A Multimode Singlechip Scanning Probe Microscope For Simultaneous Topographical And Thermal Metrology At The Nanometer Scale

• doi: 10.1109/MEMSYS.2016.7421556
• title: A multimode single-chip scanning probe microscope for simultaneous topographical and thermal metrology at the nanometer scale
• publisher: IEEE
• isbn: 978-1-5090-1972-4
• issn:
• rank: 1180
• access_type: LOCKED
• content_type: Conferences
• abstract: This paper reports the first single-chip scanning probe microscope (sc-SPM) that is capable of simultaneously performing atomic force microscopy (AFM) and scanning thermal microscopy (SThM) without requiring any off-chip scanning or sensing components. A thermal-piezoresistive resonant sensor is used to hold the tip-sample interaction force constant, while a bolometer-style probe measures local heat transfer effects. The reported instrument obtains local thermal measurements of powered electrothermal MEMS devices and also achieves the first patterning results with a single-chip scanning probe instrument. Importantly, subsurface features on a 22nm CMOS chip are revealed by thermal phase imaging with the present device.
• article_number: 7421556
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7421556
• html_url: https://ieeexplore.ieee.org/document/7421556/
• abstract_url: https://ieeexplore.ieee.org/document/7421556/
• publication_title: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
• conference_location: Shanghai, China
• conference_dates: 24-28 Jan. 2016
• publication_number: 7411154
• is_number: 7421533
• publication_year: 2016
• publication_date: 24-28 Jan. 2016
• start_page: 55
• end_page: 58
• citing_paper_count: 3
• citing_patent_count: 0
• download_count: 255
• insert_date: 20160229
• index_terms:
  • ieee_terms:
    • Heating
    • Force
    • Temperature measurement
    • Temperature sensors
    • Instruments
    • Actuators
    • Micromechanical devices
  • dynamic_index_terms:
    • Nanometer Scale
    • Scanning Probe Microscopy
    • Heat Transfer
    • Heat Flow
    • Heat Loss
    • Atomic Force Microscopy
    • Phase Contrast
    • Phase Images
    • Subsurface Features
    • Subsurface Characteristics
    • Thermal Conductivity
    • Heat Conduction
    • Temperature Gradient
    • Thermal Gradient
    • Heat Capacity
    • Specific Heat
    • Fundamental Frequency
    • Natural Frequency
    • Temperature Distribution
    • Polylactic Acid
    • Polylactide
    • Range Of Materials
    • Cylindrical Coordinates
    • Mass Calibration
    • Weight Calibration
    • Proof Mass
    • Seismic Mass
    • Acrylonitrile Butadiene Styrene
    • Lumped Elements
    • Lumped Parameter Model
    • Piezoresistive
    • polySia
    • Polycrystalline Silicon
    • Polysilicon
• isbn_formats:
  • format: USB ISBN, value: 978-1-5090-1972-4, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5090-1973-1, isbnType: New-2005
• authors:
  • Author Name: Neil Sarkar
    Affiliation: ICSPI Corp, Waterloo, Canada
    Author URL: https://ieeexplore.ieee.org/author/37284615400
    ID: 37284615400
    Order: 1
    Author Affiliations:
    • ICSPI Corp, Waterloo, Canada
    • University of Waterloo, Waterloo, Canada
  • Author Name: Geoffrey Lee
    Affiliation: ICSPI Corp, Waterloo, Canada
    Author URL: https://ieeexplore.ieee.org/author/37076686200
    ID: 37076686200
    Order: 2
    Author Affiliations:
    • ICSPI Corp, Waterloo, Canada
    • University of Waterloo, Waterloo, Canada
  • Author Name: Duncan Strathearn
    Affiliation: ICSPI Corp, Waterloo, Canada
    Author URL: https://ieeexplore.ieee.org/author/37085511101
    ID: 37085511101
    Order: 3
    Author Affiliations:
    • ICSPI Corp, Waterloo, Canada
    • University of Waterloo, Waterloo, Canada
  • Author Name: Mahdi Olfat
    Affiliation: University of Waterloo, Waterloo, ON, CA
    Author URL: https://ieeexplore.ieee.org/author/37085522105
    ID: 37085522105
    Order: 4
    Author Affiliations:
    • University of Waterloo, Waterloo, ON, CA
  • Author Name: Raafat R. Mansour
    Affiliation: ICSPI Corp, Waterloo, Canada
    Author URL: https://ieeexplore.ieee.org/author/37275744800
    ID: 37275744800
    Order: 5
    Author Affiliations:
    • ICSPI Corp, Waterloo, Canada
    • University of Waterloo, Waterloo, Canada

Image Sensor

• sensor_type: CMOS
• resolution: not specified
• dynamic_range: not specified
• pixel_size: not specified
• dark_current: not specified

Optical Data

• focal_length: not specified
• aperture: not specified
• field_of_view: not specified
• distortion: not specified

Performance Metrics

Applications & Benefits

• cell_imaging: not specified
• benefits: not specified

Supporting Organizations

• supported_by: not specified

Manuscript Details

• publication_date: 24-28 Jan. 2016

Relevancy Score

• score: 1
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging
  • benefits
  • supported_by

Processed JSON Filename

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