Development Of Advanced Intercolorfilter Grid On Submicronpixel Cmos Image Sensor For Mobile Cameras With High Sensitivity And High Resolution

• doi: 10.23919/VLSICircuits52068.2021.9492339
• title: Development of Advanced Inter-Color-Filter Grid on Sub-Micron-Pixel CMOS Image Sensor for Mobile Cameras with High Sensitivity and High Resolution
• publisher: IEEE
• isbn: 978-1-6654-4766-9
• issn: 2158-5601
• rank: 2234
• access_type: LOCKED
• content_type: Conferences
• abstract: Sub-micron pixels have been widely adopted in recent CMOS image sensors to implement high resolution cameras in small form factors, i.e. slim mobile-phones. Even with shrinking pixels, customers demand higher image quality, and the pixel performance must remain comparable to that of the previous generations. Conventionally, to suppress the optical crosstalk between pixels, a metal grid has been used as an isolation structure between adjacent color filters. However, as the pixel size continues to shrink to the sub-micron regime, an optical loss increases because the focal spot size of the pixel’s microlens does not downscale accordingly with the decreasing pixel size due to the diffraction limit: the light absorption inevitably occurs in the metal grid. For the first time, we have demonstrated a new lossless, dielectric-only grid scheme. The result shows 29 % increase in sensitivity and +1.2-dB enhancement in Y-SNR when compared to the previous hybrid metal-and-dielectric grid.
• article_number: 9492339
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9492339
• html_url: https://ieeexplore.ieee.org/document/9492339/
• abstract_url: https://ieeexplore.ieee.org/document/9492339/
• publication_title: 2021 Symposium on VLSI Circuits
• conference_location: Kyoto, Japan
• conference_dates: 13-19 June 2021
• publication_number: 9492225
• is_number: 9492226
• publication_year: 2021
• publication_date: 13-19 June 2021
• start_page: 1
• end_page: 2
• citing_paper_count: 7
• citing_patent_count: 0
• download_count: 535
• insert_date: 20210728
• index_terms:
  • ieee_terms:
    • Optical filters
    • Optical losses
    • Sensitivity
    • Optical diffraction
    • Image resolution
    • Diffraction
    • Optical crosstalk
  • author_terms:
    • image sensor
    • CIS
    • sub-micron pixel
    • color filter
    • isolation
    • sensitivity
    • crosstalk
    • grid
    • micro lens and diffraction
  • dynamic_index_terms:
    • Image Sensor
    • Camera Sensor
    • Pixel Size
    • Light Absorption
    • Downscaling
    • Lossless
    • Color Filter
    • Colour Filter
    • Metal Grid
    • Metallic Grid
    • Small Form Factor
    • Optical Absorption
    • Quantum Efficiency
    • Finite-difference Time-domain
    • FDTD
    • Finite-difference Time-domain Method
    • Finite Difference Time Domain
    • Finite-difference Time-domain Simulations
    • Finite Difference Time Domain Simulations
    • Microlenses
    • Micro Lens
    • Micro-lens
    • Spherical Lens
    • Spherical Lenses
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-6654-4766-9, isbnType: New-2005
  • format: Electronic ISBN, value: 978-4-86348-780-2, isbnType: New-2005
• authors:
  • Author Name: In-Sung Joe
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37604037000
    ID: 37604037000
    Order: 1
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Yunki Lee
    Affiliation: Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/38190512200
    ID: 38190512200
    Order: 2
    Author Affiliations:
    • Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
  • Author Name: Hye Yeon Park
    Affiliation: Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088920128
    ID: 37088920128
    Order: 3
    Author Affiliations:
    • Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
  • Author Name: Jong Uk Kim
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921090
    ID: 37088921090
    Order: 4
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Dongyeon Kang
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088922634
    ID: 37088922634
    Order: 5
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Taehoon Kim
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088367535
    ID: 37088367535
    Order: 6
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Minkwan Kim
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088922251
    ID: 37088922251
    Order: 7
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Kwangmin Lee
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088920182
    ID: 37088920182
    Order: 8
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Minsung Heo
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088920122
    ID: 37088920122
    Order: 9
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Inho Ro
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921795
    ID: 37088921795
    Order: 10
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Jinhyung Kim
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921676
    ID: 37088921676
    Order: 11
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Inyong Park
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088919622
    ID: 37088919622
    Order: 12
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Seokjin Kwon
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921476
    ID: 37088921476
    Order: 13
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Kisang Yoon
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921821
    ID: 37088921821
    Order: 14
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Dami Park
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37085741944
    ID: 37085741944
    Order: 15
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Changkyu Lee
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088367823
    ID: 37088367823
    Order: 16
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Eunyoung Jo
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088919830
    ID: 37088919830
    Order: 17
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Minhwan Jeon
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088920011
    ID: 37088920011
    Order: 18
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Chanho Park
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088920243
    ID: 37088920243
    Order: 19
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Kyung Rae Byun
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921807
    ID: 37088921807
    Order: 20
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Chong Kwang Chang
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088922015
    ID: 37088922015
    Order: 21
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: JaeSung Hur
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088922768
    ID: 37088922768
    Order: 22
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Kijoong Yoon
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921820
    ID: 37088921820
    Order: 23
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Taeksoo Jeon
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37270411000
    ID: 37270411000
    Order: 24
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Jaehak Lee
    Affiliation: Samsung Electronics, Foundry Business, Yonginsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088921842
    ID: 37088921842
    Order: 25
    Author Affiliations:
    • Samsung Electronics, Foundry Business, Yonginsi, Gyeonggido, Korea
  • Author Name: Jungho Park
    Affiliation: Samsung Electronics, Foundry Business, Yonginsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088809933
    ID: 37088809933
    Order: 26
    Author Affiliations:
    • Samsung Electronics, Foundry Business, Yonginsi, Gyeonggido, Korea
  • Author Name: Bumsuk Kim
    Affiliation: Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37067977300
    ID: 37067977300
    Order: 27
    Author Affiliations:
    • Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
  • Author Name: JungChak Ahn
    Affiliation: Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/38042315400
    ID: 38042315400
    Order: 28
    Author Affiliations:
    • Samsung Electronics, System LSI Business, Yonginsi, Gyeonggido, Korea
  • Author Name: Hyunchul Kim
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37088368144
    ID: 37088368144
    Order: 29
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Chang-Rok Moon
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37287589400
    ID: 37287589400
    Order: 30
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
  • Author Name: Hyoung-Sub Kim
    Affiliation: Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea
    Author URL: https://ieeexplore.ieee.org/author/37292781000
    ID: 37292781000
    Order: 31
    Author Affiliations:
    • Samsung Electronics, Semiconductor R&D Center, Hwaseongsi, Gyeonggido, Korea

Image Sensor

• sensor_type: CMOS
• resolution: Over 100 MP
• dynamic_range: Not specified
• pixel_size: 0.64 µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• signal_to_noise_ratio: 1.2 dB improvement in Y-SNR
• sensitivity: 29% increase in green sensitivity

Applications & Benefits

• cell_imaging: Not specified
• benefits: Higher image quality and improved sensitivity with the new metal-free grid technology.

Supporting Organizations

• supported_by: Samsung Electronics, Semiconductor R&D Center, System LSI, Foundry Business

Manuscript Details

• publication_date: 13-19 June 2021

Relevancy Score

• score: 10

Processed JSON Filename

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