Advanced 11Um Pixel Cmos Image Sensor With 3D Stacked Architecture

• doi: 10.1109/VLSIT.2014.6894429
• title: Advanced 1.1um pixel CMOS image sensor with 3D stacked architecture
• publisher: IEEE
• isbn: 978-1-4799-3330-3
• issn: 0743-1562
• rank: 1407
• access_type: LOCKED
• content_type: Conferences
• abstract: This paper demonstrates an advanced 1.1um pixel backside illuminated CMOS image sensor with a 3D stacked architecture. The carrier wafer in conventional BSI is replaced by ASIC wafer, which contains a part of periphery circuit and is connected to the sensor wafer through bonding technology. With proper layout design and process improvement, the impact of 3D connection (Through Via, TV) on the sensor performance can be significantly minimized. In addition, for the first time, the degradation of stacked pixel performance during the folded circuit operation under sensor array is found and improved. The final stacked sensor exhibits the comparable pixel performances to conventional BSI. Furthermore, stacked architecture provides the opportunity to enhance sensor performance by the separate process tuning for sensor wafers (without any effect on ASIC wafers), leading to a further improvement of dark performance.
• article_number: 6894429
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6894429
• html_url: https://ieeexplore.ieee.org/document/6894429/
• abstract_url: https://ieeexplore.ieee.org/document/6894429/
• publication_title: 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers
• conference_location: Honolulu, HI, USA
• conference_dates: 9-12 June 2014
• publication_number: 6886509
• is_number: 6894335
• publication_year: 2014
• publication_date: 9-12 June 2014
• start_page: 1
• end_page: 2
• citing_paper_count: 9
• citing_patent_count: 0
• download_count: 1449
• insert_date: 20140911
• index_terms:
  • ieee_terms:
    • Application specific integrated circuits
    • Arrays
    • TV
    • CMOS image sensors
    • Three-dimensional displays
    • Stress
    • Bonding
  • author_terms:
    • stacked
    • CMOS image sensor
    • pixel
  • dynamic_index_terms:
    • Image Sensor
    • Camera Sensor
    • 3D Architecture
    • Um Pixel
    • Sensory Function
    • Sensor Performance
    • Process Improvement
    • Proper Design
    • Proper Names
    • Further Improvement Of Performance
    • Pixel Array
• isbn_formats:
  • format: CD, value: 978-1-4799-3330-3, isbnType: New-2005
  • format: Print ISBN, value: 978-1-4799-3331-0, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-4799-3332-7, isbnType: New-2005
• authors:
  • Author Name: J.C. Liu
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37065659200
    ID: 37065659200
    Order: 1
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: D.N. Yaung
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37283323200
    ID: 37283323200
    Order: 2
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: J.J. Sze
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37085442489
    ID: 37085442489
    Order: 3
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: C.C. Wang
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37440784200
    ID: 37440784200
    Order: 4
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: Gene. Hung
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37089145784
    ID: 37089145784
    Order: 5
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: C.J. Wang
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37089081342
    ID: 37089081342
    Order: 6
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: T.H. Hsu
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37275375200
    ID: 37275375200
    Order: 7
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: R.J. Lin
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37851599700
    ID: 37851599700
    Order: 8
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: T.J. Wang
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37089094423
    ID: 37089094423
    Order: 9
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: W.D. Wang
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37086282243
    ID: 37086282243
    Order: 10
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: H.Y. Cheng
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/38581137800
    ID: 38581137800
    Order: 11
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: J.S. Lin
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/38183952200
    ID: 38183952200
    Order: 12
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: S.J. Tsai
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37085427764
    ID: 37085427764
    Order: 13
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: S.T. Tsai
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/38466244000
    ID: 38466244000
    Order: 14
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: C.C. Chuang
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/38235840900
    ID: 38235840900
    Order: 15
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: W.I. Hsu
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37088709025
    ID: 37088709025
    Order: 16
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: S.Y. Chen
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37065817100
    ID: 37065817100
    Order: 17
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: K.C. Huang
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37085435994
    ID: 37085435994
    Order: 18
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: W.H. Wu
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37280429200
    ID: 37280429200
    Order: 19
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: S. Takahashi
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37858660600
    ID: 37858660600
    Order: 20
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: Y.L. Tu
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37852536900
    ID: 37852536900
    Order: 21
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: C.S. Tsai
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37733670700
    ID: 37733670700
    Order: 22
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: R.L. Lee
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37982740400
    ID: 37982740400
    Order: 23
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: W.P. Mo
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/38241311500
    ID: 38241311500
    Order: 24
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: F.J. Shiu
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37085445380
    ID: 37085445380
    Order: 25
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: Y.P. Chao
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37068737600
    ID: 37068737600
    Order: 26
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
  • Author Name: S.G. Wuu
    Affiliation: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.
    Author URL: https://ieeexplore.ieee.org/author/37283321600
    ID: 37283321600
    Order: 27
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.

Image Sensor

• sensor_type: CMOS
• resolution: 3 Mega Pixel
• dynamic_range: Not Specified
• pixel_size: 1.1 µm
• dark_current: Not Specified

Optical Data

• focal_length: Not Specified
• aperture: Not Specified
• field_of_view: Not Specified
• distortion: Not Specified

Performance Metrics

• frame_rate: Not Specified
• signal_to_noise_ratio: Not Specified
• sensitivity: Not Specified
• shutter_speed: Not Specified
• power_consumption: Not Specified
• noise: Not Specified

Applications & Benefits

• cell_imaging: The advanced 1.1um stacked BSI sensor has been demonstrated in CMOS image sensors.
• benefits: Improvement in dark performance, comparable imaging performance to conventional BSI.

Supporting Organizations

• supported_by: Taiwan Semiconductor Manufacturing Company

Manuscript Details

• publication_date: 9-12 June 2014

Relevancy Score

• score: 8
• missing_fields:
  • dynamic_range
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_391f2dba-6b4b-4dda-a43a-d3e1a8a57027-advanced_11um_pixel_cmos_image_sensor_with_3d_stacked_architecture.json