A Monolithic Visible Infrared And Terahertz 2D Detector

• doi: 10.1109/ICIMW.2010.5612874
• title: A monolithic visible, infrared and terahertz 2D detector
• publisher: IEEE
• isbn: 978-1-4244-6656-6
• issn: 2162-2035
• partnum: 10EX4313
• rank: 1177
• access_type: LOCKED
• content_type: Conferences
• abstract: A monolithic multispectral detector for imaging in the visible (VIS), infrared (IR) and terahertz (THz) ranges has been designed for operation at room temperature. This sensor is composed of a CMOS readout integrated circuit (ROIC) housing visible photodiodes and of IR and THz microbolometer pixels processed above the CMOS wafer. Without package- and system-level issues, targeted individual pixel sensitivities are respectively an 80dB dynamic range for VIS photodiodes, a NETD=50mK @f/1 for IR and a THz NEP smaller than 10pW. Prototyping chips will be integrated in tri-spectral imaging and THz spectroscopy demonstration systems.
• article_number: 5612874
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5612874
• html_url: https://ieeexplore.ieee.org/document/5612874/
• abstract_url: https://ieeexplore.ieee.org/document/5612874/
• publication_title: 35th International Conference on Infrared, Millimeter, and Terahertz Waves
• conference_location: Rome, Italy
• conference_dates: 5-10 Sept. 2010
• publication_number: 5604263
• is_number: 5612299
• publication_year: 2010
• publication_date: 5-10 Sept. 2010
• start_page: 1
• end_page: 2
• citing_paper_count: 3
• citing_patent_count: 3
• download_count: 465
• insert_date: 20101028
• index_terms:
  • ieee_terms:
    • Pixel
    • Detectors
    • CMOS integrated circuits
    • Imaging
    • Bolometers
    • Temperature sensors
    • Photodiodes
  • dynamic_index_terms:
    • Photodiode
    • Terahertz Spectroscopy
    • Antenna Pattern
    • Readout Circuit
    • Bolometer
• isbn_formats:
  • format: CD, value: 978-1-4244-6656-6, isbnType: New-2005
  • format: Print ISBN, value: 978-1-4244-6655-9, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-4244-6657-3, isbnType: New-2005
• authors:
  • Author Name: Matteo Perenzoni
    Affiliation: Fondazione Bruno Kessler (FBK), Trento, Italy
    Author URL: https://ieeexplore.ieee.org/author/37301008100
    ID: 37301008100
    Order: 1
    Author Affiliations:
    • Fondazione Bruno Kessler (FBK), Trento, Italy
  • Author Name: Nicola Massari
    Affiliation: Fondazione Bruno Kessler (FBK), Trento, Italy
    Author URL: https://ieeexplore.ieee.org/author/37273438300
    ID: 37273438300
    Order: 2
    Author Affiliations:
    • Fondazione Bruno Kessler (FBK), Trento, Italy
  • Author Name: Stéphane Pocas
    Affiliation: CEA LETI, MINATEC, Grenoble, France
    Author URL: https://ieeexplore.ieee.org/author/37320228500
    ID: 37320228500
    Order: 3
    Author Affiliations:
    • CEA LETI, MINATEC, Grenoble, France
  • Author Name: Jérôme Meilhan
    Affiliation: CEA LETI, MINATEC, Grenoble, France
    Author URL: https://ieeexplore.ieee.org/author/38350984600
    ID: 38350984600
    Order: 4
    Author Affiliations:
    • CEA LETI, MINATEC, Grenoble, France
  • Author Name: François Simoens
    Affiliation: CEA LETI, MINATEC, Grenoble, France
    Author URL: https://ieeexplore.ieee.org/author/37566651900
    ID: 37566651900
    Order: 5
    Author Affiliations:
    • CEA LETI, MINATEC, Grenoble, France

Image Sensor

• sensor_type: CMOS
• resolution: 160x160 active IR + VIS pixels, 32x32 THz pixels
• dynamic_range: 80 dB
• pixel_size: 25 μm (IR microbolometer), 50 μm (THz pixels)
• dark_current: Not specified (yet to be measured)

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• sensitivity: NETD=50mK for IR; NEP smaller than 10pW for THz; high dynamic sensitivity for VIS
• power_consumption: Room temperature operation, Peltier module for stabilization, exact values not specified
• noise: 1.65% non-uniformity of readout channels

Applications & Benefits

• cell_imaging: Not specified
• benefits: Multispectral imaging capabilities, suitable for remote sensing, arts study, surveillance, production control, scientific research

Supporting Organizations

• supported_by: EU 7th Framework Program

Manuscript Details

• publication_date: 5-10 Sept. 2010

Relevancy Score

• score: 10
• missing_fields:
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • shutter_speed
  • power_consumption
  • cell_imaging

Processed JSON Filename

request_4c61ee33-134a-46fd-9302-e90c9f66271e-a_monolithic_visible_infrared_and_terahertz_2d_detector.json