Cmosmems Dynamic Fm Atomic Force Microscope

• doi: 10.1109/Transducers.2013.6626917
• title: CMOS-MEMS dynamic FM atomic force microscope
• publisher: IEEE
• isbn: 978-1-4673-5983-2
• issn: 2159-547X
• rank: 1876
• access_type: LOCKED
• content_type: Conferences
• abstract: We present the first imaging results with a dynamic FM-AFM (frequency modulation atomic force microscope) on a chip. This instrument does not require any off-chip scanning hardware or position sensors. The CMOS-MEMS dynamic FM-AFM includes 3-D electrothermal actuation, 3-axis position sensing, and a flexural resonant cantilever with balanced piezoresistive detection, all integrated on a single chip. Several design principles are applied to reduce the instrument's sensitivity to electrical and thermal coupling effects. To the best of the authors' knowledge, this is the first integrated dynamic FM-AFM that can image a sample independently.
• article_number: 6626917
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6626917
• html_url: https://ieeexplore.ieee.org/document/6626917/
• abstract_url: https://ieeexplore.ieee.org/document/6626917/
• publication_title: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
• conference_location: Barcelona, Spain
• conference_dates: 16-20 June 2013
• publication_number: 6599514
• is_number: 6626676
• publication_year: 2013
• publication_date: 16-20 June 2013
• start_page: 916
• end_page: 919
• citing_paper_count: 16
• citing_patent_count: 2
• download_count: 332
• insert_date: 20131010
• index_terms:
  • ieee_terms:
    • Actuators
    • Force
    • Atomic force microscopy
    • Sensors
    • Dynamics
    • Probes
  • author_terms:
    • CMOS-MEMS
    • Atomic Force Microscope
    • cantilever
    • nanopositioning
    • electrothermal actuator
    • AFM
    • FM-AFM
  • dynamic_index_terms:
    • Thermal Effects
    • Thermal Events
    • Diet-induced Thermogenesis
    • Thermocouple
    • Coupling Effect
    • Sensor Locations
    • Position Sensor
    • Single Chip
    • Piezoresistive
    • Heat Capacity
    • Specific Heat
    • Resonance Frequency
    • Thermal Resistance
    • Microfabrication
    • Micromachining
    • Piezoelectric Materials
    • Cantilever Beam
    • Lumped Elements
    • Lumped Parameter Model
    • Piezoelectric Actuator
    • Bimorph
    • Silicon Crystal
    • Single-crystal Silicon
    • Kelvin Probe Force Microscopy
    • Scanning Kelvin Probe
    • Kelvin Probe Microscopy
• isbn_formats:
  • format: Electronic ISBN, value: 978-1-4673-5983-2, isbnType: New-2005
• authors:
  • Author Name: N. Sarkar
    Affiliation: University of Waterloo, Waterloo, ON, CA
    Author URL: https://ieeexplore.ieee.org/author/37284615400
    ID: 37284615400
    Order: 1
    Author Affiliations:
    • University of Waterloo, Waterloo, ON, CA
  • Author Name: G. Lee
    Affiliation: University of Waterloo, Waterloo, ONT, Canada
    Author URL: https://ieeexplore.ieee.org/author/37076686200
    ID: 37076686200
    Order: 2
    Author Affiliations:
    • University of Waterloo, Waterloo, ONT, Canada
  • Author Name: R. R. Mansour
    Affiliation: University of Waterloo, Waterloo, ON, CA
    Author URL: https://ieeexplore.ieee.org/author/37275744800
    ID: 37275744800
    Order: 3
    Author Affiliations:
    • University of Waterloo, Waterloo, ON, CA

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Not specified
• benefits: Not specified

Supporting Organizations

• supported_by: TowerJAZZ, Canadian Microelectronics Corporation, DARPA, SPAWARSYSCEN-SD, Texas ETF

Manuscript Details

• publication_date: 16-20 June 2013

Relevancy Score

• score: 4
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • cell_imaging
  • benefits

Processed JSON Filename

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