A High Fillfactor Annular Array Of High Frequency Piezoelectric Micromachined Ultrasonic Transducers

• doi: 10.1109/JMEMS.2014.2358991
• title: A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers
• publisher: IEEE
• isbn:
• issn: 1941-0158
• rank: 743
• access_type: LOCKED
• content_type: Journals
• abstract: This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm2, the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO2) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam.
• article_number: 6912934
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6912934
• html_url: https://ieeexplore.ieee.org/document/6912934/
• abstract_url: https://ieeexplore.ieee.org/document/6912934/
• publication_title: Journal of Microelectromechanical Systems
• conference_location:
• conference_dates:
• publication_number: 84
• is_number: 7172569
• publication_year: 2015
• publication_date: Aug. 2015
• start_page: 904
• end_page: 913
• citing_paper_count: 97
• citing_patent_count: 2
• download_count: 3498
• insert_date: 20140929
• index_terms:
  • ieee_terms:
    • Arrays
    • Acoustics
    • Sensitivity
    • Transducers
    • III-V semiconductor materials
    • Stress
    • Resonant frequency
  • author_terms:
    • Aluminum nitride (AlN)
    • piezoelectric
    • ultrasonic
    • transducer
    • micromachined ultrasonic transducer (MUT)
    • piezoelectric MUT (PMUT)
    • Aluminum nitride (AlN)
    • piezoelectric
    • ultrasonic
    • transducer
    • micromachined ultrasonic transducer (MUT)
    • piezoelectric MUT (PMUT)
  • dynamic_index_terms:
    • High Fill Factor
    • Piezoelectric Micromachined Ultrasonic Transducers
    • Micromachined Ultrasonic Transducers
    • Higher Density
    • Resonance Frequency
    • Finite Element Method
    • Center Frequency
    • Ultrasound Imaging
    • Sound Pressure
    • Acoustic Pressure
    • Inertial Measurement Unit
    • Inertial Sensors
    • Pressure Sensitivity
    • Aluminum Nitride
    • Acoustic Beam
    • 3D Images
    • Acoustic Waves
    • Sound Waves
    • Figure Of Merit
    • Pressure Distribution
    • Non-destructive Testing
    • Non-destructive Analysis
    • Non-destructive Evaluation
    • Fill Factor
    • Finite Element Method Simulations
    • Neutral Axis
    • Annular Ring
    • Equivalent Circuit Model
    • Acoustic Impedance
    • DC Bias
    • Mode Shapes
    • Pressure Output
    • Piezoelectric Coefficient
    • Successful Release
• authors:
  • Author Name: Yipeng Lu
    Affiliation: Berkeley Sensor and Actuator Center, University of California at Davis, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37085445079
    ID: 37085445079
    Order: 1
    Author Affiliations:
    • Berkeley Sensor and Actuator Center, University of California at Davis, Davis, CA, USA
  • Author Name: Amir Heidari
    Affiliation: Berkeley Sensor and Actuator Center, University of California at Davis, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37076808000
    ID: 37076808000
    Order: 2
    Author Affiliations:
    • Berkeley Sensor and Actuator Center, University of California at Davis, Davis, CA, USA
  • Author Name: David A. Horsley
    Affiliation: Berkeley Sensor and Actuator Center, University of California at Davis, Davis, CA, USA
    Author URL: https://ieeexplore.ieee.org/author/37372231100
    ID: 37372231100
    Order: 3
    Author Affiliations:
    • Berkeley Sensor and Actuator Center, University of California at Davis, Davis, CA, USA

Image Sensor

• sensor_type: CMOS
• resolution: Not specified
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

Applications & Benefits

• cell_imaging: Not specified
• benefits: Not specified

Supporting Organizations

• supported_by: Not specified

Manuscript Details

• publication_date: Aug. 2015

Relevancy Score

• score: 1
• missing_fields:
  • resolution
  • dynamic_range
  • pixel_size
  • dark_current
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • sensitivity
  • shutter_speed
  • power_consumption
  • noise
  • cell_imaging
  • benefits
  • supported_by

Processed JSON Filename

request_1d5ca85f-341e-46b8-b7c1-a27f3110b31a-a_high_fillfactor_annular_array_of_high_frequency_piezoelectric_micromachined_ultrasonic_transducers.json