Improvement For Bond Pads Discolor Sic Of Cmos Image Sensor Products

• doi: 10.1109/ISDRS.2001.984442
• title: Improvement for bond pads discolor (sic) of CMOS image sensor products
• publisher: IEEE
• isbn: 0-7803-7432-0
• issn:
• partnum: 01EX497
• rank: 2751
• access_type: LOCKED
• content_type: Conferences
• abstract: The CMOS image sensor is covered with a color filter. Bond pads discoloration was found after the color filter process. SEM analysis showed metal loss of the bond pads, and residues in the discolored area. EDS results showed the residues contained mostly C and O elements, indicating photoresist residues. These defects caused package reliability problems based on a bondability test. Color filter processes are composed of multicolor photoresist layers. During several development processes most of the metal was lost, inducing metal film roughness and then causing photoresist residues on the bond pads. In order to improve bond pads discoloration, two methods for the color filter processes were evaluated: (1) decreased rework (development process) frequency, and (2) added bond pads protection, which showed some success.
• article_number: 984442
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=984442
• html_url: https://ieeexplore.ieee.org/document/984442/
• abstract_url: https://ieeexplore.ieee.org/document/984442/
• publication_title: 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
• conference_location: Washington, DC, USA
• conference_dates: 5-7 Dec. 2001
• publication_number: 7731
• is_number: 21224
• publication_year: 2001
• publication_date: 5-7 Dec. 2001
• start_page: 77
• end_page: 78
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 260
• insert_date: 20020807
• index_terms:
  • ieee_terms:
    • Bonding
    • Atherosclerosis
    • CMOS image sensors
    • Filters
    • Color
    • Computational Intelligence Society
    • Scanning electron microscopy
    • Protection
    • Resists
    • Frequency
  • dynamic_index_terms:
    • Bond Pads
    • Scanning Electron Microscopy
    • Energy-dispersive X-ray Spectroscopy
    • Energy Dispersive Spectroscopy
    • Color Filter
• isbn_formats:
  • format: Print ISBN, value: 0-7803-7432-0, isbnType: Historical
• authors:
  • Author Name: Chih-Hsing Chen
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087454773
    ID: 37087454773
    Order: 1
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Hong-Wen Huang
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088179241
    ID: 37088179241
    Order: 2
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Chih-Chen Kuo
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088181567
    ID: 37088181567
    Order: 3
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Hung-Jen Tsai
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087454248
    ID: 37087454248
    Order: 4
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Not specified
• benefits: Used in smartphones, medical devices, and automotive systems.

Supporting Organizations

• supported_by: Taiwan Semiconductor Manufacturing Company Ltd. (TSMC)

Manuscript Details

• publication_date: 5-7 Dec. 2001

Relevancy Score

• score: 10
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging
  • benefits
  • publication_date

Processed JSON Filename

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