Light Guide For Pixel Crosstalk Improvement In Deep Submicron Cmos Image Sensor

• doi: 10.1109/LED.2003.821597
• title: Light guide for pixel crosstalk improvement in deep submicron CMOS image sensor
• publisher: IEEE
• isbn:
• issn: 1558-0563
• rank: 2874
• access_type: LOCKED
• content_type: Journals
• abstract: Light guide, a novel dielectric structure consisting of PE-Oxide and FSG-Oxide, has been developed to reduce crosstalk in 0.18-μm CMOS image sensor technology. Due to the difference in refraction index (1.46 for PE-Oxide and 1.435 for FSG-Oxide), major part of the incident light can be totally reflected at the interface of PE-Oxide/FSG-Oxide, as the incidence angle is larger than total reflection angle. With this light guide, the pixel sensing capability can be enhanced and to reduce pixel crosstalk. Small pixels with pitch 3.0-μm and 4.0-μm have been characterized and examined. In 3.0-μm pixel, optical crosstalk achieves 30% reduction for incidence angle of light at 10/spl deg/.
• article_number: 1264102
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1264102
• html_url: https://ieeexplore.ieee.org/document/1264102/
• abstract_url: https://ieeexplore.ieee.org/document/1264102/
• publication_title: IEEE Electron Device Letters
• conference_location:
• conference_dates:
• publication_number: 55
• is_number: 28278
• publication_year: 2004
• publication_date: Jan. 2004
• start_page: 22
• end_page: 24
• citing_paper_count: 30
• citing_patent_count: 41
• download_count: 1110
• insert_date: 20040206
• index_terms:
  • ieee_terms:
    • Pixel
    • CMOS image sensors
    • CMOS technology
    • CMOS logic circuits
    • Optical refraction
    • Optical crosstalk
    • Image sensors
    • Computational Intelligence Society
    • Colored noise
    • Scanning electron microscopy
  • dynamic_index_terms:
    • Pixel Crosstalk
    • Deep Submicron
    • Total Reflection
    • Total Internal Reflection
    • Incident Angle
    • Refractive Index Difference
    • Angle Of Light
    • Small Pixel
    • Incident Angle Of Light
    • Pixel Size
    • CMOS Technology
    • Nearby Pixels
• authors:
  • Author Name: T.H. Hsu
    Affiliation: VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37275375200
    ID: 37275375200
    Order: 1
    Author Affiliations:
    • VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
  • Author Name: Y.K. Fang
    Affiliation: VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37281337200
    ID: 37281337200
    Order: 2
    Author Affiliations:
    • VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
  • Author Name: C.Y. Lin
    Affiliation: VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/38006343900
    ID: 38006343900
    Order: 3
    Author Affiliations:
    • VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
  • Author Name: S.F. Chen
    Affiliation: VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37308980500
    ID: 37308980500
    Order: 4
    Author Affiliations:
    • VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
  • Author Name: C.S. Lin
    Affiliation: VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37089917801
    ID: 37089917801
    Order: 5
    Author Affiliations:
    • VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
  • Author Name: D.N. Yaung
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37283323200
    ID: 37283323200
    Order: 6
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: S.G. Wuu
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37283321600
    ID: 37283321600
    Order: 7
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: H.C. Chien
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37268577700
    ID: 37268577700
    Order: 8
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: C.H. Tseng
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37275611700
    ID: 37275611700
    Order: 9
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: J.S. Lin
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/38183952200
    ID: 38183952200
    Order: 10
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: C.S. Wang
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37280017000
    ID: 37280017000
    Order: 11
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: 3.0 and 4.0 µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Not specified
• benefits: Improvement in optical performance and reduction in pixel crosstalk, enhancing imaging capability.

Supporting Organizations

• supported_by: National Science Council of Taiwan, R.O.C.; Taiwan Semiconductor Manufacturing Company

Manuscript Details

• publication_date: Jan. 2004

Relevancy Score

• score: 9
• missing_fields:
  • resolution
  • dynamic_range
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

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