Ion Implantation Technology For Image Sensors

• doi: 10.1109/IIT.2016.7882888
• title: Ion Implantation Technology for Image Sensors
• publisher: IEEE
• isbn: 978-1-5090-2025-6
• issn:
• rank: 2836
• access_type: LOCKED
• content_type: Conferences
• abstract: Image sensor technologies have been advanced drastically and they brought fruitful success in the market. During the image sensor development, ion implantation technologies have played important roles; 1) Many ion implantation steps are applied to fabricate specific structures, such as PPD (pinned photodiode), special isolation structure, and to tune transistors at pixels. PPD, primary technology for CCD (charge-coupled device) and CMOS image sensors, realizes low dark current together with no image lag, low noise, and large saturation. 2) High energy and precise angle implantations are needed to obtain deep PD and deep doping isolation. 3) Image sensors are sensitive to metal contamination. Therefore, the dark current spectroscopy using image sensors can identify the metals and evaluate the metal density precisely. To reduce dark current, less metal contamination is required, together with the gettering technologies.
• article_number: 7882888
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7882888
• html_url: https://ieeexplore.ieee.org/document/7882888/
• abstract_url: https://ieeexplore.ieee.org/document/7882888/
• publication_title: 2016 21st International Conference on Ion Implantation Technology (IIT)
• conference_location: Tainan, Taiwan
• conference_dates: 26-30 Sept. 2016
• publication_number: 7879975
• is_number: 7882830
• publication_year: 2016
• publication_date: 26-30 Sept. 2016
• start_page: 1
• end_page: 6
• citing_paper_count: 1
• citing_patent_count: 0
• download_count: 746
• insert_date: 20170323
• index_terms:
  • ieee_terms:
    • Dark current
    • Metals
    • Ion implantation
    • CMOS image sensors
    • Contamination
    • Photodiodes
  • dynamic_index_terms:
    • Ionizing Radiation
    • Ion Irradiation
    • Ion Implantation
    • Image Sensor
    • Camera Sensor
    • Ion Implantation Technology
    • CCD Camera
    • Charge-coupled Device
    • Low Noise
    • Metal Contamination
    • Dark Current
    • Market Success
    • Low Dark Current
    • PIN Photodiode
    • Digital Camera
    • Recombination Rate
    • Electron Hole Pairs
    • Depletion Region
    • Space Charge Region
    • Depletion Layer
    • Depletion Zone
    • Smartphone Camera
    • Phone Camera
    • P-n Junction
    • polySia
    • Polycrystalline Silicon
    • Polysilicon
    • Complete Transfer
    • Neutral Regions
    • Attenuation Length
    • Absorption Lengths
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-5090-2025-6, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5090-2024-9, isbnType: New-2005
• authors:
  • Author Name: Nobukazu Teranishi
    Affiliation: University of Hyogo, Hyogo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37351891200
    ID: 37351891200
    Order: 1
    Author Affiliations:
    • University of Hyogo, Hyogo, Japan
    • Shizuoka University, Hamamatsu, Japan

Image Sensor

• sensor_type: CMOS
• resolution: 1 μm-pixel
• dynamic_range: not specified
• pixel_size: 1 μm
• dark_current: 0.2 e- rms noise achieved

Optical Data

• focal_length: not specified
• aperture: not specified
• field_of_view: not specified
• distortion: not specified

Performance Metrics

• noise: 0.2 e-

Applications & Benefits

• cell_imaging: Used in various applications such as smartphones, medical devices, and automotive systems.
• benefits: Conversion of light to electrical signals enables digital imaging.

Supporting Organizations

• supported_by: Sumitomo Heavy Industrials Ion Technology

Manuscript Details

• publication_date: 26-30 Sept. 2016

Relevancy Score

• score: 10
• missing_fields:
  • dynamic_range
  • fill_factor
  • quantum_efficiency
  • readout_speed
  • noise_sources
  • analog_to_digital_conversion_techniques
  • microlenses
  • on_chip_colour_filters
  • global_or_rolling_shutters
  • backside_illumination

Processed JSON Filename

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