Crosstalk Improvement Technology Applicable To 014Spl Mum Cmos Image Sensor

• doi: 10.1109/IEDM.2004.1419356
• title: Crosstalk improvement technology applicable to 0.14/spl mu/m CMOS image sensor
• publisher: IEEE
• isbn: 0-7803-8684-1
• issn:
• partnum: 04CH37602
• rank: 2018
• access_type: LOCKED
• content_type: Conferences
• abstract: For pixel crosstalk improvement, modified logic technology with thin epi wafer thickness, thin backend process thickness and air gap guard ring technology, pixel size can be further scaled down to less than 2.8 /spl mu/m /spl times/ 2.8 /spl mu/m and maintain the same performance as 4.0 /spl mu/m /spl times/ 4.0 /spl mu/m pixel does. Greater than 65% crosstalk reduction at 10/spl deg/ incident angle has been demonstrated. This technology can be applicable to CMOS image sensor with 0.14 /spl mu/m design rules.
• article_number: 1419356
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1419356
• html_url: https://ieeexplore.ieee.org/document/1419356/
• abstract_url: https://ieeexplore.ieee.org/document/1419356/
• publication_title: IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004.
• conference_location: San Francisco, CA, USA
• conference_dates: 13-15 Dec. 2004
• publication_number: 9719
• is_number: 30682
• publication_year: 2004
• publication_date: 13-15 Dec. 2004
• start_page: 997
• end_page: 1000
• citing_paper_count: 2
• citing_patent_count: 28
• download_count: 349
• insert_date: 20050425
• index_terms:
  • ieee_terms:
    • Crosstalk
    • CMOS technology
    • CMOS image sensors
    • Isolation technology
    • CMOS logic circuits
    • Computational Intelligence Society
    • CMOS process
    • Optical filters
    • Optical diffraction
    • Semiconductor device manufacture
  • dynamic_index_terms:
    • Pixel Size
    • Incident Angle
    • Air Gap
    • Thin Processes
    • Thin Air
    • Performance Comparison
    • Comparable Performance
    • Standard Process
    • Epitaxial Layer
    • Epilayer
    • Optical Diffraction
    • Small Pixel Size
• isbn_formats:
  • format: Print ISBN, value: 0-7803-8684-1, isbnType: Historical
• authors:
  • Author Name: Chien-Hsien Tseng
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087190561
    ID: 37087190561
    Order: 1
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Shou-Gwo Wuu
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087189672
    ID: 37087189672
    Order: 2
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Ho-Ching Chien
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087189449
    ID: 37087189449
    Order: 3
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Dun-Nian Yaung
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087170580
    ID: 37087170580
    Order: 4
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Tze-Hsuan Hsu
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088605834
    ID: 37088605834
    Order: 5
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Jeng-Shyan Lin
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087189971
    ID: 37087189971
    Order: 6
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Hung-Jen Hsu
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088605733
    ID: 37088605733
    Order: 7
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Chung-Yi Yu
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087448198
    ID: 37087448198
    Order: 8
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Chin-Hsin Lo
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087447993
    ID: 37087447993
    Order: 9
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: C.S. Wang
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37280017000
    ID: 37280017000
    Order: 10
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan

Image Sensor

• sensor_type: CMOS
• resolution: Not explicitly mentioned
• dynamic_range: Not explicitly mentioned
• pixel_size: 2.8 um x 2.8 um
• dark_current: Not explicitly mentioned

Optical Data

• focal_length: Not explicitly mentioned
• aperture: Not explicitly mentioned
• field_of_view: Not explicitly mentioned
• distortion: Not explicitly mentioned

Performance Metrics

• frame_rate: Not explicitly mentioned
• signal_to_noise_ratio: Not explicitly mentioned
• sensitivity: Not explicitly mentioned
• shutter_speed: Not explicitly mentioned
• power_consumption: Not explicitly mentioned
• noise: Not explicitly mentioned

Applications & Benefits

• cell_imaging: Enabled applications in smartphones, medical devices, and automotive systems.
• benefits: High performance pixel design with reduced crosstalk and improved sensitivity.

Supporting Organizations

• supported_by: Taiwan Semiconductor Manufacturing Company

Manuscript Details

• publication_date: 13-15 Dec. 2004

Relevancy Score

• score: 10
• missing_fields:
  • resolution
  • dynamic_range
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_1050e1c6-7832-44d4-9fc3-702a50f51fab-crosstalk_improvement_technology_applicable_to_014spl_mum_cmos_image_sensor.json