Cmos Compatible Thermopile Infrared Sensor With 64X64 Array

• doi: 10.1109/ECICE50847.2020.9301922
• title: CMOS Compatible Thermopile Infrared Sensor with 64X64 Array
• publisher: IEEE
• isbn: 978-1-7281-8061-8
• issn:
• rank: 1759
• access_type: LOCKED
• content_type: Conferences
• abstract: A CMOS compatible thermopile infrared sensor is fabricated with large sensing array (64X64) and small pixel size (70μm pitch). The design and simulation of the sensor confirms a wide temperature sensing range (up to 1200°C), which is appropriate for temperature detection in industrial manufacturing and human body. To improve the sensing performance, an innovative pixel structure is developed for increasing the infrared absorption, decreasing the thermal time constant, and improving the thermal isolation. The sensor is fixed for dead pixels and corrected by the NUC (non-uniformity correction) process to improve the thermal image quality. The procedure for temperature calibration between blackbody target and sensor output voltage is also described. The test results show that this newly developed thermopile infrared sensor has temperature measuring error smaller than 3%.
• article_number: 9301922
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9301922
• html_url: https://ieeexplore.ieee.org/document/9301922/
• abstract_url: https://ieeexplore.ieee.org/document/9301922/
• publication_title: 2020 IEEE Eurasia Conference on IOT, Communication and Engineering (ECICE)
• conference_location: Yunlin, Taiwan
• conference_dates: 23-25 Oct. 2020
• publication_number: 9301908
• is_number: 9301909
• publication_year: 2020
• publication_date: 23-25 Oct. 2020
• start_page: 102
• end_page: 105
• citing_paper_count: 0
• citing_patent_count: 0
• download_count: 515
• insert_date: 20201229
• index_terms:
  • ieee_terms:
    • Temperature sensors
    • Absorption
    • Temperature measurement
    • Temperature distribution
    • Optical coupling
    • Infrared heating
    • Sensitivity
  • author_terms:
    • thermopile
    • infrared sensor
    • sensor array
  • dynamic_index_terms:
    • Infrared Imaging
    • Infrared Camera
    • Thermal Imaging
    • Thermal Camera
    • Thermopile
    • Temperature Measurements
    • Thermometry
    • Blackbody
    • Blackbody Radiation
    • Temperature Sensing
    • Temperature Perception
    • Thermal Perception
    • Small Pixel Size
    • Heat Transfer
    • Heat Flow
    • Heat Loss
    • Thermal Conductivity
    • Heat Conduction
    • Heat Capacity
    • Specific Heat
    • Environmental Temperature
    • Absorption Rate
    • Concentration Rate
    • Thermal Resistance
    • Circuit Board
    • Target Temperature
    • Absorber Layer
    • Optical Structure
    • Spiral Structure
    • Sensor Module
    • Value Of The Output Voltage
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-7281-8061-8, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-7281-8060-1, isbnType: New-2005
• authors:
  • Author Name: Kuen-Chuan Lin
    Affiliation: Industrial Technology Research Institute, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088599304
    ID: 37088599304
    Order: 1
    Author Affiliations:
    • Industrial Technology Research Institute, Tainan, Taiwan
  • Author Name: Chin-Jou Kuo
    Affiliation: Industrial Technology Research Institute, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088599992
    ID: 37088599992
    Order: 2
    Author Affiliations:
    • Industrial Technology Research Institute, Tainan, Taiwan
  • Author Name: Ming-Fa Chen
    Affiliation: Industrial Technology Research Institute, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088598668
    ID: 37088598668
    Order: 3
    Author Affiliations:
    • Industrial Technology Research Institute, Tainan, Taiwan
  • Author Name: Lungtai Chen
    Affiliation: Industrial Technology Research Institute, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37634752700
    ID: 37634752700
    Order: 4
    Author Affiliations:
    • Industrial Technology Research Institute, Tainan, Taiwan
  • Author Name: Borshiun Lee
    Affiliation: Industrial Technology Research Institute, Tainan, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37088598447
    ID: 37088598447
    Order: 5
    Author Affiliations:
    • Industrial Technology Research Institute, Tainan, Taiwan

Image Sensor

• sensor_type: CMOS
• resolution: 64x64
• dynamic_range: not specified
• pixel_size: 70μm pitch
• dark_current: not specified

Optical Data

• focal_length: not specified
• aperture: not specified
• field_of_view: not specified
• distortion: not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Temperature detection in industrial manufacturing and human body.
• benefits: Enables contactless temperature measurement with a wide sensing range.

Supporting Organizations

• supported_by: Industrial Technology Research Institute

Manuscript Details

• publication_date: 23-25 Oct. 2020

Relevancy Score

• score: 5
• missing_fields:
  • dynamic_range
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_abd705cc-4f7f-4e48-8967-d26fb52b1718-cmos_compatible_thermopile_infrared_sensor_with_64x64_array.json