Design And Characterization Of Nearinfrared Sensitivityenhanced Threetap Fully Depleted Image Sensor For Fluorescence Lifetime Imaging

• doi: 10.1109/JSEN.2022.3195766
• title: Design and Characterization of Near-Infrared Sensitivity-Enhanced Three-Tap Fully Depleted Image Sensor for Fluorescence Lifetime Imaging
• publisher: IEEE
• isbn:
• issn: 2379-9153
• rank: 2089
• access_type: LOCKED
• content_type: Journals
• abstract: A backside illumination (BSI) silicon-based CMOS image sensor (CIS) with three transfer gates is designed and optimized for near-infrared (NIR) fluorescence lifetime imaging microscopy (FLIM) applications. A three-tap design is considered for a more efficient fluorescence acquisition, avoiding sample damage and photobleaching. A thick silicon substrate and a p-well funnel are applied to obtain better external quantum efficiency (EQE) and lower parasitic light sensitivity (PLS) in the NIR range. In addition, the photocharge collection speed of the pixel is investigated and optimized. This three-tap image sensor performs a high EQE of 42.6% and a low PLS of −60 dB at 940 nm and a pixel response of 7.41 ns. Fluorescence lifetime imaging with a developed image sensor is demonstrated with accuracy as an example with the 705-nm peak emission.
• article_number: 9852984
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9852984
• html_url: https://ieeexplore.ieee.org/document/9852984/
• abstract_url: https://ieeexplore.ieee.org/document/9852984/
• publication_title: IEEE Sensors Journal
• conference_location:
• conference_dates:
• publication_number: 7361
• is_number: 9906561
• publication_year: 2022
• publication_date: 1 Oct.1, 2022
• start_page: 18428
• end_page: 18436
• citing_paper_count: 1
• citing_patent_count: 0
• download_count: 590
• insert_date: 20220809
• index_terms:
  • ieee_terms:
    • Fluorescence
    • Sensors
    • Logic gates
    • Image sensors
    • Substrates
    • Imaging
    • Silicon
  • author_terms:
    • CMOS image sensor (CIS)
    • fluorescence lifetime imaging microscopy (FLIM)
    • multitap image sensor
    • near-infrared (NIR)
    • Taguchi method
    • time gating
  • dynamic_index_terms:
    • Image Sensor
    • Camera Sensor
    • Fluorescence Lifetime
    • Fluorescence Lifetime Imaging Microscopy
    • FLIM
    • Fluorescence Lifetime Imaging
    • Quantum Efficiency
    • Substrate Thickness
    • Light Sensitivity
    • Photophobic
    • Near-infrared Range
    • Experimental Design
    • Electron Transfer
    • Light Absorption
    • Processing Conditions
    • Fill Factor
    • Decay Process
    • Potential Gradient
    • Time-correlated Single-photon Counting
    • TCSPC
    • Time-correlated Single Photon Counting
    • Impulse Response Functions
    • Impulse-response Functions
    • Layout Design
    • Fluorescence Lifetime Measurements
    • Single-photon Avalanche Diode
    • Single Photon Avalanche Diode
    • Bulk Transport
    • Gate Length
    • Gate Lengths
    • Pixel Pitch
    • Transfer Path
    • Damaged Specimens
    • Microlenses
    • Micro Lens
    • Micro-lens
    • Volume Concentration
    • Intensity Concentration
    • Photoelectron
    • Photoelectric
    • Taguchi Method
    • Taguchi Methods
• authors:
  • Author Name: Yun-Tzu Chang
    Affiliation: Department of Electrical Engineering (ESAT), KU Leuven, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37089549361
    ID: 37089549361
    Order: 1
    Author Affiliations:
    • Department of Electrical Engineering (ESAT), KU Leuven, Leuven, Belgium
    • imec, Leuven, Belgium
  • Author Name: Pol Van Dorpe
    Affiliation: imec, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37329025100
    ID: 37329025100
    Order: 2
    Author Affiliations:
    • imec, Leuven, Belgium
    • Department of Physics and Astronomy, KU Leuven, Leuven, Belgium
  • Author Name: Celso Cavaco
    Affiliation: imec, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37086360704
    ID: 37086360704
    Order: 3
    Author Affiliations:
    • imec, Leuven, Belgium
  • Author Name: Andrea Vinci
    Affiliation: imec, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37089318148
    ID: 37089318148
    Order: 4
    Author Affiliations:
    • imec, Leuven, Belgium
  • Author Name: Mitali Sinha
    Affiliation: imec, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37089552457
    ID: 37089552457
    Order: 5
    Author Affiliations:
    • imec, Leuven, Belgium
  • Author Name: Pierre Boulenc
    Affiliation: Gpixel, Antwerp, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37318154400
    ID: 37318154400
    Order: 6
    Author Affiliations:
    • Gpixel, Antwerp, Belgium
  • Author Name: Andreas Süss
    Affiliation: OmniVision Technologies, Santa Clara, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37891664000
    ID: 37891664000
    Order: 7
    Author Affiliations:
    • OmniVision Technologies, Santa Clara, CA, USA
  • Author Name: Tom Verschooten
    Affiliation: imec, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37089549916
    ID: 37089549916
    Order: 8
    Author Affiliations:
    • imec, Leuven, Belgium
  • Author Name: Chris Van Hoof
    Affiliation: Department of Electrical Engineering (ESAT), KU Leuven, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37296240600
    ID: 37296240600
    Order: 9
    Author Affiliations:
    • Department of Electrical Engineering (ESAT), KU Leuven, Leuven, Belgium
    • imec, Leuven, Belgium
  • Author Name: Jiwon Lee
    Affiliation: imec, Leuven, Belgium
    Author URL: https://ieeexplore.ieee.org/author/37086132265
    ID: 37086132265
    Order: 10
    Author Affiliations:
    • imec, Leuven, Belgium
    • Department of Photonics and Nanoelectronics, Hanyang University, Ansan, South Korea

Image Sensor

• sensor_type: CMOS
• resolution: 41 x 41 pixels
• dynamic_range: Not specified
• pixel_size: 15 µm x 15 µm
• dark_current: In the pA level per pixel under specific conditions (−10 V applied)

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• signal_to_noise_ratio: PLS at −60 dB
• sensitivity: 42.6% EQE at 940 nm

Applications & Benefits

• cell_imaging: Used in fluorescence lifetime imaging microscopy (FLIM) for biomedical applications, such as cellular metabolism studies and tumor detection.
• benefits: Increased photon acquisition efficiency and sensitivity, allowing for reduced damage to specimens during imaging.

Supporting Organizations

• supported_by: imec, KU Leuven, Gpixel, OmniVision Technologies

Manuscript Details

• publication_date: 1 Oct.1, 2022

Relevancy Score

• score: 9
• missing_fields:
  • dynamic_range
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • power_consumption
  • noise
  • shutter_speed

Processed JSON Filename

request_377563c0-10be-4d7a-a7fa-473992be0dc6-design_and_characterization_of_nearinfrared_sensitivityenhanced_threetap_fully_depleted_image_sensor_for_fluorescence_lifetime_imaging.json