128 96 Pixelparallel Threedimensional Integrated Cmos Image Sensors With 16Bit Ad Converters By Direct Bonding With Embedded Au Electrodes

• doi: 10.1109/S3S.2015.7333539
• title: 128 × 96 Pixel-parallel three-dimensional integrated CMOS image sensors with 16-bit A/D converters: By direct bonding with embedded Au electrodes
• publisher: IEEE
• isbn: 978-1-5090-0258-0
• issn:
• rank: 21
• access_type: LOCKED
• content_type: Conferences
• abstract: We demonstrate for the first time the operation of 128 × 96 pixel-parallel three-dimensional (3D) integrated CMOS image sensors with 16-bit A/D converters (ADCs). 3D integration of the photodiode (PD), pulse-frequency-modulation (PFM) ADCs and 16-bit counters were implemented within every pixel by utilizing direct bonding with embedded Au electrodes in a SiO2 insulator. We designed an in-pixel charge-transfer circuit suitable for the PFM-ADC to obtain high sensitivity. The developed sensor successfully confirmed its excellent linearity with a dynamic range of 96 dB, corresponding to a 16-bit value. We also captured 128 × 96 pixel-parallel video images constructed from the 16-bit outputs, demonstrating the feasibility of ultimate imaging devices for the next-generation.
• article_number: 7333539
• pdf_url: https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7333539
• html_url: https://ieeexplore.ieee.org/document/7333539/
• abstract_url: https://ieeexplore.ieee.org/document/7333539/
• publication_title: 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)
• conference_location: Rohnert Park, CA, USA
• conference_dates: 5-8 Oct. 2015
• publication_number: 7321935
• is_number: 7333477
• publication_year: 2015
• publication_date: 5-8 Oct. 2015
• start_page: 1
• end_page: 2
• citing_paper_count: 5
• citing_patent_count: 0
• download_count: 249
• insert_date: 20151123
• index_terms:
  • ieee_terms:
    • Gold
    • Three-dimensional displays
    • CMOS image sensors
    • Electrodes
    • Dynamic range
    • Bonding
    • Radiation detectors
  • dynamic_index_terms:
    • Image Sensor
    • Camera Sensor
    • Au Electrode
    • Analog-to-digital Converter
    • Analog-to-digital
    • Digital-to-analog Converter
    • Video Images
    • Excellent Linearity
    • 3D Integration
    • Upper Layer
    • Lower Layer
    • Sensor Pixel
• isbn_formats:
  • format: USB ISBN, value: 978-1-5090-0258-0, isbnType: New-2005
  • format: Electronic ISBN, value: 978-1-5090-0259-7, isbnType: New-2005
• authors:
  • Author Name: Masahide Goto
    Affiliation: NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37330360100
    ID: 37330360100
    Order: 1
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
  • Author Name: Kei Hagiwara
    Affiliation: NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37399139900
    ID: 37399139900
    Order: 2
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
  • Author Name: Yuki Honda
    Affiliation: NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37588911000
    ID: 37588911000
    Order: 3
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
  • Author Name: Masakazu Nanba
    Affiliation: NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37283665600
    ID: 37283665600
    Order: 4
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
  • Author Name: Hiroshi Ohtake
    Affiliation: NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37331518200
    ID: 37331518200
    Order: 5
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
  • Author Name: Yoshinori Iguchi
    Affiliation: NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37429827800
    ID: 37429827800
    Order: 6
    Author Affiliations:
    • NHK Science and Technology Research Laboratories, Setagaya-ku, Tokyo, Japan
  • Author Name: Takuya Saraya
    Affiliation: University of Tokyo, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37293949700
    ID: 37293949700
    Order: 7
    Author Affiliations:
    • University of Tokyo, Tokyo, Japan
  • Author Name: Masaharu Kobayashi
    Affiliation: University of Tokyo, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37085444063
    ID: 37085444063
    Order: 8
    Author Affiliations:
    • University of Tokyo, Tokyo, Japan
  • Author Name: Eiji Higurashi
    Affiliation: University of Tokyo, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37265713900
    ID: 37265713900
    Order: 9
    Author Affiliations:
    • University of Tokyo, Tokyo, Japan
  • Author Name: Hiroshi Toshiyoshi
    Affiliation: University of Tokyo, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37274513000
    ID: 37274513000
    Order: 10
    Author Affiliations:
    • University of Tokyo, Tokyo, Japan
  • Author Name: Toshiro Hiramoto
    Affiliation: University of Tokyo, Tokyo, Japan
    Author URL: https://ieeexplore.ieee.org/author/37268252200
    ID: 37268252200
    Order: 11
    Author Affiliations:
    • University of Tokyo, Tokyo, Japan

Image Sensor

• sensor_type: CMOS
• resolution: 128×96
• dynamic_range: 96 dB
• pixel_size: 80 μm
• dark_current: not specified

Optical Data

• focal_length: not specified
• aperture: not specified
• field_of_view: not specified
• distortion: not specified

Performance Metrics

• sensitivity: 0.1 lx

Applications & Benefits

• cell_imaging: High-performance image sensors suitable for next-generation imaging applications.
• benefits: Improved image quality through high sensitivity, excellent linearity, and wide dynamic range.

Supporting Organizations

• supported_by: NHK Science and Technology Research Laboratories, The University of Tokyo

Manuscript Details

• publication_date: 5-8 Oct. 2015

Relevancy Score

• score: 10
• missing_fields:
  • focal_length
  • aperture
  • field_of_view
  • distortion
  • frame_rate
  • signal_to_noise_ratio
  • shutter_speed
  • power_consumption
  • noise

Processed JSON Filename

request_03161855-9532-483f-bd5e-06e84d4dc169-128__96_pixelparallel_threedimensional_integrated_cmos_image_sensors_with_16bit_ad_converters_by_direct_bonding_with_embedded_au_electrodes.json