Cmos Photodetectors Integrated With Plasmonic Color Filters

• doi: 10.1109/LPT.2011.2176333
• title: CMOS Photodetectors Integrated With Plasmonic Color Filters
• publisher: IEEE
• isbn:
• issn: 1941-0174
• rank: 1787
• access_type: LOCKED
• content_type: Journals
• abstract: A single-pixel plasmonic complementary metal oxide semiconductor (CMOS) photo sensor consisting of a plasmonic color filter integrated on a CMOS photodiode was fabricated using electron beam lithography and dry etch. The photocurrent measurement results confirmed the three primary color filtering responses that could be achieved in a single layer of nanostructured aluminium film. Finite-difference time-domain simulation demonstrated a good agreement of the reflection spectra with the measured result. This research can lead to the development of advanced CMOS image sensors with low cost and low crosstalk.
• article_number: 6082374
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6082374
• html_url: https://ieeexplore.ieee.org/document/6082374/
• abstract_url: https://ieeexplore.ieee.org/document/6082374/
• publication_title: IEEE Photonics Technology Letters
• conference_location:
• conference_dates:
• publication_number: 68
• is_number: 6126857
• publication_year: 2012
• publication_date: Feb.1, 2012
• start_page: 197
• end_page: 199
• citing_paper_count: 116
• citing_patent_count: 7
• download_count: 2965
• insert_date: 20111116
• index_terms:
  • ieee_terms:
    • Image color analysis
    • Plasmons
    • Optical filters
    • CMOS integrated circuits
    • Photoconductivity
    • Photodiodes
    • Films
  • author_terms:
    • Complementary metal oxide semiconductor image sensors
    • nanophotonics
    • optical filter
    • surface plasmon
  • dynamic_index_terms:
    • Color Filter
    • Plasmonic Color
    • Plasmonic Color Filter
    • Nanomaterials
    • Nanostructures
    • Reflectance Spectra
    • Image Sensor
    • Camera Sensor
    • Electron Beam Lithography
    • E-beam Lithography
    • Finite-difference Time-domain
    • FDTD
    • Finite-difference Time-domain Method
    • Dry Etching
    • Primary Colors
    • Photocurrent Measurements
    • Aluminum Film
    • Aluminum Oxide Films
    • Low Crosstalk
    • Scanning Electron Microscopy
    • Cost Reduction
    • Surface Plasmon Resonance
    • Filtered Based
    • Filter-based
    • Reflection Coefficient
    • Reflection Loss
    • Transmission Spectra
    • Conventional Filter
    • Simulated Spectra
    • Stacked Layers
    • Fabry-Perot Resonance
    • Fabry–Pérot Resonance
• authors:
  • Author Name: Qin Chen
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/37576124300
    ID: 37576124300
    Order: 1
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK
  • Author Name: Danial Chitnis
    Affiliation: Department of Engineering Science, University of Oxford, Oxford, UK
    Author URL: https://ieeexplore.ieee.org/author/37543079100
    ID: 37543079100
    Order: 2
    Author Affiliations:
    • Department of Engineering Science, University of Oxford, Oxford, UK
  • Author Name: Kirsty Walls
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/38229656600
    ID: 38229656600
    Order: 3
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK
  • Author Name: Tim D. Drysdale
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/37426981800
    ID: 37426981800
    Order: 4
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK
  • Author Name: Steve Collins
    Affiliation: Department of Engineering Science, University of Oxford, Oxford, UK
    Author URL: https://ieeexplore.ieee.org/author/37274573100
    ID: 37274573100
    Order: 5
    Author Affiliations:
    • Department of Engineering Science, University of Oxford, Oxford, UK
  • Author Name: David R. S. Cumming
    Affiliation: School of Engineering, University of Glasgow, Glasgow, UK
    Author URL: https://ieeexplore.ieee.org/author/37276149400
    ID: 37276149400
    Order: 6
    Author Affiliations:
    • School of Engineering, University of Glasgow, Glasgow, UK

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: <2 µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: The document implies that CMOS image sensors enable digital imaging for a variety of applications including cell imaging but does not provide detailed information.
• benefits: CMOS image sensors enable low-cost and low-crosstalk imaging through the use of plasmonic color filters.

Supporting Organizations

• supported_by: Engineering and Physical Sciences Research Council, U.K.

Manuscript Details

• publication_date: Feb.1, 2012

Relevancy Score

• score: 8
• missing_fields:
  • fill factor
  • quantum efficiency
  • readout speed
  • noise sources
  • analog-to-digital conversion techniques
  • microlenses
  • global or rolling shutters
  • backside illumination

Processed JSON Filename

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