64Pixel Solid State Cmos Compatible Ultrasonic Fingerprint Reader

• doi: 10.1109/MEMSYS.2017.7863326
• title: 64-Pixel solid state CMOS compatible ultrasonic fingerprint reader
• publisher: IEEE
• isbn: 978-1-5090-5079-6
• issn:
• rank: 123
• access_type: LOCKED
• content_type: Conferences
• abstract: We report on a 1D linear array of GHz ultrasonic transducers as an ultrasonic impedance imager for fingerprint sensing. This device is based on an all solid state aluminum nitride (AlN) transducer array that eliminates the need for released membranes. Compared to lower frequency (10-50 MHz) ultrasonic sensors, our device uses GHz ultrasonic pulses, generated by driving AlN pixel transducers at resonance with 1.3 GHz RF pulses at a CMOS compatible voltage of 2V. In addition to faster acquisition speed, GHz ultrasonic imaging enables much higher resolution owing to the smaller wavelength by phase driving several pixels. From noise levels of signals and point measurements, we estimate that the ultimate single point resolution possible for the sensor is 15-20 um or ~1700 dpi.
• article_number: 7863326
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7863326
• html_url: https://ieeexplore.ieee.org/document/7863326/
• abstract_url: https://ieeexplore.ieee.org/document/7863326/
• publication_title: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
• conference_location: Las Vegas, NV, USA
• conference_dates: 22-26 Jan. 2017
• publication_number: 7852393
• is_number: 7863316
• publication_year: 2017
• publication_date: 22-26 Jan. 2017
• start_page: 9
• end_page: 12
• citing_paper_count: 23
• citing_patent_count: 1
• download_count: 1190
• insert_date: 20170228
• index_terms:
  • ieee_terms:
    • Transducers
    • Acoustics
    • Silicon
    • Fingerprint recognition
    • Radio frequency
    • Switches
    • Rubber
  • dynamic_index_terms:
    • Linear Array
    • Array Transducer
    • Ultrasonic Sensors
    • Ultrasonic Detection
    • Aluminum Nitride
    • Low-pass
    • Low-pass Filter
    • Actuator
    • Far-field
    • Reflection Coefficient
    • Reflection Loss
    • Wider Region
    • Phased Array
    • Printed Circuit Board
    • Acoustic Signals
    • Acoustic Energy
    • Acoustic Reflection
    • Bond Wires
    • Envelope Detector
    • Sub-pixel Resolution
• isbn_formats:
  • format: Print on Demand(PoD) ISBN, value: 978-1-5090-5079-6, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5090-5078-9, isbnType: New-2005
• authors:
  • Author Name: Justin C. Kuo
    Affiliation: School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA
    Author URL: https://ieeexplore.ieee.org/author/37085395426
    ID: 37085395426
    Order: 1
    Author Affiliations:
    • School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA
  • Author Name: Jason T. Hoople
    Affiliation: School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA
    Author URL: https://ieeexplore.ieee.org/author/37085387073
    ID: 37085387073
    Order: 2
    Author Affiliations:
    • School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA
  • Author Name: Mamdouh Abdelmejeed
    Affiliation: School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA
    Author URL: https://ieeexplore.ieee.org/author/37086092564
    ID: 37086092564
    Order: 3
    Author Affiliations:
    • School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA
  • Author Name: Mohamed Abdel-moneum
    Affiliation: Intel Corporation, USA
    Author URL: https://ieeexplore.ieee.org/author/38285370200
    ID: 38285370200
    Order: 4
    Author Affiliations:
    • Intel Corporation, USA
  • Author Name: Amit Lal
    Affiliation: School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA
    Author URL: https://ieeexplore.ieee.org/author/37276734200
    ID: 37276734200
    Order: 5
    Author Affiliations:
    • School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA

Image Sensor

• sensor_type: Ultrasonic
• resolution: 64 pixels (1D array)
• dynamic_range: Not specified
• pixel_size: Not specified
• dark_current: Not specified

Optical Data

• focal_length: Not specified
• aperture: Not specified
• field_of_view: Not specified
• distortion: Not specified

Performance Metrics

• noise: 20 mV equivalent displacement of 15-20 µm

Applications & Benefits

• cell_imaging: Not applicable
• benefits: High resolution (~1700 dpi) due to GHz frequency imaging and small pixel size.

Supporting Organizations

• supported_by: Cornell Nanoscale Facility, Intel Corporation

Manuscript Details

• publication_date: 22-26 Jan. 2017

Relevancy Score

• score: 1
• missing_fields:
  • fill factor
  • quantum efficiency
  • readout speed
  • noise sources
  • analog-to-digital conversion techniques
  • microlenses
  • on-chip colour filters
  • shutter types
  • backside illumination

Processed JSON Filename

request_54ef0107-44e0-4947-9f69-c3eeabb30a4f-64pixel_solid_state_cmos_compatible_ultrasonic_fingerprint_reader.json