Cmos Monolithic Atomic Force Microscope

• doi: 10.1109/VLSIC.2004.1346597
• title: CMOS monolithic atomic force microscope
• publisher: IEEE
• isbn: 0-7803-8287-0
• issn:
• partnum: 04CH37525
• rank: 1860
• access_type: LOCKED
• content_type: Conferences
• abstract: A single-chip atomic force microscope fabricated in industrial CMOS-technology with post-CMOs micromachining is presented, which comprises an array of twelve cantilevers with integrated deflection sensors and actuators, digital proportional-integral-derivative (PID) deflection controllers, amplification stages, offset compensation circuitry, digital filters for sensor-actuator coupling compensation, A/D and D/A converters, dedicated serial lines (one per cantilever) for fast data transfer, and an I/sup 2/C serial interface for chip programming. Parallel scanning imaging evidenced a height resolution better than 10nm.
• article_number: 1346597
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1346597
• html_url: https://ieeexplore.ieee.org/document/1346597/
• abstract_url: https://ieeexplore.ieee.org/document/1346597/
• publication_title: 2004 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.04CH37525)
• conference_location: Honolulu, HI, USA
• conference_dates: 17-19 June 2004
• publication_number: 9331
• is_number: 29642
• publication_year: 2004
• publication_date: 17-19 June 2004
• start_page: 306
• end_page: 309
• citing_paper_count: 9
• citing_patent_count: 0
• download_count: 118
• insert_date: 20041025
• index_terms:
  • ieee_terms:
    • Atomic force microscopy
    • Sensor arrays
    • Force sensors
    • Industrial control
    • Textile industry
    • Micromachining
    • Actuators
    • Three-term control
    • Force control
    • Pi control
  • dynamic_index_terms:
    • Atomic Force Microscopy
    • Digital Filter
    • Amplification Stage
    • Voltage Drop
    • Potential Drop
    • IR Drop
    • Analog-to-digital Converter
    • Analog-to-digital
    • Digital-to-analog Converter
    • Printed Circuit Board
    • Metal Layer
    • Feedback Signal
    • Reactive Ion Etching
    • Digital Control
    • Scanning Tunneling Microscopy
    • Silicon Surface
    • Operational Amplifier
    • Op-amp
    • Piezoelectric Actuator
    • Bimorph
    • Aluminum Layer
    • Aluminum Oxide Layer
    • Cantilever Tip
    • Offset Voltage
    • Scanning Stage
    • Cantilever Deflection
    • Wheatstone Bridge
    • Piezoresistive Sensors
    • Diamond Tip
• isbn_formats:
  • format: Print ISBN, value: 0-7803-8287-0, isbnType: Historical
• authors:
  • Author Name: D. Barrettino
    Affiliation: Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37274213600
    ID: 37274213600
    Order: 1
    Author Affiliations:
    • Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
  • Author Name: S. Hafizovic
    Affiliation: Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37282802100
    ID: 37282802100
    Order: 2
    Author Affiliations:
    • Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
  • Author Name: T. Volden
    Affiliation: Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37282802500
    ID: 37282802500
    Order: 3
    Author Affiliations:
    • Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
  • Author Name: J. Sedivy
    Affiliation: Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37282769500
    ID: 37282769500
    Order: 4
    Author Affiliations:
    • Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
  • Author Name: K. Kirstein
    Affiliation: Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37274223900
    ID: 37274223900
    Order: 5
    Author Affiliations:
    • Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
  • Author Name: A. Hierlemann
    Affiliation: Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37275570600
    ID: 37275570600
    Order: 6
    Author Affiliations:
    • Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
  • Author Name: H. Baltes
    Affiliation: Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland
    Author URL: https://ieeexplore.ieee.org/author/37274215600
    ID: 37274215600
    Order: 7
    Author Affiliations:
    • Physical Electronics Laboratory, ETH HoEngineeringerberg, HPT H3, Swiss Federal Institute of Technology, Zurich, Switzerland

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Used to study cellular processes in real time at the molecular level.
• benefits: Increased scanning speed and capability for quantitative studies of cell elasticity and molecular interactions.

Supporting Organizations

• supported_by: Swiss Federal Institute of Technology Zurich, austriamicrosystems

Manuscript Details

• publication_date: 17-19 June 2004

Relevancy Score

• score: 5
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_ef494899-870e-4454-8172-5ab8e11d7fea-cmos_monolithic_atomic_force_microscope.json