A High Performance Active Pixel Sensor With 018Um Cmos Color Imager Technology

• doi: 10.1109/IEDM.2001.979567
• title: A high performance active pixel sensor with 0.18um CMOS color imager technology
• publisher: IEEE
• isbn: 0-7803-7050-3
• issn:
• partnum: 01CH37224
• rank: 1081
• access_type: LOCKED
• content_type: Conferences
• abstract: A high performance 0.18 um CMOS image sensor technology has been successfully developed and fully characterized. 3T active pixel sensor (APS) with non-silicide source/drain process is provided to reduce dark current and increase photoresponse. By optimizing photodiode junction profile with the appropriate thermal cycle, the dark current can be drastically reduced. Small pixel pitch 2.8um/spl sim/4.0um demonstrates the low dark current (less 0.2 fA/pixel), the excellent sensitivity and dynamic range. Especially, the superior standard deviation of dark signal 8.3 mV/sec, will offer a low white pixel technology. The color pixel performance with microlens is also reported in this paper.
• article_number: 979567
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=979567
• html_url: https://ieeexplore.ieee.org/document/979567/
• abstract_url: https://ieeexplore.ieee.org/document/979567/
• publication_title: International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)
• conference_location: Washington, DC, USA
• conference_dates: 2-5 Dec. 2001
• publication_number: 7704
• is_number: 21092
• publication_year: 2001
• publication_date: 2-5 Dec. 2001
• start_page: 24.3.1
• end_page: 24.3.4
• citing_paper_count: 13
• citing_patent_count: 1
• download_count: 1179
• insert_date: 20020807
• index_terms:
  • ieee_terms:
    • CMOS image sensors
    • CMOS technology
    • Pixel
    • Color
    • Lenses
    • Microoptics
    • Computational Intelligence Society
    • Dark current
    • Sensor phenomena and characterization
    • Filters
  • dynamic_index_terms:
    • Sensor Pixel
    • Active Pixel Sensor
    • Dynamic Range
    • Image Sensor
    • Camera Sensor
    • Excellent Sensitivity
    • Dark Current
    • Standard Deviation Of Signal
    • Pixel Pitch
    • Dark Signal
    • Excellent Range
    • Small Pitch
    • Quantum Efficiency
    • Color Filter
    • Silicide
• isbn_formats:
  • format: Print ISBN, value: 0-7803-7050-3, isbnType: Historical
• authors:
  • Author Name: Shou-Gwo Wuu
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087189672
    ID: 37087189672
    Order: 1
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Ho-Ching Chien
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087189449
    ID: 37087189449
    Order: 2
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Dun-Nian Yaung
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087170580
    ID: 37087170580
    Order: 3
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Chien-Hsien Tseng
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087190561
    ID: 37087190561
    Order: 4
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: C.S. Wang
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37280017000
    ID: 37280017000
    Order: 5
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Chin-Kung Chang
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087190752
    ID: 37087190752
    Order: 6
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
  • Author Name: Yu-Kung Hsaio
    Affiliation: Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan
    Author URL: https://ieeexplore.ieee.org/author/37087943119
    ID: 37087943119
    Order: 7
    Author Affiliations:
    • Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, Taiwan

Image Sensor

• sensor_type: CMOS
• resolution: 64x64 pixels
• dynamic_range: 62 dB
• pixel_size: 2.8-4.0 µm
• dark_current: less than 0.2 fA/pixel

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• noise: Random noise in dark environment is less than 1 mV/sec.

Applications & Benefits

• cell_imaging: The technology provides a low white pixel technology benefiting various imaging applications.
• benefits: Offers high sensitivity, low dark current, excellent dynamic range and the possibility of implementation in system-on-chip (SoC) for both consumer and industrial applications.

Supporting Organizations

• supported_by: Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C.

Manuscript Details

• publication_date: 2-5 Dec. 2001

Relevancy Score

• score: 9
• missing_fields:
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption

Processed JSON Filename

request_40b646cc-6f72-47e1-93c5-67f402f36cda-a_high_performance_active_pixel_sensor_with_018um_cmos_color_imager_technology.json