A Polarization Analyzing Cmos Image Sensor With Metal Wire Grid In 65Nm
Standard Cmos Technology
- doi: 10.1109/IMFEDK.2012.6218616
-
title: A polarization analyzing CMOS image sensor with
metal wire grid in 65-nm standard CMOS technology
- publisher: IEEE
- isbn: 978-1-4673-0837-3
- issn:
- partnum: 12EX6109
- rank: 1245
- access_type: LOCKED
- content_type: Conferences
-
abstract: In this paper, we demonstrate a CMOS image
sensor with high extinction ratio on-chip polarizers with 65-nm standard
CMOS technology. The polarizer is based on a metal wire grid fabricated
with the metal wiring layers. The extinction ratio of 11.0 dB is
achieved by a pixel with on-chip polarizer where the line / space widths
are 90 nm / 90 nm.
- article_number: 6218616
-
pdf_url:
https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6218616
-
html_url:
https://ieeexplore.ieee.org/document/6218616/
-
abstract_url:
https://ieeexplore.ieee.org/document/6218616/
-
publication_title: 2012 IEEE International Meeting for
Future of Electron Devices, Kansai
- conference_location: Suita, Japan
- conference_dates: 9-11 May 2012
- publication_number: 6212670
- is_number: 6218554
- publication_year: 2012
- publication_date: 9-11 May 2012
- start_page: 1
- end_page: 2
- citing_paper_count: 1
- citing_patent_count: 0
- download_count: 294
- insert_date: 20120618
-
index_terms:
-
ieee_terms:
- Extinction ratio
- CMOS image sensors
- Metals
- CMOS integrated circuits
- Wires
- System-on-a-chip
-
author_terms:
- CMOS image sensor
- Polarization
- On-chip Polarizer
-
dynamic_index_terms:
- Image Sensor
- Camera Sensor
- Standard Technology
- Metal Wire
- 65-nm CMOS
- 65-nm CMOS Technology
- Metal Wire Grid
- Polarizability
- Extinction Ratio
- Linearly Polarized
- Propagation Direction
- Halogen Lamp
- Halogen Light
- Single Pixel
-
isbn_formats:
-
format: Print ISBN,
value: 978-1-4673-0837-3,
isbnType: New-2005
-
format: Electronic ISBN,
value: 978-1-4673-0836-6,
isbnType: New-2005
-
authors:
-
Author Name: Norimitsu Wakama
Affiliation: Graduate School of Materials Science,
Nara Institute of Science and Technology, Ikoma, Nara, Japan
Author URL:
https://ieeexplore.ieee.org/author/38246647000
ID: 38246647000
Order: 1
Author Affiliations:
-
Graduate School of Materials Science, Nara Institute of Science
and Technology, Ikoma, Nara, Japan
-
Author Name: Hitoshi Matsuoka
Affiliation: Graduate School of Materials Science,
Nara Institute of Science and Technology, Ikoma, Nara, Japan
Author URL:
https://ieeexplore.ieee.org/author/38246970300
ID: 38246970300
Order: 2
Author Affiliations:
-
Graduate School of Materials Science, Nara Institute of Science
and Technology, Ikoma, Nara, Japan
-
Author Name: Keisuke Ando
Affiliation: Graduate School of Materials Science,
Nara Institute of Science and Technology, Ikoma, Nara, Japan
Author URL:
https://ieeexplore.ieee.org/author/38246173100
ID: 38246173100
Order: 3
Author Affiliations:
-
Graduate School of Materials Science, Nara Institute of Science
and Technology, Ikoma, Nara, Japan
-
Author Name: Toshihiko Noda
Affiliation: Core Research for Evolutional Science
and Technology CREST, Japan Science and Technology Agency,
Kawaguchi, Saitama, Japan
Author URL:
https://ieeexplore.ieee.org/author/37401924800
ID: 37401924800
Order: 4
Author Affiliations:
-
Core Research for Evolutional Science and Technology CREST,
Japan Science and Technology Agency, Kawaguchi, Saitama, Japan
-
Graduate School of Materials Science, Nara Institute of Science
and Technology, Ikoma, Nara, Japan
-
Author Name: Kiyotaka Sasagawa
Affiliation: Core Research for Evolutional Science
and Technology CREST, Japan Science and Technology Agency,
Kawaguchi, Saitama, Japan
Author URL:
https://ieeexplore.ieee.org/author/37287324600
ID: 37287324600
Order: 5
Author Affiliations:
-
Core Research for Evolutional Science and Technology CREST,
Japan Science and Technology Agency, Kawaguchi, Saitama, Japan
-
Graduate School of Materials Science, Nara Institute of Science
and Technology, Ikoma, Nara, Japan
-
Author Name: Takashi Tokuda
Affiliation: Core Research for Evolutional Science
and Technology CREST, Japan Science and Technology Agency,
Kawaguchi, Saitama, Japan
Author URL:
https://ieeexplore.ieee.org/author/37278027500
ID: 37278027500
Order: 6
Author Affiliations:
-
Core Research for Evolutional Science and Technology CREST,
Japan Science and Technology Agency, Kawaguchi, Saitama, Japan
-
Graduate School of Materials Science, Nara Institute of Science
and Technology, Ikoma, Nara, Japan
-
Author Name: Jun Ohta
Affiliation: Core Research for Evolutional Science
and Technology CREST, Japan Science and Technology Agency,
Kawaguchi, Saitama, Japan
Author URL:
https://ieeexplore.ieee.org/author/37278016600
ID: 37278016600
Order: 7
Author Affiliations:
-
Core Research for Evolutional Science and Technology CREST,
Japan Science and Technology Agency, Kawaguchi, Saitama, Japan
-
Graduate School of Materials Science, Nara Institute of Science
and Technology, Ikoma, Nara, Japan
Image Sensor
- sensor_type: CMOS
- resolution: 100 × 80 pixels
- dynamic_range: Not specified
- pixel_size: 10 μm × 10 μm
- dark_current: Not specified
Optical Data
- focal_length: Not specified
- aperture: Not specified
- field_of_view: Not specified
- distortion: Not specified
Performance Metrics
Applications & Benefits
-
cell_imaging: Can be embedded into a micro-flow cell
system for asymmetric chemical reaction process monitoring
-
benefits: Real-time noninvasive monitoring of optical
activity of chiral substance
Supporting Organizations
-
supported_by: Japan Science and Technology Agency, Core
Research for Evolutional Science and Technology (JST-CREST), VLSI Design
and Education Center (VDEC), University of Tokyo, Cadence Design
Systems, Inc.
Manuscript Details
- publication_date: 9-11 May 2012
Relevancy Score
- score: 8
-
missing_fields:
- dynamic_range
- dark_current
- focal_length
- aperture
- field_of_view
- distortion
- frame_rate
- signal_to_noise_ratio
- sensitivity
- shutter_speed
- power_consumption
- noise
Processed JSON Filename
request_061ed954-bfff-4619-bec7-90b508ef8775-a_polarization_analyzing_cmos_image_sensor_with_metal_wire_grid_in_65nm_standard_cmos_technology.json