Interelement Coupling Effects In Pulseecho Ultrasonic Fingerprint Sensors

• doi: 10.1109/MEMSYS.2017.7863629
• title: Inter-element coupling effects in pulse-echo ultrasonic fingerprint sensors
• publisher: IEEE
• isbn: 978-1-5090-5079-6
• issn:
• rank: 2819
• access_type: LOCKED
• content_type: Conferences
• abstract: Ultrasonic fingerprint sensors based on micromachined ultrasound transducers require very fine pitch to achieve high resolution imaging. We investigate a 110×56 PMUT array based on monolithic eutectic bonding to CMOS. To achieve high fill-factor, the PMUTs are anchored through small eutectic pillars, resulting in a high degree of mutual coupling between neighboring PMUTs. As a result, the mode shape is more complicated than a single-MUT dynamic model. We created a finite element model that better models the mode shapes exhibited by the entire array. Experimental measurement of the mode-shape via laser Doppler vibrometry allows us to compute the volume velocity, which correlates to the measured far field pressure.
• article_number: 7863629
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7863629
• html_url: https://ieeexplore.ieee.org/document/7863629/
• abstract_url: https://ieeexplore.ieee.org/document/7863629/
• publication_title: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
• conference_location: Las Vegas, NV, USA
• conference_dates: 22-26 Jan. 2017
• publication_number: 7852393
• is_number: 7863316
• publication_year: 2017
• publication_date: 22-26 Jan. 2017
• start_page: 1192
• end_page: 1195
• citing_paper_count: 6
• citing_patent_count: 1
• download_count: 831
• insert_date: 20170228
• index_terms:
  • ieee_terms:
    • Pressure measurement
    • Acoustics
    • Shape
    • Finite element analysis
    • Volume measurement
    • Velocity measurement
    • Pulse measurements
  • dynamic_index_terms:
    • Ultrasonic Sensors
    • Ultrasonic Detection
    • Fingerprint Sensors
    • Volume Flow
    • Volume Flow Rate
    • Volumetric Flow Rate
    • Fluid Flow Rate
    • Flow Intensity
    • Far-field
    • Eutectic
    • Mode Shapes
    • Degree Of Coupling
    • High Fill Factor
    • Laser Doppler Vibrometer
    • Laser Vibrometer
    • Laser Doppler Vibrometry
    • High Voltage
    • Higher Tendency
    • Finite Element Method
    • Piezoelectric
    • Surface Pressure
    • Top Electrode
    • Acoustic Radiation
    • Input Pulse
    • Finite Element Method Model
    • Peak Displacement
    • Adjacent Columns
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-5090-5079-6, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5090-5078-9, isbnType: New-2005
• authors:
  • Author Name: Xiaoyue Jiang
    Affiliation: Univeristy of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085699649
    ID: 37085699649
    Order: 1
    Author Affiliations:
    • Univeristy of California, Berkeley, CA, USA
  • Author Name: Hao-Yen Tang
    Affiliation: Univeristy of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085442217
    ID: 37085442217
    Order: 2
    Author Affiliations:
    • Univeristy of California, Berkeley, CA, USA
  • Author Name: Yipeng Lu
    Affiliation: Univeristy of California, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085445079
    ID: 37085445079
    Order: 3
    Author Affiliations:
    • Univeristy of California, Davis, CA, USA
  • Author Name: Eldwin J. Ng
    Affiliation: Invensense Inc., San Jose, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37711201400
    ID: 37711201400
    Order: 4
    Author Affiliations:
    • Invensense Inc., San Jose, CA, USA
  • Author Name: Julius M. Tsai
    Affiliation: Invensense Inc., San Jose, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085530599
    ID: 37085530599
    Order: 5
    Author Affiliations:
    • Invensense Inc., San Jose, CA, USA
  • Author Name: Michael J. Daneman
    Affiliation: Invensense Inc., San Jose, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37350139600
    ID: 37350139600
    Order: 6
    Author Affiliations:
    • Invensense Inc., San Jose, CA, USA
  • Author Name: Bernhard E. Boser
    Affiliation: Univeristy of California, Berkeley, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37282431400
    ID: 37282431400
    Order: 7
    Author Affiliations:
    • Univeristy of California, Berkeley, CA, USA
  • Author Name: David A. Horsley
    Affiliation: Univeristy of California, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37372231100
    ID: 37372231100
    Order: 8
    Author Affiliations:
    • Univeristy of California, Davis, CA, USA

Image Sensor

• sensor_type: CMOS
• resolution: 591x438 DPI
• dynamic_range: Not specified
• pixel_size: 43 µm x 30 µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Ultrasonic fingerprint sensors for consumer electronics.
• benefits: High resolution and performance up to 500 DPI, suitable for biometric applications.

Supporting Organizations

• supported_by: Invensense Inc.

Manuscript Details

• publication_date: 22-26 Jan. 2017

Relevancy Score

• score: 8
• missing_fields:
  • dynamic_range
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_e3a12f75-d919-4d38-b490-003405673cc8-interelement_coupling_effects_in_pulseecho_ultrasonic_fingerprint_sensors.json