A Timeresolved Lownoise Singlephoton Image Sensor Fabricated In Deepsubmicron Cmos Technology

• doi: 10.1109/JSSC.2012.2188466
• title: A Time-Resolved, Low-Noise Single-Photon Image Sensor Fabricated in Deep-Submicron CMOS Technology
• publisher: IEEE
• isbn:
• issn: 1558-173X
• rank: 968
• access_type: LOCKED
• content_type: Journals
• abstract: We report on the design and characterization of a novel time-resolved image sensor fabricated in a 130 nm CMOS process. Each pixel within the 3232 pixel array contains a low-noise single-photon detector and a high-precision time-to-digital converter (TDC). The 10-bit TDC exhibits a timing resolution of 119 ps with a timing uniformity across the entire array of less than 2 LSBs. The differential non-linearity (DNL) and integral non-linearity (INL) were measured at ±0.4 and ±1.2 LSBs, respectively. The pixel array was fabricated with a pitch of 50 μm in both directions and with a total TDC area of less than 2000 μm2. The target application for this sensor is time-resolved imaging, in particular fluorescence lifetime imaging microscopy and 3D imaging. The characterization shows the suitability of the proposed sensor technology for these applications.
• article_number: 6176268
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6176268
• html_url: https://ieeexplore.ieee.org/document/6176268/
• abstract_url: https://ieeexplore.ieee.org/document/6176268/
• publication_title: IEEE Journal of Solid-State Circuits
• conference_location:
• conference_dates:
• publication_number: 4
• is_number: 6203507
• publication_year: 2012
• publication_date: June 2012
• start_page: 1394
• end_page: 1407
• citing_paper_count: 143
• citing_patent_count: 0
• download_count: 4041
• insert_date: 20120403
• index_terms:
  • ieee_terms:
    • Clocks
    • Delay
    • Arrays
    • Delay lines
    • Photonics
    • Imaging
    • Synchronization
  • author_terms:
    • Single-photon imaging
    • single-photon avalanche diode
    • SPAD
    • time-to-digital converter
    • TDC
    • time-resolved imaging
    • time-of-flight
    • fluorescence lifetime imaging microscopy
    • FLIM
    • fluorescence correlation spectroscopy
    • FCS
  • dynamic_index_terms:
    • 3D Images
    • Time Resolution
    • Fluorescence Lifetime
    • Fluorescence Lifetime Imaging Microscopy
    • FLIM
    • Fluorescence Lifetime Imaging
    • CMOS Process
    • Pixel Array
    • Entire Array
    • Time-resolved Imaging
    • Time-to-digital Converter
    • Temporal Variation
    • Power Consumption
    • Inverter
    • Electrical Pulses
    • Supply Voltage
    • Time-correlated Single-photon Counting
    • TCSPC
    • Delay Line
    • Photon Detection
    • Stop Signal
    • Clock Frequency
    • Clock Signal
    • Single-photon Avalanche Diode
    • Timing Jitter
    • Dark Count Rate
    • Start Signal
    • Silicon Photomultiplier
    • SiPM
    • Clock Period
    • Delay Unit
    • Metal Lines
    • Transistor Size
    • Transistor Count
    • Second Harmonic Generation
• authors:
  • Author Name: Marek Gersbach
    Affiliation: Technical University Delft, Delft, Netherlands
    Author URL: https://ieeexplore.ieee.org/author/37681085400
    ID: 37681085400
    Order: 1
    Author Affiliations:
    • Technical University Delft, Delft, Netherlands
    • Ecole Polytechnique Fédérale de Lausanne, Lausanne, Switzerland
  • Author Name: Yuki Maruyama
    Affiliation: Technical University Delft, Delft, Netherlands
    Author URL: https://ieeexplore.ieee.org/author/37672443200
    ID: 37672443200
    Order: 2
    Author Affiliations:
    • Technical University Delft, Delft, Netherlands
  • Author Name: Rahmadi Trimananda
    Affiliation: Technical University Delft, Delft, Netherlands
    Author URL: https://ieeexplore.ieee.org/author/37706985800
    ID: 37706985800
    Order: 3
    Author Affiliations:
    • Technical University Delft, Delft, Netherlands
  • Author Name: Matt W. Fishburn
    Affiliation: Technische Universiteit Delft, Delft, Zuid-Holland, NL
    Author URL: https://ieeexplore.ieee.org/author/37395290000
    ID: 37395290000
    Order: 4
    Author Affiliations:
    • Technische Universiteit Delft, Delft, Zuid-Holland, NL
  • Author Name: David Stoppa
    Affiliation: Fondazione Bruno Kessler (FBK), Trento, Italy
    Author URL: https://ieeexplore.ieee.org/author/37268553400
    ID: 37268553400
    Order: 5
    Author Affiliations:
    • Fondazione Bruno Kessler (FBK), Trento, Italy
  • Author Name: Justin A. Richardson
    Affiliation: University of Edinburgh, Edinburgh, UK
    Author URL: https://ieeexplore.ieee.org/author/37576718300
    ID: 37576718300
    Order: 6
    Author Affiliations:
    • University of Edinburgh, Edinburgh, UK
  • Author Name: Richard Walker
    Affiliation: The University of Edinburgh, Edinburgh, Edinburgh, GB
    Author URL: https://ieeexplore.ieee.org/author/37577235100
    ID: 37577235100
    Order: 7
    Author Affiliations:
    • The University of Edinburgh, Edinburgh, Edinburgh, GB
  • Author Name: Robert Henderson
    Affiliation: The University of Edinburgh, Edinburgh, Edinburgh, GB
    Author URL: https://ieeexplore.ieee.org/author/37294086900
    ID: 37294086900
    Order: 8
    Author Affiliations:
    • The University of Edinburgh, Edinburgh, Edinburgh, GB
  • Author Name: Edoardo Charbon
    Affiliation: Technical University Delft, Delft, Netherlands
    Author URL: https://ieeexplore.ieee.org/author/37271353200
    ID: 37271353200
    Order: 9
    Author Affiliations:
    • Technical University Delft, Delft, Netherlands
    • Ecole Polytechnique Fédérale de Lausanne, Lausanne, Switzerland

Image Sensor

• sensor_type: CMOS
• resolution: 32x32 pixels
• dynamic_range: Not specified
• pixel_size: 50x50 µm
• dark_current: 100 Hz at 1 V excess bias voltage (4 Hz/µm^2)

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• frame_rate: 1 M fps in time-correlated mode
• power_consumption: 78 mA at maximum activity
• noise: Timing jitter of approximately 100 ps

Applications & Benefits

• cell_imaging: The sensor is suitable for fluorescence lifetime imaging microscopy (FLIM)
• benefits: Enables real-time imaging and precise time-of-arrival measurement of photons in biological applications

Supporting Organizations

• supported_by: European Community within the Sixth Framework Programme IST FET Open

Manuscript Details

• publication_date: June 2012

Relevancy Score

• score: 9
• missing_fields:
  • dynamic_range
  • quantum_efficiency
  • fill_factor
  • noise_sources
  • microlenses
  • colour_filters
  • shutter_type

Processed JSON Filename

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