Advancements In Indirect Time Of Flight Image Sensors In Front Side Illuminated Cmos

• doi: 10.1109/ESSCIRC53450.2021.9567750
• title: Advancements in indirect Time of Flight image sensors in front side illuminated CMOS
• publisher: IEEE
• isbn: 978-1-6654-3752-3
• issn:
• rank: 1417
• access_type: LOCKED
• content_type: Conferences
• abstract: We will present major advances in Time of Flight (ToF) image sensors for consumer applications. Several innovative elements integrated into a 130nm front side illumination CMOS node reveal superior sensor performance so far only attributed to much more complex backside illumination technologies. The gate controlled pixels comprising deep trenches, buried mirrors and integrated prisms, reveal high quantum efficiency and modulation transfer function (MTF) close to the physical pixel size. In-pixel common mode suppression prevents saturation even under backlight conditions. The comprehensive System on Chip integrates high speed ADCs, a flexible phase shifter, as well as current monitoring for laser safety.
• article_number: 9567750
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9567750
• html_url: https://ieeexplore.ieee.org/document/9567750/
• abstract_url: https://ieeexplore.ieee.org/document/9567750/
• publication_title: ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)
• conference_location: Grenoble, France
• conference_dates: 13-22 Sept. 2021
• publication_number: 9567713
• is_number: 9567736
• publication_year: 2021
• publication_date: 13-22 Sept. 2021
• start_page: 139
• end_page: 142
• citing_paper_count: 3
• citing_patent_count: 0
• download_count: 293
• insert_date: 20211026
• index_terms:
  • ieee_terms:
    • Image sensors
    • Phase shifters
    • Lighting
    • Transfer functions
    • Modulation
    • System-on-chip
    • Solid state circuits
  • author_terms:
    • iToF
    • Pixel
    • Buried Mirror
  • dynamic_index_terms:
    • Time-of-flight
    • Time Of Flight
    • Image Sensor
    • Camera Sensor
    • Front-side Illumination
    • Frontside-illuminated
    • Quantum Efficiency
    • Modulation Transfer Function
    • Optical Transfer Function
    • System-on-chip
    • System On Chip
    • Deep Trench
    • Data Rate
    • Data Evaluation
    • Duty Cycle
    • CMOS Technology
    • Current Monitoring
    • Gate Oxide
    • Gate-oxide
    • Pixel Pitch
    • Background Illumination
    • Readout Circuit
    • Time-to-digital Converter
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-6654-3752-3, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-6654-3751-6, isbnType: New-2005
• authors:
  • Author Name: Markus Dielacher
    Affiliation: Infineon Technologies, Graz, Austria
    Author URL: https://ieeexplore.ieee.org/author/37643231600
    ID: 37643231600
    Order: 1
    Author Affiliations:
    • Infineon Technologies, Graz, Austria
  • Author Name: Martin Flatscher
    Affiliation: Infineon Technologies, Graz, Austria
    Author URL: https://ieeexplore.ieee.org/author/37643231500
    ID: 37643231500
    Order: 2
    Author Affiliations:
    • Infineon Technologies, Graz, Austria
  • Author Name: Reinhard Gabl
    Affiliation: Infineon Technologies, Graz, Austria
    Author URL: https://ieeexplore.ieee.org/author/37294446700
    ID: 37294446700
    Order: 3
    Author Affiliations:
    • Infineon Technologies, Graz, Austria
  • Author Name: Richard Gaggl
    Affiliation: Infineon Technologies, Villach, Austria
    Author URL: https://ieeexplore.ieee.org/author/37275697900
    ID: 37275697900
    Order: 4
    Author Affiliations:
    • Infineon Technologies, Villach, Austria
  • Author Name: Dirk Offenberg
    Affiliation: Infineon Technologies, Dresden, Germany
    Author URL: https://ieeexplore.ieee.org/author/37089003805
    ID: 37089003805
    Order: 5
    Author Affiliations:
    • Infineon Technologies, Dresden, Germany
  • Author Name: Jens Prima
    Affiliation: pmdtechnologies ag, Siegen, Germany
    Author URL: https://ieeexplore.ieee.org/author/37088625396
    ID: 37088625396
    Order: 6
    Author Affiliations:
    • pmdtechnologies ag, Siegen, Germany

Image Sensor

• sensor_type: CMOS
• resolution: 307k (5µm) and 153k (7µm)
• dynamic_range: Not specified
• pixel_size: 5µm, 7µm
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Not specified
• benefits: Time-of-flight imaging for applications in smartphones, augmented reality, and face recognition.

Supporting Organizations

• supported_by: European Union, European Regional Development Funds, Free State of Saxony

Manuscript Details

• publication_date: 13-22 Sept. 2021

Relevancy Score

• score: 10
• missing_fields:
  • dynamic_range
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_2fcc5fa1-7b15-4caf-9145-478f0cdec976-advancements_in_indirect_time_of_flight_image_sensors_in_front_side_illuminated_cmos.json