Fabrication Of Vga Size Nearinfrared Image Sensor Using Roomtemperature Flipchip Bonding Technology

• doi: 10.1109/EPTC.2014.7028408
• title: Fabrication of VGA size near-infrared image sensor using room-temperature flip-chip bonding technology
• publisher: IEEE
• isbn: 978-1-4799-6994-4
• issn:
• rank: 2476
• access_type: LOCKED
• content_type: Conferences
• abstract: Room-temperature bonding technique using cone-shaped microbumps with the aid of ultrasonic vibration is applied to the fabrication of a near-infrared image sensor. The image sensor is fabricated using the flip-chip bonding of an InGaAs/InP photodiode-array chip and a Si CMOS readout IC chip. The pixel pitch is 15 μm to compose VGA class (640 × 512 pixels) resolution. High-quality imaging of a heated object and blood vessels of human hand is demonstrated.
• article_number: 7028408
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7028408
• html_url: https://ieeexplore.ieee.org/document/7028408/
• abstract_url: https://ieeexplore.ieee.org/document/7028408/
• publication_title: 2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)
• conference_location: Singapore
• conference_dates: 3-5 Dec. 2014
• publication_number: 7005556
• is_number: 7028249
• publication_year: 2014
• publication_date: 3-5 Dec. 2014
• start_page: 536
• end_page: 539
• citing_paper_count: 1
• citing_patent_count: 0
• download_count: 165
• insert_date: 20150202
• index_terms:
  • ieee_terms:
    • Bonding
    • Acoustics
    • Gold
    • Image sensors
    • Arrays
    • Photodiodes
  • dynamic_index_terms:
    • Image Sensor
    • Camera Sensor
    • Sensor Fabrication
    • Sensor Material
    • Textile Sensors
    • Near-infrared Imaging
    • Flip-chip
    • Microbumps
    • Photodiode Array
    • Ultrasonic Vibration
    • Pixel Pitch
    • Thermal Expansion
    • Coefficient Of Thermal Expansion
    • Crystal Grains
    • Small Bump
• isbn_formats:
  • format: Electronic ISBN, value: 978-1-4799-6994-4, isbnType: New-2005
• authors:
  • Author Name: Takanori Shuto
    Affiliation: Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka, Japan
    Author URL: https://ieeexplore.ieee.org/author/38029937600
    ID: 38029937600
    Order: 1
    Author Affiliations:
    • Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka, Japan
  • Author Name: Keiichiro Iwanabe
    Affiliation: Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka, Japan
    Author URL: https://ieeexplore.ieee.org/author/38261212600
    ID: 38261212600
    Order: 2
    Author Affiliations:
    • Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka, Japan
  • Author Name: Mutsuo Ogura
    Affiliation: IRspec Corporation, Tsukuba, Japan
    Author URL: https://ieeexplore.ieee.org/author/37086186912
    ID: 37086186912
    Order: 3
    Author Affiliations:
    • IRspec Corporation, Tsukuba, Japan
  • Author Name: Katsuhiko Nishida
    Affiliation: IRspec Corporation, Tsukuba, Japan
    Author URL: https://ieeexplore.ieee.org/author/37085540263
    ID: 37085540263
    Order: 4
    Author Affiliations:
    • IRspec Corporation, Tsukuba, Japan
  • Author Name: Tanemasa Asano
    Affiliation: Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka, Japan
    Author URL: https://ieeexplore.ieee.org/author/37277985700
    ID: 37277985700
    Order: 5
    Author Affiliations:
    • Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka, Japan

Image Sensor

• sensor_type: CMOS
• resolution: 640 × 512
• dynamic_range: Not specified
• pixel_size: 15 μm × 15 μm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: The device is capable of observing blood vessels and heated objects, indicating potential applications in medical and health-care imaging.
• benefits: Provides useful information about living bodies, enabling various applications.

Supporting Organizations

• supported_by: Supported by the Supporting Industry Program of METI.

Manuscript Details

• publication_date: 3-5 Dec. 2014

Relevancy Score

• score: 8
• missing_fields:
  • dynamic_range
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

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