU Micro-Nano Fabrication Center

Manuscript Details

publication_date: 11-16 Dec. 2021

Relevancy Score

score: 9
missing_fields:
- fill factor
- quantum efficiency
- readout speed
- noise sources
- analog-to-digital conversion techniques
- microlenses
- on-chip colour filters
- global or rolling shutters
- backside illumination

Processed JSON Filename

request_152ec41f-6338-4cde-bee9-6b4c312c24c6-macroscopicassembledgraphene_nanofilmsgermanium_broadband_photodetectors.json