Improvement Of Rts Noise And Peel Off Issue Of Bsi Cis Products By Changing Fep Film Stack Raw Material

• doi: 10.1109/EDTM55494.2023.10102943
• title: Improvement of RTS Noise and Peel Off Issue of BSI CIS Products by Changing FEP Film Stack Raw Material
• publisher: IEEE
• isbn: 979-8-3503-3253-7
• issn:
• rank: 2752
• access_type: LOCKED
• content_type: Conferences
• abstract: The improvement of random telegraph signal (RTS) noise is an important research topic, as downscaling of transistors and the increase of the photosensitive are required with maintaining sensitivity in low-light conditions for high-resolution CMOS image sensors. Here, we report an improvement in RTS noise with Al2O3 as field effect passivation (FEP)'s raw material. Furthermore, in order to apply to mass production of wafer-level, we present a method to overcome Al2O3 peel-off issues from Si surface.
• article_number: 10102943
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10102943
• html_url: https://ieeexplore.ieee.org/document/10102943/
• abstract_url: https://ieeexplore.ieee.org/document/10102943/
• publication_title: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
• conference_location: Seoul, Korea, Republic of
• conference_dates: 7-10 March 2023
• publication_number: 10102927
• is_number: 10102928
• publication_year: 2023
• publication_date: 7-10 March 2023
• start_page: 1
• end_page: 4
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 297
• insert_date: 20230426
• index_terms:
  • ieee_terms:
    • Mass production
    • Sensitivity
    • CMOS image sensors
    • Raw materials
    • Silicon
    • Manufacturing
    • Transistors
  • author_terms:
    • CMOS image sensor
    • RTS noise and FEP
  • dynamic_index_terms:
    • Raw Materials
    • Feedstock
    • Noise Issues
    • Random Telegraph Signal
    • Random Telegraph Signal Noise
    • Random-telegraph Signal Noise
    • Image Sensor
    • Camera Sensor
    • Low Light Conditions
    • Si Surface
    • High-resolution Sensors
    • Thermal Stability
    • Low Voltage
    • Tensile Stress
    • Gate Oxide
    • Gate-oxide
    • Low Threshold Voltage
    • Al2O3 Film
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 979-8-3503-3253-7, isbnType: New-2005
  • format: Electronic ISBN, value: 979-8-3503-3252-0, isbnType: New-2005
• authors:
  • Author Name: So-Yun Kim
    Affiliation: SK Hynix System IC, Korea
    Author URL: https://ieeexplore.ieee.org/author/37089818174
    ID: 37089818174
    Order: 1
    Author Affiliations:
    • SK Hynix System IC, Korea
  • Author Name: Joohee Kim
    Affiliation: SK Hynix System IC, Korea
    Author URL: https://ieeexplore.ieee.org/author/37089821978
    ID: 37089821978
    Order: 2
    Author Affiliations:
    • SK Hynix System IC, Korea
  • Author Name: Heejeong Hong
    Affiliation: SK Hynix System IC, Korea
    Author URL: https://ieeexplore.ieee.org/author/37089819521
    ID: 37089819521
    Order: 3
    Author Affiliations:
    • SK Hynix System IC, Korea
  • Author Name: Youngju Lee
    Affiliation: SK Hynix System IC, Korea
    Author URL: https://ieeexplore.ieee.org/author/37089817684
    ID: 37089817684
    Order: 4
    Author Affiliations:
    • SK Hynix System IC, Korea
  • Author Name: Wonho Lee
    Affiliation: SK Hynix System IC, Korea
    Author URL: https://ieeexplore.ieee.org/author/37089821643
    ID: 37089821643
    Order: 5
    Author Affiliations:
    • SK Hynix System IC, Korea

Image Sensor

• sensor_type: CMOS
• resolution: High-resolution
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Improvement in dark current due to Al2O3 involvement

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• noise: RTS noise decreased by -39.3%

Applications & Benefits

• cell_imaging: Applicable for high-resolution image sensing especially in low-light conditions
• benefits: Enhanced RTS noise performance, improved thermal stability

Supporting Organizations

• supported_by: SK Hynix System IC, CIS department from SK Hynix Inc.

Manuscript Details

• publication_date: 7-10 March 2023

Relevancy Score

• score: 10
• missing_fields:
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption

Processed JSON Filename

request_1217ff01-49af-4b04-9f67-b3b303e53f7b-improvement_of_rts_noise_and_peel_off_issue_of_bsi_cis_products_by_changing_fep_film_stack_raw_material.json