Hydrogen Termination Effect On Sio2si Interface State Defects Of Silicon Hydride And Hydrocarbon Hybridmolecularionimplanted Silicon Epitaxial Wafer

• doi: 10.23919/IWJT59028.2023.10175180
• title: Hydrogen Termination Effect on SiO2/Si Interface State Defects of Silicon Hydride and Hydrocarbon Hybrid-Molecular-Ion-Implanted Silicon Epitaxial Wafer
• publisher: IEEE
• isbn: 979-8-3503-1642-1
• issn: 2831-9656
• rank: 2676
• access_type: LOCKED
• content_type: Conferences
• abstract: In recent years, a three-dimensional stacked CMOS image sensor (3D-CIS) has been adopted for high performance. In 3D-CIS, the pixel and the pixel data processing function are fabricated on separate wafers, and the wafers are bonded by Cu-Cu hybrid bonding or Cu through-silicon via (Cu TSV) [1–3].However, it may cause Cu contamination if the barrier layer in the Cuinter connect is insufficient. In addition, deep trench isolation (DTI) isused in the isolation region with the aim of reducing cross talk (mixed colors) with adjacent pixels. In particular, the SiO2/Si interface state forms a deep energy level in the silicon band gap and functions as a generation-recombination center (G-R center) of carriers. Since it is well known that this G-R center greatly affects the electrical characteristics of CMOS image sensors, the reduction of interface state density (Dit) atSiO2/Si is an important technical issue [4–10].
• article_number: 10175180
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10175180
• html_url: https://ieeexplore.ieee.org/document/10175180/
• abstract_url: https://ieeexplore.ieee.org/document/10175180/
• publication_title: 2023 21st International Workshop on Junction Technology (IWJT)
• conference_location: Kyoto, Japan
• conference_dates: 8-9 June 2023
• publication_number: 10175156
• is_number: 10175093
• publication_year: 2023
• publication_date: 8-9 June 2023
• start_page: 1
• end_page: 4
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 188
• insert_date: 20230712
• index_terms:
  • ieee_terms:
    • Temperature distribution
    • Heat treatment
    • Hydrogen
    • Hydrocarbons
    • CMOS image sensors
    • Silicon
    • Epitaxial growth
  • dynamic_index_terms:
    • Interface States
    • Silicon Hydride
    • Sensor Characteristics
    • Adjacent Pixels
    • Barrier Layer
    • Color Mixing
    • Reduction In The Amount
    • Ion Beam
    • Molecular Ion
    • Bound State
    • Silicon Wafer
    • Pre-exponential Factor
    • Reaction Rate Constant
    • Hydrogen Concentration
    • Point Defects
    • Epitaxial Growth
    • Arrhenius Plot
    • Secondary Ion Mass Spectrometry
    • Vacancy Concentration
    • Heat Treatment Temperature
    • Hydrogen Diffusion
    • Hydrogen Desorption
    • Ion Dose
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 979-8-3503-1642-1, isbnType: New-2005
  • format: Electronic ISBN, value: 978-4-86348-807-6, isbnType: New-2005
• authors:
  • Author Name: Ryosuke Okuyama
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086166253
    ID: 37086166253
    Order: 1
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
  • Author Name: Takeshi Kadono
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086167473
    ID: 37086167473
    Order: 2
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
  • Author Name: Ayumi Masada
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086168722
    ID: 37086168722
    Order: 3
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
  • Author Name: Akihiro Suzuki
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086949649
    ID: 37086949649
    Order: 4
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
  • Author Name: Koji Kobayashi
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086953518
    ID: 37086953518
    Order: 5
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
  • Author Name: Ryo Hirose
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086167354
    ID: 37086167354
    Order: 6
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
  • Author Name: Yoshihiro Koga
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086167475
    ID: 37086167475
    Order: 7
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
  • Author Name: Kazunari Kurita
    Affiliation: SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086170826
    ID: 37086170826
    Order: 8
    Author Affiliations:
    • SUMCO CORPORATION 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga, Japan

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Dramatically improved due to hydrogen termination effect in fabricated CMOS image sensors as reported in previous studies (exact value not specified).

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: High-performance CMOS image sensors are used in applications such as smartphones and medical devices.
• benefits: Improved parameters like dark current and white spot defects lead to better image quality.

Supporting Organizations

• supported_by: SUMCO Corporation

Manuscript Details

• publication_date: 8-9 June 2023

Relevancy Score

• score: 9
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • publication_date

Processed JSON Filename

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